JPH0453068B2 - - Google Patents
Info
- Publication number
- JPH0453068B2 JPH0453068B2 JP59219425A JP21942584A JPH0453068B2 JP H0453068 B2 JPH0453068 B2 JP H0453068B2 JP 59219425 A JP59219425 A JP 59219425A JP 21942584 A JP21942584 A JP 21942584A JP H0453068 B2 JPH0453068 B2 JP H0453068B2
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- target
- image
- focusing lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 19
- 230000005684 electric field Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 description 22
- 238000010884 ion-beam technique Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- 239000006185 dispersion Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 3
- 230000005686 electrostatic field Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59219425A JPS6199254A (ja) | 1984-10-19 | 1984-10-19 | 荷電粒子ビ−ム装置における集束レンズの調整方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59219425A JPS6199254A (ja) | 1984-10-19 | 1984-10-19 | 荷電粒子ビ−ム装置における集束レンズの調整方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6199254A JPS6199254A (ja) | 1986-05-17 |
| JPH0453068B2 true JPH0453068B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-08-25 |
Family
ID=16735188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59219425A Granted JPS6199254A (ja) | 1984-10-19 | 1984-10-19 | 荷電粒子ビ−ム装置における集束レンズの調整方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6199254A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1984
- 1984-10-19 JP JP59219425A patent/JPS6199254A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6199254A (ja) | 1986-05-17 |