JPH045393U - - Google Patents

Info

Publication number
JPH045393U
JPH045393U JP4614590U JP4614590U JPH045393U JP H045393 U JPH045393 U JP H045393U JP 4614590 U JP4614590 U JP 4614590U JP 4614590 U JP4614590 U JP 4614590U JP H045393 U JPH045393 U JP H045393U
Authority
JP
Japan
Prior art keywords
wafer
position corresponding
transporting
sensors
mounting stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4614590U
Other languages
English (en)
Other versions
JP2501329Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990046145U priority Critical patent/JP2501329Y2/ja
Publication of JPH045393U publication Critical patent/JPH045393U/ja
Application granted granted Critical
Publication of JP2501329Y2 publication Critical patent/JP2501329Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図はこの考案の実施例のウエーハ搬送ロボ
ツトの平面図、第２図は従来のウエーハ搬送ロボ
ツトの平面図である。 １……ウエーハ検出センサ、２……ウエーハ搭
載ステージ、３……センサ固定金具、４……ウエ
ーハ、５……位置決め用プレート、６……検出窓
、７……ロボツトアーム。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空管内のウエーハの搬送において、ウエーハ
    搭載ステージのウエーハ中央部対応位置とウエー
    ハ外周部対応位置に、それぞれ感度の異なつたセ
    ンサを配置したことを特徴とするウエーハ搬送ロ
    ボツト。
JP1990046145U 1990-04-26 1990-04-26 ウェ―ハ搬送ロボット Expired - Fee Related JP2501329Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990046145U JP2501329Y2 (ja) 1990-04-26 1990-04-26 ウェ―ハ搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990046145U JP2501329Y2 (ja) 1990-04-26 1990-04-26 ウェ―ハ搬送ロボット

Publications (2)

Publication Number Publication Date
JPH045393U true JPH045393U (ja) 1992-01-17
JP2501329Y2 JP2501329Y2 (ja) 1996-06-19

Family

ID=31560966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990046145U Expired - Fee Related JP2501329Y2 (ja) 1990-04-26 1990-04-26 ウェ―ハ搬送ロボット

Country Status (1)

Country Link
JP (1) JP2501329Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153788U (ja) * 1984-03-21 1985-10-14 シャープ株式会社 位置検知センサ付ロボツトハンド

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153788U (ja) * 1984-03-21 1985-10-14 シャープ株式会社 位置検知センサ付ロボツトハンド

Also Published As

Publication number Publication date
JP2501329Y2 (ja) 1996-06-19

Similar Documents

Publication Publication Date Title
JPS60153788U (ja) 位置検知センサ付ロボツトハンド
JPH0385326U (ja)
JPH045393U (ja)
JPS61153345U (ja)
JPH0215285U (ja)
JPS62141711U (ja)
JPS63178331U (ja)
JPH0189339U (ja)
JPH045645U (ja)
JPH0470748U (ja)
JPH03106727U (ja)
JPH0465462U (ja)
JPH0235003U (ja)
JPS63147820U (ja)
JPH029438U (ja)
JPH0451609U (ja)
JPS61183714U (ja)
JPH0353556U (ja)
JPS6339942U (ja)
JPS63134543U (ja)
JPS6262752U (ja)
JPS63182535U (ja)
JPH03109351U (ja)
JPH01118334U (ja)
JPH0197228U (ja)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees