JPH0455308A - 多結晶シリコンシート原板の製造方法 - Google Patents
多結晶シリコンシート原板の製造方法Info
- Publication number
- JPH0455308A JPH0455308A JP16634890A JP16634890A JPH0455308A JP H0455308 A JPH0455308 A JP H0455308A JP 16634890 A JP16634890 A JP 16634890A JP 16634890 A JP16634890 A JP 16634890A JP H0455308 A JPH0455308 A JP H0455308A
- Authority
- JP
- Japan
- Prior art keywords
- mold
- susceptor
- silicon
- molten silicon
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 65
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 65
- 239000010703 silicon Substances 0.000 title claims abstract description 65
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000000463 material Substances 0.000 claims abstract description 6
- 238000000465 moulding Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 2
- 238000002347 injection Methods 0.000 abstract description 8
- 239000007924 injection Substances 0.000 abstract description 8
- 239000007789 gas Substances 0.000 description 9
- 239000011261 inert gas Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 210000000936 intestine Anatomy 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16634890A JPH0455308A (ja) | 1990-06-25 | 1990-06-25 | 多結晶シリコンシート原板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16634890A JPH0455308A (ja) | 1990-06-25 | 1990-06-25 | 多結晶シリコンシート原板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0455308A true JPH0455308A (ja) | 1992-02-24 |
| JPH0479971B2 JPH0479971B2 (enrdf_load_stackoverflow) | 1992-12-17 |
Family
ID=15829715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16634890A Granted JPH0455308A (ja) | 1990-06-25 | 1990-06-25 | 多結晶シリコンシート原板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455308A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001342015A (ja) * | 2000-05-29 | 2001-12-11 | Takeo Kuroko | 太陽電池用シリコン結晶の製造装置および方法 |
-
1990
- 1990-06-25 JP JP16634890A patent/JPH0455308A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001342015A (ja) * | 2000-05-29 | 2001-12-11 | Takeo Kuroko | 太陽電池用シリコン結晶の製造装置および方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0479971B2 (enrdf_load_stackoverflow) | 1992-12-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |