JPH0456750U - - Google Patents
Info
- Publication number
- JPH0456750U JPH0456750U JP9964690U JP9964690U JPH0456750U JP H0456750 U JPH0456750 U JP H0456750U JP 9964690 U JP9964690 U JP 9964690U JP 9964690 U JP9964690 U JP 9964690U JP H0456750 U JPH0456750 U JP H0456750U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- tank
- rotation mechanism
- evaporation apparatus
- vacuum evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 239000000725 suspension Substances 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990099646U JPH0740524Y2 (ja) | 1990-09-20 | 1990-09-20 | 連続成膜方式の真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990099646U JPH0740524Y2 (ja) | 1990-09-20 | 1990-09-20 | 連続成膜方式の真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0456750U true JPH0456750U (enExample) | 1992-05-15 |
| JPH0740524Y2 JPH0740524Y2 (ja) | 1995-09-20 |
Family
ID=31841718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990099646U Expired - Lifetime JPH0740524Y2 (ja) | 1990-09-20 | 1990-09-20 | 連続成膜方式の真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740524Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3001961U (ja) * | 1994-03-14 | 1994-09-06 | 鈴木合金株式会社 | 段差走行輪を備えた車椅子、老人用走行車、運搬台車等の走行車 |
-
1990
- 1990-09-20 JP JP1990099646U patent/JPH0740524Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3001961U (ja) * | 1994-03-14 | 1994-09-06 | 鈴木合金株式会社 | 段差走行輪を備えた車椅子、老人用走行車、運搬台車等の走行車 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0740524Y2 (ja) | 1995-09-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |