JPH0451477Y2 - - Google Patents
Info
- Publication number
- JPH0451477Y2 JPH0451477Y2 JP1988087169U JP8716988U JPH0451477Y2 JP H0451477 Y2 JPH0451477 Y2 JP H0451477Y2 JP 1988087169 U JP1988087169 U JP 1988087169U JP 8716988 U JP8716988 U JP 8716988U JP H0451477 Y2 JPH0451477 Y2 JP H0451477Y2
- Authority
- JP
- Japan
- Prior art keywords
- spark
- wire
- current
- intensity
- ultraviolet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000825 ultraviolet detection Methods 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000007423 decrease Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/78268—Discharge electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85009—Pre-treatment of the connector or the bonding area
- H01L2224/8503—Reshaping, e.g. forming the ball or the wedge of the wire connector
- H01L2224/85035—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball"
- H01L2224/85045—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball" using a corona discharge, e.g. electronic flame off [EFO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Description
【考案の詳細な説明】
（産業上の利用分野）
本考案は、ワイヤボンダのボール形成用のスパ
ーク制御手段の改良に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to an improvement in spark control means for ball formation in a wire bonder.
（従来の技術）
ワイヤボンダにおいてボンデイングの良否を左
右する最も大きな要素は、ワイヤの先端に作られ
ているボールの大きさである。このボールの大き
さは、ワイヤの材質、線径ならびにボール形成時
のワイヤの先端とスパークロツドとの間のスパー
クの強さによつて定まる。スパークの強さはこの
スパークを流れる電流（以下、スパーク電流と言
う）の大きさと対応しているので、従来は、たと
えばボール形成時のワイヤの先端とスパークロツ
ドとの間隔が変わつても所定の大きさのボールが
得られるようにスパーク電流を一定にする目的
で、スパークジエネレータがその出力電流を一定
にする制御を行つている。(Prior Art) The most important factor that determines the quality of bonding in a wire bonder is the size of the ball formed at the tip of the wire. The size of the ball is determined by the wire material, wire diameter, and the strength of the spark between the tip of the wire and the spark rod when the ball is formed. The strength of the spark corresponds to the magnitude of the current flowing through the spark (hereinafter referred to as spark current), so conventionally, even if the distance between the tip of the wire and the spark rod when forming a ball changes, In order to keep the spark current constant so that a ball of the same size can be obtained, the spark generator is controlled to keep its output current constant.
（考案が解決しようとする課題）
しかるに従来のスパークジエネレータには次の
ような問題点がある。(Problems to be solved by the invention) However, conventional spark generators have the following problems.
すなわち、スパークジエネレータの出力電流
は、ワイヤの先端とスパークロツドが接触するワ
イヤタツチが発生していても、あるいはワイヤの
先端とスパークロツドの間以外に電流の流れるリ
ークが発生していても流れる。ワイヤタツチが生
じている時にはスパークジエネレータの出力電流
は一定になるように制御できてもボールは形成さ
れない。またリークが生じている時にはスパーク
電流とスパークジエネレータの出力電流とがスパ
ークロツド周辺の雰囲気が変わるために一定の関
係に定まらないので、スパークジエネレータの出
力電流を一定になるように制御してもスパーク電
流は必ずしも一定にならず、したがつて所定の大
きさのボールが安定して形成できない。 That is, the output current of the spark generator flows even if there is a wire touch in which the tip of the wire and the spark rod are in contact, or even if there is a leak where current flows between the tip of the wire and the spark rod. When a wire touch occurs, no ball is formed even if the output current of the spark generator can be controlled to be constant. Also, when a leak occurs, the spark current and the output current of the spark generator do not maintain a constant relationship because the atmosphere around the spark rod changes, so even if the output current of the spark generator is controlled to be constant, The spark current is not necessarily constant, so balls of a predetermined size cannot be stably formed.
以上説明したように、従来のスパークジエネレ
ータには、スパークの強さと必ずしも対応してい
ない出力電流を制御しているために所定の大きさ
のボールが安定して形成できないという問題があ
る。 As explained above, conventional spark generators have a problem in that balls of a predetermined size cannot be stably formed because the output current is controlled not necessarily corresponding to the intensity of the spark.
本考案の目的は、ワイヤの先端とスパークロツ
ドの間のスパークの強さに直接対応する紫外線の
強さを検出し、これに基づいて出力電流を制御す
ることによつて、ワイヤの先端とスパークロツド
の間隔やスパークロツド周辺の雰囲気が変わつて
も常に所定の強さのスパークを得ることができる
ようにし、これにより所定の大きさのボールが安
定して形成できるワイヤボンダのスパーク制御装
置を提供することである。 The purpose of the present invention is to detect the intensity of the ultraviolet light, which directly corresponds to the intensity of the spark between the wire tip and the spark rod, and to control the output current based on this. To provide a spark control device for a wire bonder that can always obtain a spark of a predetermined strength even if the spacing or the atmosphere around the spark rod changes, thereby stably forming a ball of a predetermined size. .
（課題を解決するための手段）
本考案のワイヤボンダのスパーク制御装置は上
記の目的を達成するために次の手段構成を有す
る。(Means for Solving the Problems) The wire bonder spark control device of the present invention has the following means configuration to achieve the above object.
すなわち本考案のワイヤボンダのスパーク制御
装置は、ワイヤボンダのボール形成時のスパーク
によつて生ずる紫外線を受け、その強さに対応す
る陰極電流を流す光電子増倍管と；該光電子増倍
管を駆動する駆動電源と；前記の陰極電流を検出
して紫外線検出信号を受け、そのレベルが、所定
の紫外線の強さに対応させて予め定められている
設定レベル値と同じになるまでスパークの電流を
上昇または下降させるスパーク発生用電源回路
と；を具備することを特徴とするものである。 That is, the wire bonder spark control device of the present invention includes a photomultiplier tube that receives ultraviolet rays generated by sparks during ball formation of the wire bonder and flows a cathode current corresponding to the intensity of the ultraviolet rays; Drive power supply: detects the cathode current, receives an ultraviolet detection signal, and increases the spark current until the level becomes the same as a predetermined set level corresponding to the intensity of the ultraviolet rays. or a spark generating power supply circuit for lowering the spark.
（作用）
以下、上記の手段構成を有する本考案のワイヤ
ボンダのスパーク制御装置の作用について説明す
る。(Function) Hereinafter, the function of the wire bonder spark control device of the present invention having the above-mentioned means configuration will be explained.
駆動電源は光電子増倍管に所定の電圧を印加す
る。ワイヤボンダのボール形成時のスパークによ
つて生ずる紫外線が所定の電圧の印加されている
光電子増倍管へ入射すると、この紫外線の強さに
対応する陰極電流が流れる。紫外線検出回路は該
陰極電流を検出してこれに対応する紫外線検出信
号を出力する。スパーク発生用電源回路は紫外線
検出信号を受け、そのレベルが、所定の大きさの
ボールが形成される時の紫外線の強さに対応させ
て予め定められている設定レベル値と同じになる
まで出力電流を上昇または下降させ、ワイヤの先
端とスパークロツドの間のスパーク電流を所定の
大きさにする。該スパーク電流が所定の大きさに
なるとスパークが所定の強さになるためボールが
所定の大きさに作られるようになり、それと同時
にこのスパークの強さと直接対応した所定の強さ
の紫外線が放射される。その結果、紫外線検出信
号のレベルは、所定の大きさのボールが形成され
る時の紫外線の強さに対応させて予め定められて
いる設定レベル値と同じになるので、スパーク発
生用電源回路は出力電流の上昇または下降をしな
くなり、所定のスパークの強さに対応した一定の
電流値を維持する。 The drive power supply applies a predetermined voltage to the photomultiplier tube. When ultraviolet rays generated by sparks generated by a wire bonder when forming a ball enter a photomultiplier tube to which a predetermined voltage is applied, a cathode current corresponding to the intensity of the ultraviolet rays flows. The ultraviolet light detection circuit detects the cathode current and outputs a corresponding ultraviolet detection signal. The spark generation power supply circuit receives the ultraviolet ray detection signal and outputs it until the level reaches a preset level value that corresponds to the intensity of ultraviolet rays when a ball of a predetermined size is formed. The current is increased or decreased to a predetermined spark current between the tip of the wire and the spark rod. When the spark current reaches a predetermined magnitude, the spark reaches a predetermined strength, so a ball is formed to a predetermined size, and at the same time, ultraviolet rays of a predetermined intensity directly corresponding to the spark strength are emitted. be done. As a result, the level of the ultraviolet detection signal becomes the same as the preset level value that corresponds to the intensity of ultraviolet rays when a ball of a predetermined size is formed, so the spark generation power supply circuit The output current no longer increases or decreases, and maintains a constant current value corresponding to the predetermined spark strength.
以上説明したように、本考案のワイヤボンダの
スパーク制御装置は、ワイヤの先端とスパークロ
ツドの間のスパークの強さに直接対応する紫外線
の強さを検出し、これに基づいて出力電流を制御
するようにしたことによつて、ワイヤの先端とス
パークロツドの間隔やスパークロツド周辺の雰囲
気が変わつても常に所定の強さのスパークを得る
ことができるので、所定の大きさのボールを安定
して形成することができる。 As explained above, the wire bonder spark control device of the present invention detects the intensity of ultraviolet light, which directly corresponds to the intensity of the spark between the tip of the wire and the spark rod, and controls the output current based on this. By doing so, even if the distance between the tip of the wire and the spark rod or the atmosphere around the spark rod changes, a spark of a predetermined strength can always be obtained, so a ball of a predetermined size can be stably formed. I can do it.
（実施例）
以下、本考案のワイヤボンダのスパーク制御装
置の実施例を図面に基づいて説明する。(Example) Hereinafter, an example of the spark control device for a wire bonder of the present invention will be described based on the drawings.
第１図は本考案のワイヤボンダのスパーク制御
装置の実施例の構成図である。同図において、光
電子増倍管１には駆動電源２によつて所定の電圧
が印加されている。スパークジエネレータ１０が
ワイヤ１１の先端とスパークロツド１５の間に電
圧を印加してこの間にスパークが飛ぶと、このス
パークによつて生ずる紫外線が前記の光電子増倍
管１に入射し、紫外線の強さに対応した陰極電流
が流れる。電流−電圧変換回路３はこの陰極電流
を検出し、これを電圧に変換して紫外線検出電圧
信号５をスパークジエネレータ１０の比較部６へ
送出する。スパークジエネレータ１０には、所定
の大きさのボールが形成される時の紫外線の強さ
に対応する基準電圧が予め設定されていて、比較
部６が基準電圧信号７の電圧値と前記の紫外線検
出電圧信号５の電圧値の差を出力する。制御増幅
器８は上記両電圧の差を受けてこれを増幅し、こ
の増幅値に基づいてスパーク指令電圧と紫外線検
出電圧との差を無くすようにスパークジエネレー
タ１０の出力電流を上昇または下降させる指令を
電力増幅器９へ送出する。電力増幅器９はワイヤ
１１の先端とスパークロツド１５の間に高電圧を
印加する電源を有しており、制御増幅器８からの
指令に従つて出力電流を上昇または下降させる。 FIG. 1 is a block diagram of an embodiment of a spark control device for a wire bonder according to the present invention. In the figure, a predetermined voltage is applied to a photomultiplier tube 1 by a driving power source 2. As shown in FIG. When the spark generator 10 applies a voltage between the tip of the wire 11 and the spark rod 15 and sparks fly between them, the ultraviolet rays generated by this spark enter the photomultiplier tube 1, and the intensity of the ultraviolet rays increases. A cathode current corresponding to the current flows. The current-voltage conversion circuit 3 detects this cathode current, converts it into voltage, and sends an ultraviolet detection voltage signal 5 to the comparison section 6 of the spark generator 10. A reference voltage corresponding to the intensity of ultraviolet rays when a ball of a predetermined size is formed is set in advance in the spark generator 10, and a comparison unit 6 compares the voltage value of the reference voltage signal 7 with the ultraviolet rays. The difference between the voltage values of the detected voltage signals 5 is output. The control amplifier 8 receives and amplifies the difference between the two voltages, and based on this amplified value, issues a command to increase or decrease the output current of the spark generator 10 so as to eliminate the difference between the spark command voltage and the ultraviolet detection voltage. is sent to the power amplifier 9. The power amplifier 9 has a power source that applies a high voltage between the tip of the wire 11 and the spark rod 15, and increases or decreases the output current according to commands from the control amplifier 8.
スパークジエネレータ１０の出力電流が制御さ
れた結果ワイヤ１１の先端とスパークロツド１５
の間のスパークが所定の強さになるとボールは所
定の大きさに作られるようになり、それと同時に
このスパークの強さと直接対応した所定の強さの
紫外線が放射される。このため紫外線検出電圧は
基準電圧と同じになるので、制御増幅器８からは
出力電流を上昇または下降させる指令が電力増幅
器９へ出なくなり、スパークジエネレータ１０
は、現在のワイヤ１１の先端とスパークロツド１
５の間隔や現在のスパークロツド１５の周辺の雰
囲気で所定の強さのスパークを飛ばす一定の電流
を維持する。 As a result of controlling the output current of the spark generator 10, the tip of the wire 11 and the spark rod 15
When the spark between them reaches a predetermined strength, the ball is made to a predetermined size, and at the same time, ultraviolet rays are emitted with a predetermined intensity that directly corresponds to the strength of the spark. Therefore, since the ultraviolet detection voltage becomes the same as the reference voltage, the control amplifier 8 no longer sends a command to the power amplifier 9 to increase or decrease the output current, and the spark generator 10
is the current tip of wire 11 and spark rod 1
A constant current is maintained at intervals of 5 and the atmosphere around the current spark rod 15 to emit sparks of a predetermined intensity.
（考案の効果）
以上説明したように、本考案のワイヤボンダの
スパーク制御装置は、ワイヤの先端とスパークロ
ツドの間のスパークの強さに直接対応する紫外線
の強さを検出し、これに基づいて出力電流を制御
するようにしたことによつて、ワイヤの先端とス
パークロツドの間隔やスパークロツド周辺の雰囲
気が変わつても常に所定の強さのスパークを得る
ことができるので、所定の大きさのボールを安定
して形成することができるという利点を有する。(Effects of the invention) As explained above, the wire bonder spark control device of the invention detects the intensity of ultraviolet rays, which directly corresponds to the intensity of the spark between the tip of the wire and the spark rod, and outputs an output based on this. By controlling the current, it is possible to always obtain a spark of a predetermined strength even if the distance between the wire tip and the spark rod or the atmosphere around the spark rod changes, so a ball of a predetermined size can be stably produced. It has the advantage that it can be formed by
また本考案のワイヤボンダのスパーク制御装置
は、放電加工機やアーク溶接機などに適用できる
構成に変えることも容易に具体化できるので、ス
パークの安定化が望まれる各種の機器の性能安定
化に寄与するという効果をも有する。 In addition, the wire bonder spark control device of the present invention can be easily modified to a configuration that can be applied to electrical discharge machines, arc welding machines, etc., so it contributes to stabilizing the performance of various devices where spark stabilization is desired. It also has the effect of
第１図は本考案のワイヤボンダのスパーク制御
装置の実施例の構成図である。
１……光電子増倍管、２……駆動電源、３……
電流−電圧変換回路、５……紫外線検出電圧信
号、６……比較部、７……基準電圧信号、８……
制御増幅器、９……電力増幅器、１０……スパー
クジエネレータ、１１……ワイヤ、１２……キヤ
ピラリ、１４……カツトクランプ、１５……スパ
ークロツド。
FIG. 1 is a block diagram of an embodiment of a spark control device for a wire bonder according to the present invention. 1...Photomultiplier tube, 2...Drive power supply, 3...
Current-voltage conversion circuit, 5... Ultraviolet detection voltage signal, 6... Comparison section, 7... Reference voltage signal, 8...
Control amplifier, 9...Power amplifier, 10...Spark generator, 11...Wire, 12...Capillary, 14...Cut clamp, 15...Spark rod.
Claims (1)
て生ずる紫外線を受け、その強さに対応する陰極
電流を流す光電子増倍管と；該光電子増倍管を駆
動する駆動電源と；前記の陰極電流を検出して紫
外線検出信号を出力する紫外線検出回路と；紫外
線検出信号を受け、そのレベルが、所定の紫外線
の強さに対応させて予め定められている設定レベ
ル値と同じになるまでスパークの電流を上昇また
は下降させるスパーク発生用電源回路と；を具備
することを特徴とするワイヤボンダのスパーク制
御装置。 a photomultiplier tube that receives ultraviolet rays generated by a spark during ball formation of a wire bonder and flows a cathode current corresponding to the intensity thereof; a driving power source that drives the photomultiplier tube; a drive power source that detects the cathode current; and an ultraviolet detection circuit that outputs an ultraviolet detection signal; receives the ultraviolet detection signal and increases the spark current until the level becomes the same as a predetermined set level corresponding to the intensity of the specified ultraviolet light. 1. A spark control device for a wire bonder, comprising: a power supply circuit for generating a spark or lowering the spark;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988087169U JPH0451477Y2 (en) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988087169U JPH0451477Y2 (en) | 1988-06-30 | 1988-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH029433U JPH029433U (en) | 1990-01-22 |
| JPH0451477Y2 true JPH0451477Y2 (en) | 1992-12-03 |
Family
ID=31311791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988087169U Expired JPH0451477Y2 (en) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451477Y2 (en) |
-
1988
- 1988-06-30 JP JP1988087169U patent/JPH0451477Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH029433U (en) | 1990-01-22 |
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