JPH0453165A - Image read out device - Google Patents

Image read out device

Info

Publication number
JPH0453165A
JPH0453165A JP2157645A JP15764590A JPH0453165A JP H0453165 A JPH0453165 A JP H0453165A JP 2157645 A JP2157645 A JP 2157645A JP 15764590 A JP15764590 A JP 15764590A JP H0453165 A JPH0453165 A JP H0453165A
Authority
JP
Japan
Prior art keywords
light
luminous
light receiving
receiving element
transmitting window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2157645A
Other languages
Japanese (ja)
Inventor
Masao Funada
雅夫 舟田
Kiichi Yamada
紀一 山田
Kazuhisa Ando
和久 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP2157645A priority Critical patent/JPH0453165A/en
Priority to US07/593,971 priority patent/US5101099A/en
Priority to DE69030574T priority patent/DE69030574T2/en
Priority to EP90119594A priority patent/EP0461302B1/en
Priority to EP96110663A priority patent/EP0740349A3/en
Priority to KR1019900016313A priority patent/KR920001910A/en
Publication of JPH0453165A publication Critical patent/JPH0453165A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/024Details of scanning heads ; Means for illuminating the original
    • H04N1/028Details of scanning heads ; Means for illuminating the original for picture information pick-up
    • H04N1/02815Means for illuminating the original, not specific to a particular type of pick-up head
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof

Abstract

PURPOSE:To shield light being directly incident from a luminous layer to respective light receiving parts, for preventing an increase in dark output by making an EL. luminous element part of a peripheral guide s part of a light transmitting window, which guides luminous light from the EL, luminous element reflected on the manuscript surface to a light receiving element non-luminous. CONSTITUTION:An EL, luminous element 4 forms a transparent electrode 41 consisting of ITO or the like on an EL, substrate 11, and thereon an insulating layer 42 and a luminous layer 43 are formed, further thereon the insulating layer 42 and opaque electrodes 44, consisting of a metal are laminated in order. ITO or the like is not formed on the part of the transparent electrode 41 of the upper part of a light transmitting window 45, luminous light up to about 1mum on the left side from a luminous spot is incident directly on a light receiving element so that ITO or the like of the electrode 41 is not to be provided up to the inside not more than 1mum from the peripheral part of the window 45 so as to form a non-luminous part 46b. Accordingly, direct incident light being incident on each light receiving part of the light receiving element passing through a direct light transmitting window is shielded to prevent an increase in dark output of an image read out device.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はファクシミリやスキャナ等に用いられる画像読
取装置に係り、特に暗出力の増大を防ぐことのできる画
像読取装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an image reading device used in facsimiles, scanners, etc., and particularly relates to an image reading device that can prevent an increase in dark output.

(従来の技術) 従来のファクシミリやスキャナ等には、光源としてEL
発光素子を用いるものがあり、特に、EL発光素子と密
着型イメージセンサとを一体化した超小型の画像読取装
置が提案されている。
(Conventional technology) Conventional facsimiles, scanners, etc. use EL as a light source.
There are devices that use light emitting elements, and in particular, ultra-compact image reading devices that integrate an EL light emitting element and a contact type image sensor have been proposed.

この画像読取装置は、例えば第7図の断面説明図に示す
ように、ガラス、セラミック等から成る基板1上に形成
された受光素子2と、ガラス等の透明部材から成るEL
基板11上に形成されたEL発光素子4とを、透明かつ
絶縁性の接着剤(接着層3)で結合させて構成されるも
ので、図の左右方向(主走査方向)に長尺状に形成され
ている。
For example, as shown in the cross-sectional explanatory diagram of FIG.
It is constructed by bonding an EL light emitting element 4 formed on a substrate 11 with a transparent and insulating adhesive (adhesive layer 3), and is elongated in the horizontal direction (main scanning direction) in the figure. It is formed.

受光素子2は、基板1上に第7図の左右方向(主走査方
向)に離散的に分割して複数配列されるようクロム(C
r)等で形成された個別電極21と、アモルファスシリ
コン(a−5t)で形成された帯状の光電麦換層22と
、酸化インジウム・スズ(ITO)で形成された帯状の
透明電極23とから構成されている。
The light-receiving elements 2 are made of chrome (C) so that they are arranged on the substrate 1 in a plurality of discrete parts in the left-right direction (main scanning direction) in FIG.
r), etc., a band-shaped photovoltaic layer 22 formed of amorphous silicon (a-5t), and a band-shaped transparent electrode 23 formed of indium tin oxide (ITO). It is configured.

EL発光素子4は、EL基板11上にITO1In、O
5、SnO3等から構成される透明電極41と、Y、0
8、S i3 N、 、BaTi0.等から成る絶縁層
42と、ZnS:Mn等から成る発光層43と、同上の
絶縁層42と、アルミニウム(AI)等の金属から成る
不透明電極44とを順次積層して構成されている。透明
電極4]と不透明電極44との間に電圧をかけると、そ
の間で挾持された発光層43から光が放射され、透明電
極41を透過して原稿100に照射される。つまり、発
光層43からの光が透明電極4]の表面側から放射され
ることになる。
The EL light emitting element 4 has ITO1In, O
5. A transparent electrode 41 made of SnO3 etc. and Y,0
8, S i3 N, , BaTi0. An insulating layer 42 made of ZnS:Mn or the like, a light emitting layer 43 made of ZnS:Mn or the like, an insulating layer 42 made of the same as above, and an opaque electrode 44 made of metal such as aluminum (AI) are sequentially laminated. When a voltage is applied between the transparent electrode 4] and the opaque electrode 44, light is emitted from the light emitting layer 43 held between them, passes through the transparent electrode 41, and is irradiated onto the original 100. In other words, the light from the light emitting layer 43 is emitted from the surface side of the transparent electrode 4.

前記不透明電極44には、受光素子2の各受光部分に対
応するよう方形状の光透過窓45が開口され、発光層4
3から発光した光が原稿100で反射し、その反射光が
光透過窓45を通過して受光素子2の受光部分へ照射す
るような構成となっている(特開昭5’1210664
号公報参照)。
A rectangular light transmitting window 45 is opened in the opaque electrode 44 so as to correspond to each light receiving portion of the light receiving element 2, and the light emitting layer 4
3 is reflected by the original 100, and the reflected light passes through the light transmitting window 45 and irradiates the light receiving portion of the light receiving element 2 (Japanese Patent Laid-Open No. 5'1210664).
(see publication).

(発明が解決しようとする課題) しかしながら、上記のような従来の画像読取装置の構成
では、以下の問題点が存在した。これらの問題点を第7
図を使って説明する。
(Problems to be Solved by the Invention) However, the configuration of the conventional image reading device as described above has the following problems. These problems are explained in the seventh section.
Explain using diagrams.

第1に、ELL光素子4の発光層43からの発光光pが
透明電極41の表面側から放射され、原稿100を照射
して反射し、光透過窓45を透過して受光素子2の各受
光部分に入射する構成になっているが、光透過窓45の
周辺部分の発光層43からの発光光qが直接に光透過窓
45を通過して受光素子2の各受光部分に入射してしま
うことがあった。本来は発光光pの反射光のみを受光す
ることが望ましいが、このように発光層43からの直接
入射光qをも受光することになると、画像読取装置の暗
出力を増大させることになるとの問題点があった。
First, the emitted light p from the light emitting layer 43 of the ELL optical element 4 is emitted from the surface side of the transparent electrode 41, irradiates the original 100, is reflected, and passes through the light transmitting window 45 to each of the light receiving elements 2. However, the emitted light q from the light emitting layer 43 in the peripheral area of the light transmitting window 45 directly passes through the light transmitting window 45 and enters each light receiving part of the light receiving element 2. Sometimes I put it away. Originally, it is desirable to receive only the reflected light of the emitted light p, but if the directly incident light q from the light emitting layer 43 is also received in this way, the dark output of the image reading device will increase. There was a problem.

第2に、EL発売先素子4発光層43からの発光光rが
透明電極41の表面側から放射されるが、ELL板11
から原稿100方向へ発光光rが透過せずに、ELL板
11の表面で全反射してしまい、その全反射光、/  
(発光光rが全反射した光)が光透過窓45を通過して
受光素子2の各受光部分に入射してしまうようなことが
あった。このように全反射光r′をも受光することにな
ると、画像読取装置の暗出力を増大させることになると
の問題点があった。
Second, the emitted light r from the light emitting layer 43 of the EL destination element 4 is emitted from the surface side of the transparent electrode 41;
The emitted light r is not transmitted from the direction of the document 100, but is totally reflected on the surface of the ELL plate 11, and the total reflected light, /
In some cases, the light (the total reflection of the emitted light r) passes through the light transmitting window 45 and enters each light receiving portion of the light receiving element 2. If the total reflected light r' is also received in this way, there is a problem in that the dark output of the image reading device increases.

第3に、ELL光素子4の発光層43からの発光光pが
透明電極41の表面側から放射され、ELL板11から
原稿100方向へ発光光pが透過t ル際1:、ELL
板11のガラスの屈折率と原稿100が設けられている
ところの空気の屈折率との違いから発光光pの何割かの
光がELL板11の表面で表面反射光Sとなって、その
表面反射光Sが光透過窓45を通過して受光素子2の各
受光部分に入射してしまうようなことがあった。このよ
うに表面反射光Sをも受光することになると、画像読取
装置の暗出力を増大させることになるとの問題点があっ
た。
Third, the emitted light p from the light emitting layer 43 of the ELL optical element 4 is emitted from the surface side of the transparent electrode 41, and the emitted light p is transmitted from the ELL plate 11 toward the document 100.
Due to the difference in the refractive index of the glass of the plate 11 and the refractive index of the air where the original 100 is placed, some percentage of the emitted light p becomes surface reflected light S on the surface of the ELL plate 11, and the surface There have been cases where the reflected light S passes through the light transmission window 45 and enters each light receiving portion of the light receiving element 2. When the surface reflected light S is also received in this way, there is a problem in that the dark output of the image reading device increases.

本発明は上記実情に鑑みてなされたもので、特に上記第
1の問題点である発光層から光透過窓を通過して受光素
子の各受光部分に直接入射する直接入射光を遮光するこ
とができ、そして画像読取装置の暗出力増大を防ぐこと
のできる画像読取装置を提供することを目的とする。
The present invention has been made in view of the above-mentioned circumstances, and particularly solves the first problem of blocking the direct incident light that passes through the light-transmitting window from the light-emitting layer and directly enters each light-receiving portion of the light-receiving element. It is an object of the present invention to provide an image reading device which can prevent an increase in dark output of the image reading device.

(課題を解決するための手段) 上記従来例の問題点を解決するため本発明は、第1の基
板上に形成された受光素子と、第2の基板上に透明電極
、発光層、不透明電極とを有するELL光素子とを前記
第1の基板と前記第2の基板が外側を向くように接合し
た画像読取装置において、前記ELL光素子からの発光
光が灰受光素子側の第2の基板反対面に配置された原稿
面で反射して前記受光素子に当該反射光を導く光透過窓
を前記不透明電極に設け、前記光透過窓の周辺部分の前
記ELL光素子部分を非発光とした非発光部を設けたこ
とを特徴としている。
(Means for Solving the Problems) In order to solve the problems of the conventional example, the present invention provides a light receiving element formed on a first substrate, a transparent electrode, a light emitting layer, and an opaque electrode on a second substrate. In an image reading device in which an ELL optical element having an ELL optical element is bonded such that the first substrate and the second substrate face outward, the emitted light from the ELL optical element is transferred to the second substrate on the side of the gray light receiving element. A light transmitting window is provided in the opaque electrode to guide the reflected light to the light receiving element after being reflected by the document surface disposed on the opposite side, and a non-transparent window is provided in which the ELL optical element portion around the light transmitting window does not emit light. It is characterized by the provision of a light emitting part.

(作用) 本発明によれば、従来は、発光層から発光される発光光
が直接光透過窓を通過して受光素子の各受光部分に入射
する直接入射光が存在して暗出力を増大させていたが、
本発明のようにELL光素子の光透過窓の周辺部分に非
発光部分を設けたことにより、直接入射光を遮光するこ
とができ、画像読取装置の暗出力増大を防ぐことができ
る。
(Function) According to the present invention, conventionally, there is direct incident light in which light emitted from a light emitting layer directly passes through a light transmission window and enters each light receiving portion of a light receiving element, increasing dark output. was, but
By providing a non-light-emitting portion around the light-transmitting window of the ELL optical element as in the present invention, direct incident light can be blocked, and an increase in dark output of the image reading device can be prevented.

(実施例) 本発明の一実施例について図面を参照しながら説明する
(Example) An example of the present invention will be described with reference to the drawings.

第1図は、本発明の一実施例に係る画像読取装置全体の
断面説明図を示す。第7図と同様の構成をとる部分につ
いては同一の符号を付している。
FIG. 1 shows a cross-sectional explanatory view of the entire image reading device according to an embodiment of the present invention. Components having the same configuration as in FIG. 7 are given the same reference numerals.

本実施例の画像読取装置の構成は、ガラス、セラミック
等から成る基板1上に形成された受光素子2とガラス等
から成るEL基板11上に形成されたEL発光素子4と
を、透明かつ絶縁性の接着剤(接着層3)で結合させる
ものである。
The configuration of the image reading device of this embodiment is such that a light receiving element 2 formed on a substrate 1 made of glass, ceramic, etc. and an EL light emitting element 4 formed on an EL substrate 11 made of glass, etc. are transparent and insulated. The two are bonded together using a sterile adhesive (adhesive layer 3).

受光素子2の構成は、基板1上にクロム(Cr)等の金
属から成る個別電極21が形成され、その上にアモルフ
ァスシリコン(a−3i)から成る光電変換層22が形
成され、さらにその上に酸化インジウム・スズ(iTO
)から成る透明電極23が形成される。
The structure of the light receiving element 2 is that individual electrodes 21 made of metal such as chromium (Cr) are formed on a substrate 1, a photoelectric conversion layer 22 made of amorphous silicon (a-3i) is formed on top of the individual electrodes 21, and Indium tin oxide (iTO)
) is formed.

