JPH0456478B2 - - Google Patents
Info
- Publication number
- JPH0456478B2 JPH0456478B2 JP58008411A JP841183A JPH0456478B2 JP H0456478 B2 JPH0456478 B2 JP H0456478B2 JP 58008411 A JP58008411 A JP 58008411A JP 841183 A JP841183 A JP 841183A JP H0456478 B2 JPH0456478 B2 JP H0456478B2
- Authority
- JP
- Japan
- Prior art keywords
- window
- laser
- laser oscillator
- brieuster
- oscillator according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000002470 thermal conductor Substances 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000012790 adhesive layer Substances 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は安定な出力を生じるブリユースタ窓の
ついた外部鏡型のレーザ発振器に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an external mirror type laser oscillator with a Brieuster window that produces a stable output.
従来例の構成とその問題点
外部鏡共振器レーザはレーザ管と、精密な光学
調整を必要とする光学共振器の分離にその特徴が
あり、レーザ管に高度の気密性と長時間にわたる
高温下での前処理が必要とされる封止管ガスレー
ザの場合には極めて有用な技術であると云える。
この場合ガスレーザ管には気密性確保のための窓
が必要となり、これには反射防止膜付垂直入射窓
とブリユースタ角入射のブリユースタ窓の双方が
使用される。CO2レーザの様に10.6μの遠赤外領
域において高出力発振するレーザに対しては現在
では十分なる耐久性を有する反射放止膜が入手で
きないのでZnSeから成るブリユースタ窓を発明
者は従来用いて来た。CO2レーザの場合の従来の
レーザ発振器の構成図を第１図に示す。CO2レー
ザ技術は公知であるので同図では本発明の説明に
必要最少限の部分であるレーザ管１、冷却水用ジ
ヤケツト２、ZnSeなどのブリユースタ窓３及び
４、出力結合鏡５、全反射鏡６のみを示し、他は
省略した。従来技術である本技術は出力15W以下
の領域では極めて満足すべき動作を示したが15W
以上の出力領域では次に述べる困難を呈した。即
ち出力結合鏡５及び全反射鏡６の調整を十分に行
つてレーザ発振を行うと、レーザ出力は一旦は最
大値を示すが、直ちに低下を始め、約１分後には
出力は初期値の20％に低下してしまう。出力結合
鏡５或いは全反射鏡６の一方を回転軸が入射面に
垂直なる方向で調整すると、出力は再度最大値を
示すが、やがて再び低下してしまう。こうした光
学調整をずつとつづけて最大出力を追いかけると
第２図の様になる。この間、回転軸が入射面内に
含まれる方向については、一切調整のずれが生じ
なかつた。第２図には前記した回転軸のまわりの
鏡のかたむきをオートコリメータで測定した値を
付記した。第２図によると不安定な釣合があり、
その前後をシーソーゲームの如く反復して往復し
ていることが分る。これでは鏡面に自動調整追尾
装置をつけるのでなければ、最大出力値を維持す
ることは出来ない。Conventional structure and its problems External mirror resonator lasers are characterized by the separation of the laser tube and the optical resonator, which requires precise optical adjustment. This technique can be said to be extremely useful in the case of sealed tube gas lasers that require pretreatment.
