JPH0454823Y2 - - Google Patents
Info
- Publication number
- JPH0454823Y2 JPH0454823Y2 JP7465786U JP7465786U JPH0454823Y2 JP H0454823 Y2 JPH0454823 Y2 JP H0454823Y2 JP 7465786 U JP7465786 U JP 7465786U JP 7465786 U JP7465786 U JP 7465786U JP H0454823 Y2 JPH0454823 Y2 JP H0454823Y2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- processing stage
- stage plate
- processed
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000395 magnesium oxide Substances 0.000 claims description 4
- MUJOIMFVNIBMKC-UHFFFAOYSA-N fludioxonil Chemical compound C=12OC(F)(F)OC2=CC=CC=1C1=CNC=C1C#N MUJOIMFVNIBMKC-UHFFFAOYSA-N 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Control Of Resistance Heating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7465786U JPH0454823Y2 (enrdf_load_stackoverflow) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7465786U JPH0454823Y2 (enrdf_load_stackoverflow) | 1986-05-20 | 1986-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62187626U JPS62187626U (enrdf_load_stackoverflow) | 1987-11-28 |
| JPH0454823Y2 true JPH0454823Y2 (enrdf_load_stackoverflow) | 1992-12-22 |
Family
ID=30920072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7465786U Expired JPH0454823Y2 (enrdf_load_stackoverflow) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0454823Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-05-20 JP JP7465786U patent/JPH0454823Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62187626U (enrdf_load_stackoverflow) | 1987-11-28 |
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