尚、ここでは下部の個別電極21は主走査方向に離散的
に分割して形成され、透明電極23は帯状の共通電極と
なるよう形成されることにより、光電変換層22を個別
電極21と透明電極23とて挟んだ部分が各受光素子2
を構成し、その集まりが受光素子アレイを形成している
Here, the lower individual electrodes 21 are formed by being discretely divided in the main scanning direction, and the transparent electrode 23 is formed as a strip-shaped common electrode, so that the photoelectric conversion layer 22 is separated from the individual electrodes 21 and transparent. The portion sandwiched between the electrodes 23 corresponds to each light receiving element 2.
A collection of them forms a light receiving element array.

また、離散的に分割形成された個別電極21の端部は駆
動用IC(図示せず)に接続され、受光素子2で生成さ
れる電荷を抽出するようになっている。また、受光素子
2において、アモルファスシリコンの代わりに、CdS
e (カドミウムセレン)等を光電変換層22とするこ
とも可能である。
Furthermore, the end portions of the discretely formed individual electrodes 21 are connected to a driving IC (not shown) so as to extract charges generated by the light receiving element 2. In addition, in the light receiving element 2, CdS is used instead of amorphous silicon.
It is also possible to use cadmium selenium (e) or the like as the photoelectric conversion layer 22.

EL発光素子4は、EL基板11上にITOlI n、
03、SnO2等から成る透明電極41が形成され、そ
の上にsi、N、 、Sin、 、Y。
The EL light emitting element 4 includes ITOlI n,
A transparent electrode 41 made of 03, SnO2, etc. is formed, and Si, N, , Sin, , Y are formed thereon.

0、等から成る絶縁層42と、次ぎにZnS:Mn等か
ら成る発光層43が形成され、またその上に絶縁層42
と、アルミニウム(AI)等の金属から成る不透明電極
44を順次積層している。
An insulating layer 42 made of ZnS:Mn, etc. is formed next, and a light emitting layer 43 made of ZnS:Mn etc. is formed thereon.
and an opaque electrode 44 made of metal such as aluminum (AI) are sequentially laminated.

前記不透明電極44には、受光素子2の各受光部分に対
応するよう方形状の光透過窓45が開口され、発光層4
3からの発光光が原稿100に反射し、その反射光が光
透過窓45を通過して受光素子2の受光部分に入射する
ような構成となっている。
A rectangular light transmitting window 45 is opened in the opaque electrode 44 so as to correspond to each light receiving portion of the light receiving element 2, and the light emitting layer 4
The light emitted from the light receiving element 3 is reflected by the original 100, and the reflected light passes through the light transmitting window 45 and enters the light receiving portion of the light receiving element 2.

また、第2図のEL発光素子の拡大断面説明図と第3図
のEL発光素子の平面説明図に示すように、光透過窓4
5の上部に当たる透明電極41部分には、透明電極41
のITO等は形成されておらず、更に、光透過窓45の
周辺部分の上部に当たる透明電極41部分についても、
透明電極41のITO等を設けないようにして、光透過
窓45部分を非発光部46aとし、光透過窓45の周辺
部分をも非発光部46bとしている。
In addition, as shown in the enlarged cross-sectional view of the EL light emitting element in FIG. 2 and the plan view of the EL light emitting element in FIG.
In the transparent electrode 41 portion corresponding to the upper part of the transparent electrode 41
No ITO or the like is formed on the transparent electrode 41 portion above the peripheral portion of the light transmission window 45.
By not providing ITO or the like of the transparent electrode 41, the light transmitting window 45 portion is made into a non-light emitting portion 46a, and the peripheral portion of the light transmitting window 45 is also being made into a non-light emitting portion 46b.

この光透過窓45の周辺部分の非発光部46bについて
、光透過窓45からどの程度内側まで非発光部にすれば
よいか、第4図のEL発光光の軌道説明図を使って説明
する。第4図は、本図の右端中央部の発光層から左下方
向に発光光が放射された場合の発光光の軌道を示したも
のであり、ここで、発光光が放射された地点を発光地点
とする。
Regarding the non-light-emitting portion 46b in the peripheral portion of the light-transmitting window 45, how far inward from the light-transmitting window 45 the non-light-emitting portion should be made will be explained using the orbit explanatory diagram of the EL emitted light in FIG. Figure 4 shows the trajectory of the emitted light when the emitted light is emitted from the light emitting layer at the center of the right end in the lower left direction. shall be.

第4図では、発光地点から左側約4μmを示したもので
、a部分がEL基板11で、b部分とd部分が絶縁層4
2で、C部分が発光層43で、図面下側が受光素子側と
なる。第4図から分かるように、発光地点から左側約1
μmまでの発光光が直接受光素子に入射するため、光透
過窓45の周辺部分から1μm以上内側まで透明電極4
]のITO等を設けないようにして、非発光部46bを
形成すればよいことになる。
In FIG. 4, approximately 4 μm to the left from the light emitting point is shown. Part a is the EL substrate 11, and parts b and d are the insulating layer 4.
2, portion C is the light-emitting layer 43, and the lower side of the drawing is the light-receiving element side. As you can see from Figure 4, about 1 minute to the left of the light emission point.
Since emitted light of up to 1 μm directly enters the light receiving element, the transparent electrode 4
] It is sufficient to form the non-light-emitting portion 46b without providing ITO or the like.

従って、第3図に示す光透過窓45の幅L1は約40〜
60μm程度に、光透過窓45から隣接する光透過窓4
5の端までの幅L2は約125μm程度に、光透過窓4
5の周辺部分の非発光部46bの幅L3は約3〜4μm
程度にするのが適当である。非発光部46bの幅L3を
約3〜4μm程度にしたのは、透明電極41が形成され
ていない部分にアルミニウムの不透明電極44の光透過
窓45部分を合わせる場合に、合わせ精度が2〜3μm
程度必要とされ、それに上記の1μm以上を合計したた
めである。
Therefore, the width L1 of the light transmission window 45 shown in FIG.
The distance between the light transmitting window 45 and the adjacent light transmitting window 4 is approximately 60 μm.
The width L2 to the edge of the light transmitting window 4 is approximately 125 μm.
The width L3 of the non-light-emitting portion 46b in the peripheral portion of No. 5 is approximately 3 to 4 μm.
It is appropriate to keep it at a certain level. The reason why the width L3 of the non-light emitting part 46b is set to about 3 to 4 μm is that when the light transmitting window 45 portion of the aluminum opaque electrode 44 is aligned with the part where the transparent electrode 41 is not formed, the alignment accuracy is 2 to 3 μm.
This is because the above-mentioned amount of 1 μm or more is required.

画像読取装置は、上記受光素子2の上に上記EL発光素
子4をEL基板11が外側になるよう透明かつ絶縁性の
接着層3で結合し、受光素子2とEL発光素子4とを電
気的に絶縁している。
The image reading device connects the EL light emitting element 4 onto the light receiving element 2 with a transparent and insulating adhesive layer 3 with the EL substrate 11 facing outward, and connects the light receiving element 2 and the EL light emitting element 4 electrically. It is insulated.

次に、この画像読取装置の製造方法について説明する。Next, a method of manufacturing this image reading device will be explained.

この画像読取装置は、受光素子2部分とEL発光素子4
部分をそれぞれ別々に作製し、これらを接合して形成す
るものである。
This image reading device includes a light receiving element 2 portion and an EL light emitting element 4.
The parts are made separately and then joined together.

まず、受光素子2の製造方法は、ガラスまたはセラミッ
ク等で形成された基板1上の全面にクロム(Cr)を着
膜し、この上にレジストを塗布する。マスクパターンを
用いて前記レジストを露光、現像してレジストパターン
を形成し、エツチングした後にレジストパターンを除去
して下部電極となる個別電極21を形成する。そして、
p−cvD法によりアモルファスシリコン(a−3t)
を着膜し、フォトリソ法によるCF、等を用いたプラズ
マエツチング、またはメタルマスクによるバターニング
蒸着により前記個別電極21の先端部分を覆う帯状の光
電変換層22を形成する。次に、スパッタリング法によ
り酸化インジウム・スズ(ITO)を着膜し、フォトリ
ソ法による混酸を用いたウェットエツチングにより前記
個別電極21の先端部分を覆い、a−Siの光電変換層
22を挟むよう受光素子2の透明電極23を形成する。
First, the method for manufacturing the light-receiving element 2 is to deposit a chromium (Cr) film on the entire surface of a substrate 1 made of glass, ceramic, or the like, and then apply a resist on the film. A resist pattern is formed by exposing and developing the resist using a mask pattern, and after etching, the resist pattern is removed to form individual electrodes 21 that will become lower electrodes. and,
Amorphous silicon (a-3t) by p-cvd method
A strip-shaped photoelectric conversion layer 22 covering the tip portions of the individual electrodes 21 is formed by photolithography, plasma etching using CF, etc., or patterning vapor deposition using a metal mask. Next, a film of indium tin oxide (ITO) is deposited by a sputtering method, and the tips of the individual electrodes 21 are covered by wet etching using a mixed acid by a photolithography method. A transparent electrode 23 of element 2 is formed.

次に、EL発光素子4の製造方法を説明する。Next, a method for manufacturing the EL light emitting element 4 will be explained.