In this case, the gas laser tube requires a window to ensure airtightness, and both a normal incidence window with an anti-reflection coating and a Brieuster window with Brieuster angle incidence are used for this purpose. For lasers such as CO 2 lasers that oscillate at high output in the far infrared region of 10.6μ, anti-reflection films with sufficient durability are not available at present, so the inventor used a Brieustar window made of ZnSe. I came. FIG. 1 shows a configuration diagram of a conventional laser oscillator for a CO 2 laser. Since the CO 2 laser technology is well known, the figure shows the minimum parts necessary for explaining the present invention: the laser tube 1, the cooling water jacket 2, the Breustar windows 3 and 4 made of ZnSe, etc., the output coupling mirror 5, and the total reflection. Only mirror 6 is shown and the others are omitted. This technology, which is a conventional technology, showed extremely satisfactory operation in the region of output of 15W or less, but at 15W
In the above output range, the following difficulties were encountered. That is, when the output coupling mirror 5 and the total reflection mirror 6 are sufficiently adjusted and laser oscillation is performed, the laser output once reaches its maximum value, but immediately begins to decrease, and after about 1 minute, the output reaches its initial value of 20 %. When one of the output coupling mirror 5 and the total reflection mirror 6 is adjusted in a direction in which the axis of rotation is perpendicular to the plane of incidence, the output again reaches its maximum value, but then decreases again. If you continue to make these optical adjustments one by one to reach the maximum output, you will end up with something like Figure 2. During this time, no adjustment deviation occurred in the direction in which the axis of rotation was included in the plane of incidence. In FIG. 2, the values of the deflection of the mirror around the rotation axis mentioned above, measured using an autocollimator, are added. According to Figure 2, there is an unstable equilibrium,
You can see that it goes back and forth repeatedly like a seesaw game. With this, the maximum output value cannot be maintained unless an automatic adjustment tracking device is attached to the mirror surface.
本発明者は前記出力不安定現象の発生メカニズ
ムについて検討した結果、同現象は次の二段階複
合現象であることは明らかにされた。 As a result of studying the mechanism by which the aforementioned output instability phenomenon occurs, the inventors of the present invention have found that the phenomenon is a two-stage complex phenomenon as described below.
第３図にその説明のために、従来技術のレーザ
管の端部に位置するブリユースタ窓付近の拡大図
を示す。 For the purpose of explanation, FIG. 3 shows an enlarged view of the vicinity of the Brieuxta window located at the end of a conventional laser tube.
() 第３図で４はZnSeなどのブリユースタ窓、
７はトールシールなどの接着剤層、８はガラス
或いは石英などのレーザ、９はレーザビーム、
１０はレーザ管中心軸、１１はレーザビーム中
心軸で共振器によつて決定されるものである。
CO2レーザでは出力を出来るだけで大きくする
様、平面フアブリー・ペローに近い共振器型式
を用いるので、同図の如くレーザビームは管一
ぱいに拡がつている。二つの軸１０，１１が正
確には一致しないからレーザビームの一部は同
図に示す如く接着剤層７とガラス材８でカツト
されている。ブリユースタ窓４は吸収係数が
10-3cm-1と透明体であるがレーザ管８及び接着
剤７は10.6μではほぼ完全な吸収体であるので、
レーザビーム９の吸収によつて加熱され、ブリ
ユースタ窓４も熱伝導によつて加熱される。
ZnSeブリユースタ窓４が100℃以上に加熱され
ることが往々にして測定された。() In Fig. 3, 4 is a Brieusta window made of ZnSe, etc.
7 is an adhesive layer such as Thor Seal, 8 is a laser made of glass or quartz, 9 is a laser beam,
10 is the central axis of the laser tube, and 11 is the central axis of the laser beam determined by the resonator.
In order to maximize the output of the CO 2 laser, a resonator type similar to a planar Fabry-Perot is used, so the laser beam spreads across the entire tube as shown in the figure. Since the two axes 10 and 11 do not exactly coincide, a portion of the laser beam is cut off by the adhesive layer 7 and the glass material 8 as shown in the figure. The absorption coefficient of Brieusta window 4 is
Although the laser tube 8 and adhesive 7 are transparent at 10 -3 cm -1 , they are almost perfect absorbers at 10.6μ.
It is heated by the absorption of the laser beam 9, and the Brewster window 4 is also heated by thermal conduction.
It has been measured that the ZnSe Brieusta window 4 is often heated to over 100°C.
() ブリユースタ窓４が加熱される時、前記し
た回転軸のまわりのアラインメントが敏速に影
響されることが確認された。これはブリユース
タ窓４内での屈折現象に原因を有する現象であ
ると判断される。() It has been confirmed that when the Breustar window 4 is heated, the alignment around the axis of rotation mentioned above is quickly affected. It is determined that this is a phenomenon caused by the refraction phenomenon within the Brieuster window 4.
前記の不安定性は上記した（）、（）二種類
の複合現象であり、第３図に示すレーザビーム一
部のカツトはレーザ管端部から鏡面迄の距離が長
い程、或いは又多段折返共振器において顕著であ
ることが推論される。 The above-mentioned instability is a composite phenomenon of the two types () and () mentioned above, and the cut of a part of the laser beam shown in Fig. 3 becomes more pronounced as the distance from the end of the laser tube to the mirror surface becomes longer, or due to multistage folding resonance. It is inferred that this is noticeable in the vessel.
発明の目的
本発明の目的は、ブリユースタ窓のついたレー
ザ発振器において前記した出力不安定現象の発生
を防止し、光学調整を一度行つただけで長期間出
力を一定値に安定せしめ、レーザ発振器操作性の
改良をはかることにある。Purpose of the Invention The purpose of the present invention is to prevent the occurrence of the above-mentioned output instability phenomenon in a laser oscillator equipped with a Breustar window, stabilize the output at a constant value for a long period of time with just one optical adjustment, and operate the laser oscillator. The aim is to improve sexuality.
発明の構成
本発明は上記目的を達成するためになされたも
ので、レーザ放電管の端面にブリユースタ窓を設
け、外部鏡により共振、増幅されるように構成さ
れており、レーザビーム方向から見た同窓の透明
断面の外側に位置する不透明部分に回折によりレ
ーザビームが照射されることを防止し、不透明部
分のレーザビーム吸収による温度上昇とそれによ
つて惹起されるブリユースタ窓の温度上昇を防止
するようにしたレーザ発振器を提供するものであ
る。Structure of the Invention The present invention has been made to achieve the above object, and is configured such that a Brieustar window is provided on the end face of a laser discharge tube so that resonance and amplification is achieved by an external mirror, and the laser discharge tube is configured to resonate and amplify. This prevents the laser beam from being irradiated by diffraction to the opaque part located outside the transparent cross section of the window, and prevents the temperature rise due to absorption of the laser beam in the opaque part and the temperature rise of the Breustar window caused by this. The present invention provides a laser oscillator with the following features.
実施例の説明
本発明の第１の実施例はレーザビームの断面を
ブリユースタ窓の有効透明断面以上にならない様
に遮蔽板を用いて遮蔽し、ブリユースタ窓の透明
領域の外側の不透明領域におけるレーザビーム吸
収を防止し、ブリユースタ窓近傍での発熱に原因
するブリユースタ窓自体の温度上昇を防止する構
成を有する。レーザビーム断面の絞り込みはこれ
とは別に反射鏡曲率を小さくし、共焦点共振器に
代表される球面鏡共振器の採用によつても実現さ
れるが、これはレーザ管内活性領域に比較してモ
ード体積を減少させ、レーザ出力および効率の双
方の低下を招くので本発明の意図する所ではな
い。DESCRIPTION OF THE EMBODIMENTS In the first embodiment of the present invention, a shielding plate is used to shield the cross section of the laser beam so that it does not exceed the effective transparent cross section of the Brieusta window, and the laser beam in the opaque area outside the transparent area of the Brieusta window is It has a structure that prevents absorption and prevents a rise in temperature of the Brewster window itself caused by heat generation in the vicinity of the Brewster window. Separately, narrowing down the laser beam cross section is also achieved by reducing the reflector curvature and using a spherical mirror resonator, such as a confocal resonator. This is not the intention of the present invention since it would reduce the volume, resulting in a reduction in both laser output and efficiency.
