JPH0456330U - - Google Patents
Info
- Publication number
- JPH0456330U JPH0456330U JP9998390U JP9998390U JPH0456330U JP H0456330 U JPH0456330 U JP H0456330U JP 9998390 U JP9998390 U JP 9998390U JP 9998390 U JP9998390 U JP 9998390U JP H0456330 U JPH0456330 U JP H0456330U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- section
- ion implantation
- rotates
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims 4
- 230000032258 transport Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998390U JPH0456330U (cs) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998390U JPH0456330U (cs) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0456330U true JPH0456330U (cs) | 1992-05-14 |
Family
ID=31842293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9998390U Pending JPH0456330U (cs) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0456330U (cs) |
-
1990
- 1990-09-25 JP JP9998390U patent/JPH0456330U/ja active Pending
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