JPH045644Y2 - - Google Patents

Description

[Detailed description of the invention] <Industrial application field> The present invention relates to a support device for metal floor panels in double floors, and is particularly applicable to free access floors (floating floors) in so-called clean rooms of factories that manufacture ultra-LSI devices. This invention relates to a support device for metal floor panels that are laid and formed.

<Conventional technology and its problems> Clean rooms in factories that manufacture ultra-LSI devices require high precision in the process of manufacturing semiconductor elements. However, conventionally, the floor panels that form the free access floor (floating floor) of this type of clean room are supported on the pedestals of support legs that are arranged in a grid pattern on the foundation floor of the building and are adjacent on all sides. A four-point support structure in which the four corners of the floor panel A are supported by the four corners of the floor panel A, that is, each of the installed floor panels A is adjacent to each other with only the four corner corners supported by the support legs. butt edge a1
The surrounding edges including the two are just adjacent to each other in a free state. Therefore, when the transport robot that transports and sets semiconductor substrates from IC manufacturing equipment installed in the process of manufacturing semiconductor devices to IC manufacturing equipment runs, when it passes over the abutting edge a1 of adjacent floor panels A, , only one floor panel A on which the wheels 9 of the transport robot are mounted is bent by the load of the robot, and a step is created between the abutting edge a1 with the other floor panel A on which the wheels 9 are not mounted, and the wheels 9 are bent. As shown in Figure 5, the other side of the floor panel A, which is opposite to one side around the floor panel A on which it is placed, lifts up and sways (the abutment edge on the right side in the drawing), which causes vibrations and causes IC manufacturing. This has become a major problem in the semiconductor device manufacturing industry as it has adversely affected the accuracy of electron beam or focused ion beam irradiation of IC manufacturing equipment.

Therefore, the four corners of the floor panel are not only supported by being placed on the pedestals of the support legs that are arranged in a grid pattern on the foundation floor surface and are adjacent on all sides, but also around the surroundings of the adjacent floor panels. For example, horizontal holes are provided in the peripheral ribs of each side that are integrally provided around the back side of a so-called aluminum floor panel made of die-cast integral molding, and when installing the floor panel, bolts etc. are inserted between the horizontal holes of adjacent floor panels. By inserting pins and fastening with nuts, a double floor structure is proposed in which the entire floor panels forming the floor can be connected and supported, or the floor panels of the necessary floor parts can be selectively connected and supported. It has been published (Akira Jitsukai)
53-123818).

However, with this conventional connection support structure, floor panels may fall off due to vibrations (lateral shaking or vertical movement, etc.) applied to the free access floor due to earthquakes, etc., and the abutting edge of one of the adjacent floor panels may It was devised as a technical problem to prevent the robot from rising when it rests on the abutting edge of the floor panel, so when the transport robot passes over the abutting edge of the floor panel, the abutting edge The connection support function cannot be fully demonstrated against the load applied from directly above, and therefore only one floor panel, on which the wheels of the transport robot are mounted, bends under the load of the robot, causing the robot to ride on it. A step will be created between the edge that meets the other floor panel that is not covered.

In other words, horizontal holes, so-called bolt insertion holes, are generally drilled with a hole diameter larger than the diameter of the bolt, and in the case of the above conventional structure, horizontal holes are provided in the peripheral ribs of adjacent floor panels. Since it is necessary to pass the bolt in a bridge-like manner between both horizontal holes, the hole diameter is made larger in consideration of workability so that even if there is a slight misalignment between the two horizontal holes, the bolt can be passed smoothly. At the same time, the conventional support structure connects and supports both floor panels only at the midway portion in the thickness direction of the floor panel where the horizontal hole is bored. Therefore, if a load is applied from directly above, only the abutting edge of one floor panel on which the wheels of the transport robot are mounted will be affected by the gap (clearance) between the horizontal hole and the bolt on the other floor panel on which no wheels are mounted. Since the floor panels have the possibility of moving (shifting) downward relative to the abutting edges of the floor panels, it is not possible to completely and reliably prevent a difference in level from occurring between the abutting edges of adjacent floor panels.

<Problem to be solved by the invention> The problem to be solved by the invention is that when a traveling transport robot passes over the abutting edges of adjacent floor panels, there is a slight difference in level between the abutting edges. The goal is to prevent this from happening.

<Means for solving the problem> The technical means taken by the present invention to solve the above problem is that each support leg is mounted and supported on a pedestal that is erected in a grid pattern on the foundation floor. The upper pressure-receiving part is placed between the lower surfaces of each abutting edge of the adjacent floor panels, and is screwed and fixed with a connecting bolt to an embedded nut that is positioned between the bottom surfaces of each side of the floor panel and attached to the bottom surface. The present invention is characterized in that it has a substantially inverted T-shaped cross section, including a lower connecting portion and a support portion that securely supports the upper pressure receiving portion on the lower connecting portion.

<Function> According to the above-mentioned technical means of the present invention, each side of the adjacent floor panels is screwed and fixed with a connecting bolt to an embedded nut provided in the bottom surface, and a mounting device is provided between the bottom surfaces. The lower connecting part connects the lower surfaces, and the abutting edge is directly supported by the upper pressure receiving part at the upper end of the support part provided perpendicularly to the thickness direction of the floor panel from the lower connecting part. be done.

<Example> An example of the present invention will be described based on the drawings.
The floor panel A is a well-known metal so-called steel panel formed by welding a back plate A3 whose periphery is bent and raised to a front plate A2 cut into a rectangular shape using a steel plate, etc., and is used for the concrete foundation floor of a building. On the pedestal c1 of the supporting legs C adjacent on all sides, which are arranged in a grid pattern at intervals of one side width of the floor panel A on the surface B via the fixing plate c3, the four corners, and in the drawing, the abutting edges. Place and support the four corners of the lower surface of a1 to form the clean room floor a.
A support device 1 is provided as a fixture between the lower surfaces of each side of the periphery of adjacent floor panels A, and a leg connection member 2 is provided as a fixture from the support leg C to the bottom surface of the corner of the floor panel A.

The support device 1 is an IC installed on a floor surface a by interconnecting each side of the periphery of adjacent floor panels A.
When the transport robot that transports and sets semiconductor substrates from manufacturing equipment to IC manufacturing equipment is running, when the wheels 9 of the transport robot pass over the abutting edges a1 of adjacent floor panels A, there is a gap between the abutting edges a1. an upper pressure receiving part 101 that serves to support the abutting edge a1 by pushing it up directly from below so that no step occurs, and abuts between the lower surfaces of each side abutting edge a1 of adjacent floor panels A; A lower connecting part 102 that is located between the bottom surfaces of the floor panel A and fixed by screwing, and a lower connecting part 102 that fixes and supports the upper pressure receiving part 101 to the lower connecting part 102 perpendicularly to the thickness direction of the floor panel A. The support portion 103 is formed into a substantially inverted T-shape in cross section. The height of the support part 103 is formed higher than the thickness of the floor panel A, and the lower connecting part 102 is screwed into the embedded nut 3 attached to the bottom surface of the floor panel A, that is, the back plate a3. Make sure that there is enough space to tighten the connecting bolt 4 (see Figure 3).

Further, bolt insertion holes 5 for connecting bolts 4 are bored on both sides of the lower connecting portion 102 of the support device 1 in the length direction at appropriate intervals.

The embedded nuts 3 are integrally embedded in the edge portion of the back plate a3 on the bottom surface of each side of the floor panel A at intervals of the bolt insertion holes 5.

The leg connecting member 2 connects and supports each corner of the four floor panels A mounted and supported on the pedestal c1 of the supporting leg C, so that the wheels 9 of the transport robot pass over the abutting edge a1. When the wheels 9 of the transport robot ride on the abutting edge a1 of one side of the floor panel A, the opposing abutting edge a1 of the other side of the floor panel A should not be lifted up, that is, the other side of the floor panel A. The holding plate 201 serves to prevent the side corners from lifting up from the pedestal c1 of the support leg C, and has a cylindrical screw hole 6 in the center and is screwed and fixed to the screw c2 of each support leg C. , the lower end is screwed and fixed to this holding plate 201 with a fastening nut 7, and raised toward each bottom corner of the four floor panels A,
The fourth connecting hook 202 is made up of four connecting hooks 202 whose upper end bent portions are inserted into and latched into the latching holes 8 provided at the corner bottom surface of the floor panel A, that is, the corner portions of the back plate a3.
In the figure, the corners of the floor panel A are connected and supported by the support legs C to prevent it from rising off the pedestal c1. Thereby, the floor panel A by means of the support device 1
The synergistic effect with the connected support on each side of the periphery completely eliminates and stabilizes all the problems that cause vibrations, namely the step between the abutting edges a1 and the lifting of the panel corner from the top of the support leg C and the pedestal c1. It will have a double floor structure.

According to this embodiment, the four corners of the support legs C are mounted and supported on the pedestals c1 of the support legs C, which are erected on the foundation floor B in a grid pattern at intervals of the width of each side of the floor panel A. Each corner of the floor panels A that have been laid is connected and supported by each support leg C using a leg connecting member 2 to prevent the panel corners from lifting up, and as shown in FIG. The lower connecting portion 102 of the support device 1 is screwed and fixed with the connecting bolt 4 to each embedded nut 3 that is integrally embedded in the back surface of each side of the floor panels A that are adjacent in parallel in the direction of the installation line. A support device 1 is provided across the lower surface of each side of the floor panel A. At this time, the connecting bolt 4 is tightened to the point where the upper pressure receiving part 101 that is in contact between the lower surfaces of each side abutting edge a1 acts to push up the abutting edge a1 upward, and the abutting edge a1 is directly pushed from below. At the same time, when the transport robot passes over the abutting edge a1 of the floor panel A, the load is transferred from the upper pressure receiving part 101 to the lower connecting part 10 via the supporting part 103.
2, and is transmitted from the lower connecting portion 102 to the bottom surface of the floor panel A via the connecting bolt 3 so that it is received and supported. Thereby, the amount of deflection of the abutting edge a1 due to the load of the transport robot can be suppressed, and the abutting edge a1 of the floor panel A on which the wheels 9 of the transport robot are not mounted can be
is made to correspond to the deflection of the abutting edge a1 of the floor panel A on which the wheels 9 are mounted. In other words, the load of the transport robot is applied to the floor panel A on which the wheels 9 are not mounted in substantially the same way as on the floor panel A on which the wheels 9 are mounted, thereby reducing the cause of vibrations between the abutting edges a1 of the adjacent floor panels A. Make sure that even the slightest difference in level does not occur.

In the above embodiment, the supporting structure of the floor panels A is described in detail in which only the adjacent floor panels A are connected and supported by the support device 1 on the line where the travel path D of the transport robot is installed. Although the peripheral sides of all the floor panels A that form the floor surface a are connected, the length of the support device 1 is approximately the same as the width of one side of the floor panel A to the extent that it does not touch the pedestal c1 of the support leg C. Of course, it is also possible to form it into a length and connect each side of the periphery of the floor panel A.

In the figure, reference numeral 10 denotes a well-known stringer (crossbeam) that is suspended horizontally between the pedestals c1 of each support leg C in order to prevent the support leg C from overturning.

<Effects of the invention> Since the supporting device for the metal floor panel in the double floor of the invention is constructed as described above, it exhibits the following effects.

An upper pressure receiving part that extends between the lower surfaces of each side abutting edge of adjacent floor panels and directly supports and holds the abutting edge from below, and an upper pressure receiving part that is located between each side and bottom surface of the floor panel and is screwed and fixed to the bottom surface. The lower part of the support device is configured to have a substantially inverted T-shape in cross section, and a support part provided perpendicularly to the thickness direction of the floor panel from the lower connecting part that firmly supports the upper pressure receiving part on the lower connecting part. The connecting portion is screwed and fixed with a connecting bolt to an embedded nut provided on the bottom of each side of the adjacent floor panels, and a support device is provided between the lower surfaces of the connecting portion to connect and support each side of the adjacent floor panels. Therefore, there is no need to provide a horizontal hole in order to insert a bolt between adjacent floor panels for fastening and support as in the conventional case. Therefore, it is possible to completely prevent the occurrence of a step between the abutting edges of the floor panel due to the gap (clearance) between the bolt and the horizontal hole. The abutting edge can be directly supported and held from below by the upper pressure receiving part at the upper end of the support part provided perpendicularly to the support part.

Therefore, according to the support device of the present invention, as a support form (structure) in which the abutting edges of adjacent floor panels are directly supported and held from below by the upper pressure receiving part, the load when the transfer robot passes is applied. By suppressing the amount of deflection of the abutting edge and making the abutting edge of the floor panel on which the wheels of the transport robot are not mounted correspond to the deflection of the abutting edge of the floor panel on which the wheels are mounted, even slight differences in level can be completely eliminated. It is possible to reliably prevent vibration from occurring.

Thus, the intended purpose can be achieved.

[Brief explanation of the drawing]

The drawings show an example of the implementation of the supporting device for metal floor panels in the double floor of the present invention, in which Fig. 1 is a plan view with a part cut away, Fig. 2 is a longitudinal sectional view of the same, and Fig. 3 is a cross-sectional view of the same. FIG. 1 is an enlarged cross-sectional view taken along the line "--" FIG. 4 is an enlarged cross-sectional view taken along the "--" line in FIG. 1, and FIG. 5 is a schematic diagram showing a conventional example. In addition, in the figure A...floor panel, a1...butting edge, a
2... Surface plate, a3... Back plate, 1... Support device,
101... Upper pressure receiving part, 102... Lower connecting part,
103... Support part, 3... Embedded nut, 4...
Connection bolt, B...Foundation floor surface, C...Support leg, c
1...pedestal, c2...screw rod, c3...fixing plate.

Claims (1)

[Scope of utility model registration request] Support legs are arranged in a grid pattern on the foundation floor,
In a double floor structure in which the corner of a metal floor panel is made by welding a back plate with its circumference bent and raised up to a face plate and supported on the pedestal of each support leg, adjacent floor panels an upper pressure-receiving part that abuts between the lower surfaces of each side of the abutting edge of the floor panel; a lower connecting part that is positioned between the bottom surfaces of each side of the floor panel and is screwed and fixed to an embedded nut attached to the bottom surface with a connecting bolt; 1. A support device for a metal floor panel in a double floor, characterized in that it is configured to have a substantially inverted T-shape in cross section, including a lower connecting portion and a supporting portion that firmly supports the upper pressure receiving portion.