JPH0456749U - - Google Patents
Info
- Publication number
- JPH0456749U JPH0456749U JP10037490U JP10037490U JPH0456749U JP H0456749 U JPH0456749 U JP H0456749U JP 10037490 U JP10037490 U JP 10037490U JP 10037490 U JP10037490 U JP 10037490U JP H0456749 U JPH0456749 U JP H0456749U
- Authority
- JP
- Japan
- Prior art keywords
- suction head
- substrate
- holding device
- substrate holding
- detachment ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例に係る基板保持装
置を示すものであり、Ａはその平面図、Ｂはその
線−に沿う断面図である。第２図は、離脱リ
ングを部分的に上下動させる手段の他の例を示す
斜視図である。第３図は従来の基板保持装置の一
例を示すものであり、Ａはその平面図、Ｂはその
線−に沿う断面図である。
２……基板、４……吸着ヘツド、６……ベース
、８……離脱リング。
FIG. 1 shows a substrate holding device according to an embodiment of this invention, in which A is a plan view thereof and B is a sectional view taken along the line -. FIG. 2 is a perspective view showing another example of means for partially moving the detachment ring up and down. FIG. 3 shows an example of a conventional substrate holding device, in which A is a plan view thereof and B is a sectional view taken along the line -. 2...Substrate, 4...Adsorption head, 6...Base, 8...Removal ring.
Claims (1)
この吸着ヘツドを支持するベースとを備える基板
保持装置において、前記吸着ヘツドを取り囲むよ
うに、かつ当該吸着ヘツドに吸着されている基板
の周縁部の後方に位置するように、環状の離脱リ
ングを配置し、かつこの離脱リングを部分的に上
下動させるようにしたことを特徴とする基板保持
装置。 a suction head that adsorbs the substrate using static electricity;
In a substrate holding device that includes a base that supports this suction head, an annular detachment ring is arranged to surround the suction head and to be located behind the peripheral edge of the substrate that is suctioned by the suction head. A substrate holding device characterized in that the detachment ring is partially moved up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10037490U JPH0726360Y2 (en) | 1990-09-25 | 1990-09-25 | Substrate holding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10037490U JPH0726360Y2 (en) | 1990-09-25 | 1990-09-25 | Substrate holding device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0456749U true JPH0456749U (en) | 1992-05-15 |
| JPH0726360Y2 JPH0726360Y2 (en) | 1995-06-14 |
Family
ID=31842979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10037490U Expired - Lifetime JPH0726360Y2 (en) | 1990-09-25 | 1990-09-25 | Substrate holding device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726360Y2 (en) |
-
1990
- 1990-09-25 JP JP10037490U patent/JPH0726360Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0726360Y2 (en) | 1995-06-14 |