JPH0455042U - - Google Patents
Info
- Publication number
- JPH0455042U JPH0455042U JP9830890U JP9830890U JPH0455042U JP H0455042 U JPH0455042 U JP H0455042U JP 9830890 U JP9830890 U JP 9830890U JP 9830890 U JP9830890 U JP 9830890U JP H0455042 U JPH0455042 U JP H0455042U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- phase shifter
- photomask
- light
- alignment accuracy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 19
- 230000010363 phase shift Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 9
- 238000007796 conventional method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9830890U JP2551102Y2 (ja) | 1990-09-19 | 1990-09-19 | 位相シフト層を有するフォトマスク |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9830890U JP2551102Y2 (ja) | 1990-09-19 | 1990-09-19 | 位相シフト層を有するフォトマスク |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0455042U true JPH0455042U (US07922777-20110412-C00004.png) | 1992-05-12 |
JP2551102Y2 JP2551102Y2 (ja) | 1997-10-22 |
Family
ID=31839385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9830890U Expired - Lifetime JP2551102Y2 (ja) | 1990-09-19 | 1990-09-19 | 位相シフト層を有するフォトマスク |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2551102Y2 (US07922777-20110412-C00004.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06308712A (ja) * | 1993-02-17 | 1994-11-04 | Nec Corp | 位相シフトマスクおよびその検査方法 |
-
1990
- 1990-09-19 JP JP9830890U patent/JP2551102Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06308712A (ja) * | 1993-02-17 | 1994-11-04 | Nec Corp | 位相シフトマスクおよびその検査方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2551102Y2 (ja) | 1997-10-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |