JPH04563B2 - - Google Patents
Info
- Publication number
- JPH04563B2 JPH04563B2 JP17344983A JP17344983A JPH04563B2 JP H04563 B2 JPH04563 B2 JP H04563B2 JP 17344983 A JP17344983 A JP 17344983A JP 17344983 A JP17344983 A JP 17344983A JP H04563 B2 JPH04563 B2 JP H04563B2
- Authority
- JP
- Japan
- Prior art keywords
- tisi
- batio
- glass frit
- powder
- thick film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 29
- 229910008484 TiSi Inorganic materials 0.000 claims description 23
- 239000000843 powder Substances 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 3
- 229910008479 TiSi2 Inorganic materials 0.000 claims description 2
- DFJQEGUNXWZVAH-UHFFFAOYSA-N bis($l^{2}-silanylidene)titanium Chemical compound [Si]=[Ti]=[Si] DFJQEGUNXWZVAH-UHFFFAOYSA-N 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 18
- 239000010408 film Substances 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- 239000002482 conductive additive Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 3
- 229940088601 alpha-terpineol Drugs 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17344983A JPS6064404A (ja) | 1983-09-19 | 1983-09-19 | 厚膜型正特性半導体素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17344983A JPS6064404A (ja) | 1983-09-19 | 1983-09-19 | 厚膜型正特性半導体素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6064404A JPS6064404A (ja) | 1985-04-13 |
| JPH04563B2 true JPH04563B2 (fr) | 1992-01-08 |
Family
ID=15960675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17344983A Granted JPS6064404A (ja) | 1983-09-19 | 1983-09-19 | 厚膜型正特性半導体素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6064404A (fr) |
-
1983
- 1983-09-19 JP JP17344983A patent/JPS6064404A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6064404A (ja) | 1985-04-13 |
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