第４図に本発明の第１の実施例としてのレーザ
発振器の主要部を示す。第３図と共通なる部分の
説明は省略するが、本実施例ではブリユースタ窓
４の上に反射体から成る遮蔽板１２（斜線部）が
設置されている。遮蔽板１２は屈折を含めて第４
図に示す如くレーザ管８の内径とレーザビーム方
向から見て同一の断面形状の開口を有する様に作
られている。即ち惰円形の開口１３を有してい
る。この開口付遮蔽板１２の働きは左方向からの
ビームに対しては作用せず、右方向からのビーム
に対して接着層７に入るレーザビームを反射させ
てしまい接着層７でのレーザビーム吸収による温
度上昇を防止することにある。この遮蔽板１２は
アルミ、銅、金、銀など高い反射率を有する材料
から作られる。機械工作で作製した薄板を設置し
たものでもよいし、ブリユースタ窓４表面上に蒸
着などで形成してもよい。或いはレーザビームの
波長で高い反射率を有する誘電体多層膜でも良
い。この場合は特に高電圧の危険防止にもなり安
全である。又、反射率もより高くすることができ
る。この遮蔽板１２が設置されるとき、ブリユー
スタ窓４は直接レーザビームを吸収する他熱発生
がないので、透過率の十分高い材料を選べは発熱
を十分抑えることができる。 FIG. 4 shows the main parts of a laser oscillator as a first embodiment of the present invention. Although a description of the parts common to those in FIG. 3 will be omitted, in this embodiment, a shielding plate 12 (shaded area) made of a reflector is installed above the Brewster window 4. The shielding plate 12 has a fourth
As shown in the figure, the opening has the same cross-sectional shape as the inner diameter of the laser tube 8 when viewed from the laser beam direction. That is, it has a circular opening 13. The apertured shielding plate 12 does not act on the beam coming from the left, but reflects the laser beam entering the adhesive layer 7 against the beam coming from the right, and the adhesive layer 7 absorbs the laser beam. The purpose is to prevent temperature rise due to This shielding plate 12 is made of a material with high reflectance, such as aluminum, copper, gold, or silver. It may be a thin plate made by mechanical work, or it may be formed on the surface of the Brieuxta window 4 by vapor deposition or the like. Alternatively, a dielectric multilayer film having high reflectivity at the wavelength of the laser beam may be used. In this case, it is especially safe because it prevents dangers of high voltage. Moreover, the reflectance can also be made higher. When this shielding plate 12 is installed, the Breustar window 4 directly absorbs the laser beam and does not generate heat, so if a material with sufficiently high transmittance is selected, heat generation can be sufficiently suppressed.
本発明の第２の実施例を第５図に示す。第４図
と共通の部分の説明は省略して説明すると、金属
の遮蔽板１２とブリユースタ窓４の間に熱の不良
導体層１４が介在している。これは第４図の方式
では高反射金属の遮蔽板と云えどもレーザビーム
に接触する時その一部を吸収し、室温より約20℃
加熱され、この発熱量がブリユースタ窓４に伝導
していくが、本実施例の場合にはこのようなこと
は防止できる。 A second embodiment of the invention is shown in FIG. A description of the parts common to those in FIG. 4 will be omitted, but a poor thermal conductor layer 14 is interposed between the metal shielding plate 12 and the Brieusta window 4. This is because in the method shown in Figure 4, even though the shielding plate is made of highly reflective metal, it absorbs some of the laser beam when it comes into contact with it, and the temperature is about 20°C below room temperature.
Although it is heated and the generated heat is conducted to the Brewster window 4, this can be prevented in the case of this embodiment.
本発明の第３の実施例を第６図に示す。 A third embodiment of the invention is shown in FIG.
本実施例ではブリユースタ窓４は金属製窓ホル
ダー１８を介在させてレーザ管１５に設置されて
いる。１７および７はそれぞれレーザ管１５とホ
ルダー１８およびホルダー１８と窓４間の接着剤
層である。レーザ管１５は二重管構造で冷却水１
６によつて冷却されている。従つて窓４はこの冷
却水１６によつて間接冷却されていることにな
り、第１および第２の実施例よりも更に高出力レ
ーザビームに対しても安定性の確保が可能になつ
ている。この実施例では開口は窓ホルダーの外周
に設けられたキヤツプ１９の底面に設けられてお
り、第６図では２０で示されている。この場合も
前記した実施例と等しく、ブリユースタ窓４での
屈折を考慮した上でレーザビーム方向から見た時
開口断面形状がレーザ管１５内断面形状と等しく
なる様になつている。この実施例では遮蔽の機能
を果たすキヤツプ１９はブリユースタ窓４と接触
していないので発熱があつてもよく、ためにレー
ザ光をよく吸収する非金属で作ることができる。
前記した実施例と異なりこの場合にはレーザ光の
反射がないのでレーザ発振器の取扱い上より安全
な方法と云うことができる。 In this embodiment, the Brewster window 4 is installed in the laser tube 15 with a metal window holder 18 interposed therebetween. 17 and 7 are adhesive layers between the laser tube 15 and the holder 18, and between the holder 18 and the window 4, respectively. The laser tube 15 has a double tube structure and has cooling water 1.
6. Therefore, the window 4 is indirectly cooled by the cooling water 16, making it possible to ensure stability even against a higher output laser beam than in the first and second embodiments. . In this embodiment, the opening is provided in the bottom surface of a cap 19 provided on the outer periphery of the window holder, and is indicated at 20 in FIG. In this case as well, as in the embodiment described above, the cross-sectional shape of the aperture is made to be the same as the internal cross-sectional shape of the laser tube 15 when viewed from the laser beam direction, taking into account the refraction at the Brieuster window 4. In this embodiment, the cap 19, which performs the shielding function, is not in contact with the Brewster window 4 and may generate heat, so it can be made of a non-metal that absorbs laser light well.
Unlike the above-mentioned embodiments, in this case there is no reflection of the laser beam, so it can be said that this method is safer in handling the laser oscillator.
本発明はレーザ管内径に比較してブリユースタ
窓をふくむレーザ管端部の径を十分大きくするこ
とによつても実現できる。この時レーザビームは
レーザ放電管の直径によつて制限されるので多少
のビームの拡がりがあつても不透明部分は十分ビ
ームから離れた所に位置し加熱を生じない。 The present invention can also be realized by making the diameter of the end of the laser tube including the Brieuster window sufficiently larger than the inner diameter of the laser tube. At this time, the laser beam is limited by the diameter of the laser discharge tube, so even if the beam spreads to some extent, the opaque portion is located sufficiently far from the beam and no heating occurs.
第７図に本発明の第４の実施例を示す。 FIG. 7 shows a fourth embodiment of the present invention.
本実施例ではレーザ管８のブリユースタ窓４の
貼りつけ部分の径を大きくしてあり、ブリユース
タ窓４上の遮蔽板は用いられていない。レーザビ
ーム径はレーザ管８の内径によつて制限されるの
で前記した多少の拡がりがあつたとしてもレーザ
管８端部のふくらみが十分であれば接着剤層７な
どの不透明部にレーザビームが照射されることは
ない。不透明部分でレーザビームに触れるのは第
７図に示すレーザ管８のくびれ部分であるがこの
部分の温度が上昇しても不安定性の原因となるこ
とはない。この実施例はレーザ管構造をやや複雑
にするがレーザ管がこの構造に作られている時に
は遮蔽板のとりつけ精度に気を配る必要もないし
高電圧の危険性もないなどの利点がある。 In this embodiment, the diameter of the portion of the laser tube 8 to which the Brieuxta window 4 is attached is increased, and a shielding plate on the Brieuxta window 4 is not used. The laser beam diameter is limited by the inner diameter of the laser tube 8, so even if there is some expansion as described above, if the end of the laser tube 8 has a sufficient bulge, the laser beam will reach the opaque area such as the adhesive layer 7. It will not be irradiated. The opaque part that comes into contact with the laser beam is the constriction of the laser tube 8 shown in FIG. 7, but even if the temperature of this part increases, it will not cause instability. Although this embodiment makes the laser tube structure a little more complicated, when the laser tube is made with this structure, there is an advantage that there is no need to pay attention to the accuracy of mounting the shield plate, and there is no risk of high voltage.