ガラス等で形成した50〜100μm程度のEL基板1
1の上に透明電極41としてITO等を1400A程度
の厚さで真空蒸着またはスパッタリング等により着膜し
、フォトリソ法によりバターニングして、第3図に示す
ような透明電極41のパターンを形成する。これにより
、非発光部46a、46bのパターンも形成されること
になる。。
EL substrate 1 of about 50 to 100 μm made of glass etc.
A film of ITO or the like is deposited as a transparent electrode 41 on 1 by vacuum evaporation or sputtering to a thickness of about 1400 A, and patterning is performed by photolithography to form a pattern of the transparent electrode 41 as shown in FIG. 3. . As a result, patterns of non-light-emitting portions 46a and 46b are also formed. .

次に透明電極41上に絶縁層42として、Sih N4
 、S l 02 、Y20s などを3000A程度
の厚さで着膜し、絶縁層42上にスパッタ法、電子ビー
ム法等でZnS:Mn等を4000〜5000A程度の
厚さで着膜して帯状の発光層43を形成し、再度前記同
様の絶縁層42を発光層43上に3000A程度の厚さ
で形成し、当該絶縁層42上にアルミニウム等の金属を
1μm程度の厚さで蒸着し、フォトリソ法によりバター
ニングして光透過窓45を有する不透明電極44を形成
し、EL発光素子4が作製される。
Next, SiH N4 is formed as an insulating layer 42 on the transparent electrode 41.
, S l 02 , Y20s, etc. to a thickness of about 3000A, and ZnS:Mn, etc. to a thickness of about 4000 to 5000A to a thickness of about 4000 to 5000A on the insulating layer 42 by sputtering, electron beam method, etc. A light-emitting layer 43 is formed, and an insulating layer 42 similar to the above is again formed on the light-emitting layer 43 to a thickness of about 3000 A. A metal such as aluminum is evaporated to a thickness of about 1 μm on the insulating layer 42, and then photolithography is performed. An opaque electrode 44 having a light transmitting window 45 is formed by patterning using a method, and an EL light emitting element 4 is manufactured.

以上のように作製した受光素子2とEL発光素子4を絶
縁性の透明な接着層3を介して接着する。
The light-receiving element 2 and the EL light-emitting element 4 produced as described above are bonded together via an insulating transparent adhesive layer 3.

この場合、受光素子2の受光部分の真上に光透過窓45
が配置されるようにする。
In this case, a light transmitting window 45 is placed directly above the light receiving portion of the light receiving element 2.
be placed.

次に、本発明に係る一実施例の画像読取装置の駆動方法
について説明すると、EL発光素子4において、透明電
極41と不透明電極44の画電極に±150〜250v
程度の両極性パルスを印加すると、透明電極41と不透
明電極44に挾まれた発光層43からEL発光光が放射
する。従って、透明電極41が形成されていない光透過
窓45の非発光部46aと光透過窓45の周辺部分の非
発光部46bからは発光が起こらない。EL発光素子2
の発光層43から上方向に放射された発光光は、EL基
板11上の原稿100を照射し、その反射光が光透過窓
45を透過して、受光素子2の受光部分に入射する。す
ると、受光素子2が光に反応して電荷を発生させ、駆動
用ICの制御によって画情報を信号として出力する。
Next, a method for driving an image reading device according to an embodiment of the present invention will be described.
When a bipolar pulse of about 100% is applied, EL light is emitted from the light emitting layer 43 sandwiched between the transparent electrode 41 and the opaque electrode 44. Therefore, no light is emitted from the non-light-emitting portion 46a of the light-transmitting window 45 where the transparent electrode 41 is not formed and the non-light-emitting portion 46b in the peripheral portion of the light-transmitting window 45. EL light emitting element 2
The emitted light emitted upward from the light emitting layer 43 illuminates the document 100 on the EL substrate 11 , and the reflected light passes through the light transmission window 45 and enters the light receiving portion of the light receiving element 2 . Then, the light receiving element 2 generates a charge in response to the light, and outputs image information as a signal under the control of the driving IC.

本実施例によれば、EL発光素子4の光透過窓45につ
いて、約3〜4μm程度の幅の周辺部分に透明電極41
を形成しないようにして非発光部46bを設けたので、
発光層43からの発光光が直接光透過窓45を通過して
受光素子2の各受光部分に入射するような直接入射光を
遮光することができるために、画像読取装置の暗出力増
大を防ぐことのでき、ダイナミックレンジを広げて画像
読取装置を高階調とすることができる効果がある。
According to this embodiment, the transparent electrode 41 is provided at the peripheral portion of the light transmission window 45 of the EL light emitting element 4 with a width of about 3 to 4 μm.
Since the non-light-emitting portion 46b is provided so as not to form a
Directly incident light such as light emitted from the light emitting layer 43 passing directly through the light transmitting window 45 and entering each light receiving portion of the light receiving element 2 can be blocked, thereby preventing an increase in the dark output of the image reading device. This has the effect of widening the dynamic range and allowing the image reading device to achieve high gradations.

本実施例では、受光素子2とEL発光素子4を絶縁性の
透明な接着層3を介して接着するようにしているが、E
L基板11より屈折率の小さい媒体の透光層で接着層3
を形成することも考えられる。具体的にEL基板11よ
り屈折率の小さい媒体の透光層とは、例えば、屈折率が
1.4程度のシリコン系の樹脂(トーレシリコン製J 
CR6125)を透光層としてもいいし、屈折率の小さ
いM g F 2  (n中1.38)等の光学薄膜を
着膜して透光層としてもいいし、また接着層3の受光素
子2直上部のみに空気層(n中1.00)を設けること
で屈折率の小さい透光層としてもよい。
In this embodiment, the light receiving element 2 and the EL light emitting element 4 are bonded together via an insulating transparent adhesive layer 3.
The adhesive layer 3 is a light-transmitting layer of a medium with a smaller refractive index than the L substrate 11.
It is also possible to form a Specifically, the light-transmitting layer of the medium having a refractive index smaller than that of the EL substrate 11 is, for example, a silicon-based resin (J made by Toray Silicon Co., Ltd.) having a refractive index of about 1.4.
CR6125) may be used as a light-transmitting layer, or an optical thin film such as M g F 2 (n of 1.38) with a small refractive index may be deposited as a light-transmitting layer. By providing an air layer (n of 1.00) only directly above 2, a light-transmitting layer with a small refractive index may be formed.

上記のように屈折率の小さい透光層を設けることで、E
L基板11内の全反射光を受光素子2側に入光するのを
防ぐことができるので、従来の画像読取装置と比較して
暗出力を86%も減少させることができる。しかし、暗
出力は従来の画像読取装置と比較して14%程残ること
になる。この暗出力14%の内、7%はEL発光光のE
L基板11における表面反射光が受光素子2に入光する
ためであり、また7%は光透過窓45周辺部から直接発
光光(直接入射光)が受光素子2に入光するためである
By providing a light-transmitting layer with a small refractive index as described above, E
Since it is possible to prevent the total reflected light within the L substrate 11 from entering the light receiving element 2 side, the dark output can be reduced by 86% compared to a conventional image reading device. However, about 14% of the dark output remains compared to conventional image reading devices. Of this 14% dark output, 7% is the E of the EL light.
This is because the light reflected from the surface of the L substrate 11 enters the light receiving element 2, and 7% is because the direct emitted light (directly incident light) enters the light receiving element 2 from the periphery of the light transmission window 45.

従って、本実施例の構成を用いれば、直接入射光による
7%の暗出力を抑えることが可能となる。
Therefore, by using the configuration of this embodiment, it is possible to suppress the dark output by 7% due to directly incident light.

また表面反射光に対してはEL基板11の屈折率と原稿
が存在する空気中の屈折率との中間の屈折率を持つガラ
スまたは薄膜の反射防止膜を設けることで、表面反射光
による7%の暗出力を抑えることが可能となる。
In addition, by providing an anti-reflection coating made of glass or a thin film with a refractive index intermediate between the refractive index of the EL substrate 11 and the refractive index of the air in which the document exists, 7% of the surface reflected light is This makes it possible to suppress the dark output.

また、別の実施例として、第5図の断面説明図と第6図
の平面説明図に示すように、光透過窓45と隣接する光
透過窓45の間の上部に位置する透明電極41部分を形
成しないようにして非発光部46cとすることにより、
発光層43からの発光光が光透過窓45上部の原稿10
0を中心に照射し、その反射光の多くが原稿100直下
の受光素子2の受光部分に入射することになるので、反
射光が隣接する受光素子2の受光部分に入射する割合を
減らすことができ、受光素子2における正確な読み取り
ができるようになり、画像読取装置における分解能(M
TF)の向上を図ることができる効果がある。
In addition, as another example, as shown in the cross-sectional explanatory view of FIG. 5 and the plan explanatory view of FIG. By not forming the non-light emitting part 46c,
The light emitted from the light emitting layer 43 is transmitted to the document 10 above the light transmitting window 45.
Since most of the reflected light will be incident on the light receiving portion of the light receiving element 2 directly below the original 100, it is possible to reduce the proportion of reflected light that is incident on the light receiving portion of the adjacent light receiving element 2. This enables accurate reading on the light receiving element 2, and improves the resolution (M) of the image reading device.
This has the effect of improving TF).

(発明の効果) 本発明によれば、EL発光素子の光透過窓の周辺部分を
非発光部分としたので、直接光透過窓を通過して受光素
子の各受光部分に入射する直接入射光を遮光することが
でき、画像読取装置の暗出力増大を防ぐことのできる効
果がある。
(Effects of the Invention) According to the present invention, since the peripheral part of the light transmitting window of the EL light emitting element is made into a non-light emitting part, the direct incident light passing through the direct light transmitting window and entering each light receiving part of the light receiving element is prevented. This has the effect of blocking light and preventing an increase in the dark output of the image reading device.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の画像読取装置の断面説明図
、第2図はEL発光素子の拡大断面説明図、第3図は第
1図のEL発光素子の平面説明図、第4図はEL発光光
の軌道説明図、第5図は別の実施例の画像読取装置の断
面説明図、第6図は第5図のEL発光素子の平面説明図
、第7図は従来の画像読取装置の断面説明図である。 3・・・・・・発光層 4・・・・・・不透明電極 5・・・・・・光透過窓 6・・・・・・非発光部 00・・・原稿 1・・・・・・・・・基板 11・・・・・・EL基板 2・・・・・・・・・受光素子 21・・・・・・個別電極 22・・・・・・光電変換層 23・・・・・・透明電極 3・・・・・・・・・接着層 4・・・・・・・・・EL発光素子 41・・・・・・透明電極 42・・・・・・絶縁層 □主走査JJ向 第 因 第2因 第4図 第5図 主走査方向
FIG. 1 is a cross-sectional explanatory diagram of an image reading device according to an embodiment of the present invention, FIG. 2 is an enlarged cross-sectional explanatory diagram of an EL light emitting element, FIG. The figure is an explanatory diagram of the trajectory of EL light emitting light, FIG. 5 is a cross-sectional explanatory diagram of an image reading device of another embodiment, FIG. 6 is a plan explanatory diagram of the EL light emitting element of FIG. 5, and FIG. 7 is an explanatory diagram of a conventional image. FIG. 2 is a cross-sectional explanatory diagram of the reading device. 3...Light-emitting layer 4...Opaque electrode 5...Light-transmitting window 6...Non-light-emitting portion 00...Original 1... ... Substrate 11 ... EL board 2 ... ... Light receiving element 21 ... Individual electrode 22 ... Photoelectric conversion layer 23 ...・Transparent electrode 3...Adhesive layer 4...EL light emitting element 41...Transparent electrode 42...Insulating layer□Main scanning JJ Direction factor 2nd factor 4th figure 5th main scanning direction

Claims (1)

【特許請求の範囲】  第1の基板上に形成された受光素子と、第2の基板上
に透明電極、発光層、不透明電極とを有するEL発光素
子とを前記第1の基板と前記第2の基板が外側を向くよ
うに接合した画像読取装置において、 前記EL発光素子からの発光光が反受光素子側の第2の
基板反対面に配置された原稿面で反射して前記受光素子
に当該反射光を導く光透過窓を前記不透明電極に設け、
前記光透過窓の周辺部分の前記EL発光素子部分を非発
光とした非発光部を設けたことを特徴とする画像読取装
置。
Claims: An EL light emitting element having a light receiving element formed on a first substrate, and a transparent electrode, a light emitting layer, and an opaque electrode formed on a second substrate. In the image reading device, the light emitted from the EL light-emitting element is reflected by the document surface disposed on the opposite surface of the second substrate on the side opposite to the light-receiving element, and the light emitted from the EL light-emitting element is reflected to the light-receiving element. providing the opaque electrode with a light-transmitting window that guides the reflected light;
An image reading device characterized in that a non-light-emitting portion is provided in which the EL light-emitting element portion in a peripheral portion of the light-transmitting window does not emit light.
JP2157645A 1990-06-15 1990-06-18 Image read out device Pending JPH0453165A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2157645A JPH0453165A (en) 1990-06-18 1990-06-18 Image read out device
US07/593,971 US5101099A (en) 1990-06-15 1990-10-09 Image reading device with different reflectivity coefficients in a transparent layer and a substrate
DE69030574T DE69030574T2 (en) 1990-06-15 1990-10-12 Image sensor or image reader containing light source and manufacturing method
EP90119594A EP0461302B1 (en) 1990-06-15 1990-10-12 Image sensor or reading device containing a light source and a method for manufacturing the same
EP96110663A EP0740349A3 (en) 1990-06-15 1990-10-12 Light-source contained image sensor or reading device and a method for manufacturing the same
KR1019900016313A KR920001910A (en) 1990-06-18 1990-10-15 Image reader

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2157645A JPH0453165A (en) 1990-06-18 1990-06-18 Image read out device

Publications (1)

Publication Number Publication Date
JPH0453165A true JPH0453165A (en) 1992-02-20

Family

ID=15654256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2157645A Pending JPH0453165A (en) 1990-06-15 1990-06-18 Image read out device

Country Status (2)

Country Link
JP (1) JPH0453165A (en)
KR (1) KR920001910A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010145573A (en) * 2008-12-17 2010-07-01 Sony Corp Display device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010145573A (en) * 2008-12-17 2010-07-01 Sony Corp Display device

Also Published As

Publication number Publication date
KR920001910A (en) 1992-01-30

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