JPH045122B2 - - Google Patents
Info
- Publication number
- JPH045122B2 JPH045122B2 JP18140283A JP18140283A JPH045122B2 JP H045122 B2 JPH045122 B2 JP H045122B2 JP 18140283 A JP18140283 A JP 18140283A JP 18140283 A JP18140283 A JP 18140283A JP H045122 B2 JPH045122 B2 JP H045122B2
- Authority
- JP
- Japan
- Prior art keywords
- target
- light
- displacement
- axis
- pbs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 52
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 230000001427 coherent effect Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 15
- 238000003384 imaging method Methods 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18140283A JPS6071911A (ja) | 1983-09-29 | 1983-09-29 | 光学式変位・回転測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18140283A JPS6071911A (ja) | 1983-09-29 | 1983-09-29 | 光学式変位・回転測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6071911A JPS6071911A (ja) | 1985-04-23 |
| JPH045122B2 true JPH045122B2 (zh) | 1992-01-30 |
Family
ID=16100121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18140283A Granted JPS6071911A (ja) | 1983-09-29 | 1983-09-29 | 光学式変位・回転測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6071911A (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03128405A (ja) * | 1989-10-12 | 1991-05-31 | Keyence Corp | フォーミングマシン等における材料の送り量検出装置 |
| US6642506B1 (en) | 2000-06-01 | 2003-11-04 | Mitutoyo Corporation | Speckle-image-based optical position transducer having improved mounting and directional sensitivities |
| US6873422B2 (en) | 2000-12-08 | 2005-03-29 | Mitutoyo Corporation | Systems and methods for high-accuracy displacement determination in a correlation based position transducer |
| JP4616692B2 (ja) * | 2005-04-21 | 2011-01-19 | 株式会社ミツトヨ | 変位検出装置 |
-
1983
- 1983-09-29 JP JP18140283A patent/JPS6071911A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6071911A (ja) | 1985-04-23 |
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