第８図に本発明の第５の実施例を示す
本実施例ではブリユースタ窓４の遮蔽板もレー
ザ管８端部のふくらみも不要であり、ただしレー
ザ管８内にレーザビーム径を制約するレーザ光に
不透明な材料から成る絞り２１が設けられてい
る。この時レーザビーム径はレーザ管８の内径よ
り十分小さなものにして、前記した拡がりが生じ
たとしても接着剤層７にレーザ光の照射がない様
にする。この時レーザ管構造の単純さは維持で
き、且つ遮蔽板の存在による高電圧の危険性も回
避できて都合がよい。しかしながら放電領域の体
積に比較して絞りの効果によりモード体積が減少
するので出力及び効率に若干の低下が見られると
云う欠点はある。 FIG. 8 shows a fifth embodiment of the present invention. In this embodiment, neither the shielding plate of the Brieuster window 4 nor the bulge at the end of the laser tube 8 is required. A diaphragm 21 made of a material opaque to light is provided. At this time, the diameter of the laser beam is made sufficiently smaller than the inner diameter of the laser tube 8 so that even if the above-mentioned expansion occurs, the adhesive layer 7 is not irradiated with the laser beam. At this time, the simplicity of the laser tube structure can be maintained, and the risk of high voltage due to the presence of the shielding plate can be avoided, which is advantageous. However, there is a drawback in that the mode volume is reduced due to the aperture effect compared to the volume of the discharge region, resulting in a slight decrease in output and efficiency.
以上５種の具体的な実施例を示したが、本発明
はこれらの実施例に限定されることなく本発明の
主旨はブリユースタ窓接着層や放電管端部材料等
の不透明領域によるレーザビーム吸収を防止する
ような構成であれば他の構成であつても良い。 Although the above five specific embodiments have been shown, the present invention is not limited to these embodiments, but the gist of the present invention is to absorb laser beams by opaque areas such as the Brieusta window adhesive layer and the end material of the discharge tube. Any other configuration may be used as long as it prevents this.
発明の効果
以上のように本発明はレーザ放電管の端面にブ
リユースタ窓を設け、外部鏡により共振、増幅さ
れるように構成されており、前記外部鏡からの反
射ビームがレーザ放電管端面とブリユースタ窓と
対向する不透明領域に照射されるのを防止したも
ので、不透明領域のレーザビーム吸収による温度
上昇及びそれによるブリユースタ窓の温度上昇を
防止することができ、レーザ発振器を高度の安定
性を維持しながら発振させることが出来てその効
果は大きい。又本発明によればコストの大巾な上
昇を招くことなく、且つ出力や効率を犠牲にする
こともなく便利である。Effects of the Invention As described above, the present invention is configured such that a Breustar window is provided on the end face of a laser discharge tube, and is resonated and amplified by an external mirror, so that the reflected beam from the external mirror is transmitted between the end face of the laser discharge tube and the Breustar window. This prevents the opaque area facing the window from being irradiated, and prevents the temperature rise due to absorption of the laser beam in the opaque area and the resulting temperature rise of the Brieusta window, maintaining a high degree of stability for the laser oscillator. The effect is great because it can oscillate while moving. Further, the present invention is convenient without causing a large increase in cost and without sacrificing output or efficiency.
又本発明の一部の実施例では高い安全性を保証
するなど工業上の効果に著るしいものがあると云
える。 Moreover, it can be said that some embodiments of the present invention have remarkable industrial effects, such as guaranteeing high safety.
第１図はブリユースタ窓はレーザ管を用いた従
来の外部鏡方式レーザ発振器の構成図、第２図は
第１図の構成のレーザで発生する出力不安定現象
の特性図、第３図は上記不安定現象のメカニズム
を説明するレーザ管端部の拡大図、第４図、第５
図、第６図、第７図及び第８図は本発明の実施例
としてのレーザ発振器のレーザ管端部の拡大図で
ある。
１，８，１５……レーザ管、２……冷却水用ジ
ヤケツト、３，４……ブリユースタ窓、５，６…
…光学系を構成する反射鏡、７……ブリユースタ
窓用接着層、９……レーザビーム、１０……共振
器中心軸、１１……レーザビーム中心軸、１２…
…開口付遮蔽板、１３……同板に設けられた楕円
形開口、１４……遮蔽板とブリユースタ窓間に介
在する熱不良導体層、１６……冷却水、１７……
ブリユースタ窓ホルダー用接着剤層、１８……ブ
リユースタ窓ホルダー、１９……同用キヤツプ兼
遮蔽板、２０……キヤツプ上に設けた円形開口、
２１……レーザ管内に設けられた絞り。
Figure 1 is a diagram of the configuration of a conventional external mirror type laser oscillator using a laser tube as the Brieusta window, Figure 2 is a characteristic diagram of the output instability phenomenon that occurs in the laser with the configuration shown in Figure 1, and Figure 3 is the above Enlarged views of the laser tube end explaining the mechanism of instability phenomenon, Figures 4 and 5
6, 7, and 8 are enlarged views of the laser tube end of a laser oscillator as an embodiment of the present invention. 1, 8, 15... Laser tube, 2... Cooling water jacket, 3, 4... Brewster window, 5, 6...
...Reflecting mirror constituting the optical system, 7...Adhesive layer for Brieusta window, 9...Laser beam, 10...Resonator center axis, 11...Laser beam center axis, 12...
...Shielding plate with an opening, 13...Oval opening provided in the same plate, 14...Heat failure conductor layer interposed between the shielding plate and the Brieusta window, 16...Cooling water, 17...
Adhesive layer for Brieusta window holder, 18... Brieusta window holder, 19... Cap and shielding plate for the same purpose, 20... Circular opening provided on the cap,
21...A diaphragm provided inside the laser tube.
Claims (1)
け、前記ブリユースタ窓を通過したビームを全反
射鏡及び出力結合鏡により反射するように構成さ
れており、全反射鏡及び出力結合鏡により反射さ
れたビームが、レーザ放電管端面とブリユースタ
窓とではさまれ、かつ前記ビームに対して、前記
ビームが不透明な領域に照射されるのを防止する
ために、前記ブリユースタ窓の全反射鏡又は出力
結合鏡側の表面上に、遮蔽手段を設けたことを特
徴とするレーザ発振器。 ２ 遮蔽手段が、高反射率体からなることを特徴
とする特許請求の範囲第１項記載のレーザ発振
器。 ３ 遮蔽手段が、蒸着膜であることを特徴とする
特許請求の範囲第１項又は第２項記載のレーザ発
振器。 ４ 蒸着膜が、金、銀、銅、アルミニウムのうち
のいずれかであることを特徴とする特許請求の範
囲第３項記載のレーザ発振器。 ５ 蒸着膜が、誘電体膜であることを特徴とする
特許請求の範囲第４項記載のレーザ発振器。 ６ 遮蔽手段が、熱の不良導体層上に高反射率体
を設けた複合構成であることを特徴とする特許請
求の範囲第１項又は第３項記載のレーザ発振器。 ７ 遮蔽手段が、ブリユースタ窓から隔離されて
設けられた開口を有する不透明体であり、前記ブ
リユースタ膜は、強制的に冷却されることを特徴
とする特許請求の範囲第１項記載のレーザ発振
器。[Scope of Claims] 1. A Brieuster window is provided on the end face of the laser discharge tube, and the beam passing through the Brieuster window is reflected by a total reflection mirror and an output coupling mirror. The beam reflected by the laser discharge tube is sandwiched between the end face of the laser discharge tube and the Brieuxta window, and in order to prevent the beam from irradiating an opaque area, a total reflection mirror of the Brieuxta window is provided. Alternatively, a laser oscillator characterized in that a shielding means is provided on the surface on the output coupling mirror side. 2. The laser oscillator according to claim 1, wherein the shielding means is made of a highly reflective material. 3. The laser oscillator according to claim 1 or 2, wherein the shielding means is a deposited film. 4. The laser oscillator according to claim 3, wherein the deposited film is one of gold, silver, copper, and aluminum. 5. The laser oscillator according to claim 4, wherein the deposited film is a dielectric film. 6. The laser oscillator according to claim 1 or 3, wherein the shielding means has a composite structure in which a highly reflective material is provided on a poor thermal conductor layer. 7. The laser oscillator according to claim 1, wherein the shielding means is an opaque body having an opening provided isolated from the Brieuster window, and the Brieuster film is forcibly cooled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP841183A JPS59134886A (en) | 1983-01-20 | 1983-01-20 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP841183A JPS59134886A (en) | 1983-01-20 | 1983-01-20 | Laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59134886A JPS59134886A (en) | 1984-08-02 |
| JPH0456478B2 true JPH0456478B2 (en) | 1992-09-08 |
Family
ID=11692398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP841183A Granted JPS59134886A (en) | 1983-01-20 | 1983-01-20 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59134886A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3717823A (en) * | 1971-09-20 | 1973-02-20 | Sperry Rand Corp | Metal-glass laser window assembly |
| JPS4917694A (en) * | 1972-04-03 | 1974-02-16 | ||
| JPS5424275A (en) * | 1977-07-27 | 1979-02-23 | Hitachi Ltd | Liquefying method for hydrogen |
| JPS55124289A (en) * | 1979-03-16 | 1980-09-25 | Matsushita Electric Ind Co Ltd | Gas laser |
| JPS56153785A (en) * | 1980-04-30 | 1981-11-27 | Matsushita Electric Ind Co Ltd | Gas laser |
| JPS5830181A (en) * | 1981-08-17 | 1983-02-22 | Nec Corp | Ion laser device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55167672U (en) * | 1979-05-16 | 1980-12-02 | ||
| JPS57157162U (en) * | 1981-03-25 | 1982-10-02 |
-
1983
- 1983-01-20 JP JP841183A patent/JPS59134886A/en active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3717823A (en) * | 1971-09-20 | 1973-02-20 | Sperry Rand Corp | Metal-glass laser window assembly |
| JPS4917694A (en) * | 1972-04-03 | 1974-02-16 | ||
| JPS5424275A (en) * | 1977-07-27 | 1979-02-23 | Hitachi Ltd | Liquefying method for hydrogen |
| JPS55124289A (en) * | 1979-03-16 | 1980-09-25 | Matsushita Electric Ind Co Ltd | Gas laser |
| JPS56153785A (en) * | 1980-04-30 | 1981-11-27 | Matsushita Electric Ind Co Ltd | Gas laser |
| JPS5830181A (en) * | 1981-08-17 | 1983-02-22 | Nec Corp | Ion laser device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59134886A (en) | 1984-08-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5267252A (en) | Solid-state laser device comprising a temperature-controlled thermal conductive support | |
| US4847851A (en) | Butt-coupled single transverse mode diode pumped laser | |
| US3555450A (en) | Laser window having a metallic frame arranged to permit post optical grinding and polishing | |
| US4208636A (en) | Laser apparatus | |
| EP0044791B1 (en) | Device for the detection of infrared radiation | |
| US5450429A (en) | Efficient linear frequency doubled solid-state laser | |
| US4225826A (en) | Laser apparatus | |
| US4887270A (en) | Continuous wave, frequency doubled solid state laser systems with stabilized output | |
| JPH0456478B2 (en) | ||
| US4340969A (en) | Laser apparatus | |
| US6289029B1 (en) | Solid state laser | |
| JPS5861692A (en) | Semiconductor laser device | |
| US4023119A (en) | Laser output coupler | |
| JPS60247983A (en) | Erbium laser oscillator | |
| US3532417A (en) | Noninverting optical reflecting device | |
| CN111244734A (en) | Mid-infrared single-mode laser | |
| KR950002068B1 (en) | Second harmonic generating system and method | |
| US4961202A (en) | Single line laser and method | |
| JPH0786673A (en) | Gas laser oscillator | |
| JP2526946B2 (en) | Laser device | |
| JP2674309B2 (en) | Semiconductor laser pumped solid state laser | |
| JP2570253B2 (en) | Laser beam resonator system and laser beam transmission system | |
| JPS6037628B2 (en) | gas laser oscillator | |
| JPS58160901A (en) | Optical fiber for infrared ray | |
| KR100360474B1 (en) | Second harmonic generator |