JPH0453242B2 - - Google Patents
Info
- Publication number
- JPH0453242B2 JPH0453242B2 JP59206415A JP20641584A JPH0453242B2 JP H0453242 B2 JPH0453242 B2 JP H0453242B2 JP 59206415 A JP59206415 A JP 59206415A JP 20641584 A JP20641584 A JP 20641584A JP H0453242 B2 JPH0453242 B2 JP H0453242B2
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- light
- lens
- optical path
- path length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 106
- 230000010287 polarization Effects 0.000 claims abstract description 29
- 238000012360 testing method Methods 0.000 claims description 22
- 230000008859 change Effects 0.000 claims description 7
- 238000012790 confirmation Methods 0.000 claims description 7
- 230000004907 flux Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 13
- 238000012545 processing Methods 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 241000282326 Felis catus Species 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical group C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/35—Mechanical variable delay line
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59206415A JPS6184506A (ja) | 1984-10-03 | 1984-10-03 | 光路長測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59206415A JPS6184506A (ja) | 1984-10-03 | 1984-10-03 | 光路長測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184506A JPS6184506A (ja) | 1986-04-30 |
| JPH0453242B2 true JPH0453242B2 (zh) | 1992-08-26 |
Family
ID=16522986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59206415A Granted JPS6184506A (ja) | 1984-10-03 | 1984-10-03 | 光路長測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6184506A (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4233336C2 (de) * | 1992-10-05 | 2001-08-23 | Zeiss Carl | Verfahren und Vorrichtung zur Detektion von Fokusablagen |
| JP5188127B2 (ja) * | 2007-09-14 | 2013-04-24 | キヤノン株式会社 | 絶対位置の計測装置および計測方法 |
-
1984
- 1984-10-03 JP JP59206415A patent/JPS6184506A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6184506A (ja) | 1986-04-30 |
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