JPH0455542B2 - - Google Patents
Info
- Publication number
- JPH0455542B2 JPH0455542B2 JP63170690A JP17069088A JPH0455542B2 JP H0455542 B2 JPH0455542 B2 JP H0455542B2 JP 63170690 A JP63170690 A JP 63170690A JP 17069088 A JP17069088 A JP 17069088A JP H0455542 B2 JPH0455542 B2 JP H0455542B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diffused
- resistance layer
- semiconductor
- bridge circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002706 hydrostatic effect Effects 0.000 claims description 33
- 239000004065 semiconductor Substances 0.000 claims description 22
- 239000013078 crystal Substances 0.000 claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 230000003068 static effect Effects 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 41
- 239000012530 fluid Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000009931 pascalization Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 229910015365 Au—Si Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17069088A JPS6427275A (en) | 1988-07-08 | 1988-07-08 | Semiconductor pressure measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17069088A JPS6427275A (en) | 1988-07-08 | 1988-07-08 | Semiconductor pressure measuring apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6427275A JPS6427275A (en) | 1989-01-30 |
| JPH0455542B2 true JPH0455542B2 (fr) | 1992-09-03 |
Family
ID=15909590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17069088A Granted JPS6427275A (en) | 1988-07-08 | 1988-07-08 | Semiconductor pressure measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6427275A (fr) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03218412A (ja) * | 1990-01-24 | 1991-09-26 | Rohm Co Ltd | 角度センサ |
| JP2689744B2 (ja) * | 1990-03-19 | 1997-12-10 | 株式会社日立製作所 | 複合センサとそれを用いた複合伝送器とプラントシステム |
| DE502004011268D1 (de) * | 2004-09-24 | 2010-07-22 | Grundfos As | Drucksensor |
| US7554666B2 (en) * | 2006-05-25 | 2009-06-30 | Ric Investments, Llc. | Sensor with optical pressure transducer and method of manufacturing a sensor component |
| DE102012102020A1 (de) * | 2012-03-09 | 2013-09-12 | Epcos Ag | Mikromechanisches Messelement |
| JP6318760B2 (ja) * | 2014-03-25 | 2018-05-09 | セイコーエプソン株式会社 | 物理量センサー、高度計、電子機器および移動体 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5016486A (fr) * | 1973-06-11 | 1975-02-21 | ||
| JPS5182680A (fr) * | 1974-11-27 | 1976-07-20 | Itt |
-
1988
- 1988-07-08 JP JP17069088A patent/JPS6427275A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5016486A (fr) * | 1973-06-11 | 1975-02-21 | ||
| JPS5182680A (fr) * | 1974-11-27 | 1976-07-20 | Itt |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6427275A (en) | 1989-01-30 |
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