JPH0449938A - Endoscope - Google Patents
EndoscopeInfo
- Publication number
- JPH0449938A JPH0449938A JP2155416A JP15541690A JPH0449938A JP H0449938 A JPH0449938 A JP H0449938A JP 2155416 A JP2155416 A JP 2155416A JP 15541690 A JP15541690 A JP 15541690A JP H0449938 A JPH0449938 A JP H0449938A
- Authority
- JP
- Japan
- Prior art keywords
- flexibility
- flexible member
- tube
- cooling
- endoscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims abstract description 22
- 238000001816 cooling Methods 0.000 claims abstract description 15
- 230000032683 aging Effects 0.000 claims abstract description 13
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 239000011347 resin Substances 0.000 abstract description 4
- 229920005989 resin Polymers 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 2
- 230000000593 degrading effect Effects 0.000 abstract 1
- 230000002265 prevention Effects 0.000 abstract 1
- 230000007423 decrease Effects 0.000 description 8
- 238000003780 insertion Methods 0.000 description 8
- 230000037431 insertion Effects 0.000 description 8
- 238000005286 illumination Methods 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000002542 deteriorative effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Instruments For Viewing The Inside Of Hollow Bodies (AREA)
- Endoscopes (AREA)
Abstract
Description
【発明の詳細な説明】
[発明の目的]
(産業上の利用分野)
本発明は、体腔内部の観察を行うための内視鏡に係り、
特に経年変化により軟性化した導中管の可撓性を復元す
ることが可能な内視鏡に関する。[Detailed Description of the Invention] [Object of the Invention] (Field of Industrial Application) The present invention relates to an endoscope for observing the inside of a body cavity.
In particular, the present invention relates to an endoscope capable of restoring the flexibility of a guide tube that has become soft due to aging.
(従来の技術)
内視鏡は体腔内に導入する導中管を備えており、導中管
はその最外側にゴム、樹脂等から成る管形状の被覆部材
が設けられ、被覆部材の内周面に沿って可撓性を有する
可撓部材として管形状に形成された金属製ブレードや、
その内周側に螺旋形状に形成された金属製螺旋管が配置
されている。(Prior art) An endoscope is equipped with a guiding tube that is introduced into a body cavity, and the guiding tube is provided with a tube-shaped covering member made of rubber, resin, etc. on the outermost side, and the inner periphery of the covering member is A metal blade formed into a tube shape as a flexible member that has flexibility along the surface,
A metal spiral tube formed in a spiral shape is arranged on the inner peripheral side thereof.
これらの可撓部材や被覆部材の内周面側には、体腔内に
照明光を導くためのライトガイドや体腔内に送気・送水
するための送気・送水チューブが収納されている。A light guide for guiding illumination light into the body cavity and an air/water supply tube for supplying air and water into the body cavity are housed on the inner peripheral surfaces of these flexible members and covering members.
導中管製造の際には、上記ブレードや螺旋管に焼入等の
加熱処理を行って硬化させ適度な可撓性を与えた後、こ
のブレードや螺旋管を被覆部材の内周面側に固定配置さ
せる。それによって導中管は可撓性を得て、支障なく速
やかに導中管を体腔内に挿入することが可能になる。When manufacturing guide tubes, the blades and helical tubes are heat-treated such as quenching to harden them and give them appropriate flexibility, and then the blades and helical tubes are placed on the inner peripheral surface of the covering member. Place it in a fixed position. Thereby, the guiding tube gains flexibility, and it becomes possible to quickly insert the guiding tube into the body cavity without any trouble.
(発明が解決しようとする課題)
しかしながら上記した従来技術において、導中管内のブ
レードや螺旋管が経年変化により軟性化して可撓性が低
下すると、導中管の可撓性が低下して挿入性が悪くなる
。軟性化したブレードや螺旋管を加熱処理により硬化さ
せれば、ブレードや螺旋管の可撓性を高め導中管の可撓
性を復元することが可能であるが、この場合にはゴム、
樹脂等から成る被覆部材をも加熱することになり、熱に
より被覆部材を劣化させてしまうという問題を生じる。(Problem to be Solved by the Invention) However, in the above-mentioned conventional technology, when the blades and spiral tubes in the guiding tube become soft and the flexibility decreases due to aging, the flexibility of the guiding tube decreases and insertion is difficult. Sexuality becomes worse. If the softened blades and spiral tubes are hardened by heat treatment, it is possible to increase the flexibility of the blades and spiral tubes and restore the flexibility of the guiding tube, but in this case, rubber,
The covering member made of resin or the like is also heated, which causes a problem in that the covering member deteriorates due to the heat.
従って、従来技術には、経年変化による可撓部材の可撓
性低下による導中管の挿入性低下を防ぐことができず、
導中管の使用寿命の延長を図ることができないという欠
点があった。Therefore, the conventional technology cannot prevent the deterioration in the insertability of the guiding tube due to the deterioration in the flexibility of the flexible member due to aging.
This method has a disadvantage in that it is not possible to extend the service life of the guide pipe.
本発明は上記した従来技術の課題を解決するためになさ
れたもので、その目的とするところは、被覆部材を劣化
させることなく、経年変化により軟性化した可撓部材を
硬化させて導中管の可撓性を復元し、経年変化による導
中管の挿入性低下の防止、使用寿命の延長を図ることが
できる内視鏡を提供することにある。The present invention has been made in order to solve the above-mentioned problems of the prior art, and its purpose is to harden the flexible member that has become soft due to aging without deteriorating the covering member. An object of the present invention is to provide an endoscope that can restore the flexibility of the guide tube, prevent deterioration in insertability of the guide tube due to aging, and extend its service life.
[発明の構成]
(課題を解決するための手段)
上記目的を達成するために、本発明にあっては、体腔内
に導入する導中管の最外側に管形状の被覆部材が設けら
れ、該被覆部材の内周面に沿って金属から成り可撓性を
有する可撓部材が配置されて成る内視鏡において、
前記可撓部材に冷却処理のみにより硬度が増加する冷却
硬化型金属が用いられ、経年変化により可撓性が低下し
た導中管を冷却することにより前記可撓部材の硬度及び
可撓性を高め導中管の可撓性を高めるようにしたことを
特徴とする。[Structure of the Invention] (Means for Solving the Problem) In order to achieve the above object, in the present invention, a tube-shaped covering member is provided on the outermost side of the guiding tube introduced into the body cavity, In an endoscope in which a flexible member made of metal and having flexibility is arranged along the inner circumferential surface of the covering member, the flexible member is made of a cooling-hardening metal whose hardness increases only by cooling treatment. The present invention is characterized in that the flexible member is increased in hardness and flexibility by cooling the guiding tube whose flexibility has decreased due to aging, thereby increasing the flexibility of the guiding tube.
上記可撓部材に冷却処理を行わない未硬化の冷却硬化型
金属を用いて、必要に応じて導中管を冷却することによ
りこの可撓部材の硬度を増加させ導中管の可撓性を高め
るようにしてもよい。また、可撓部材の一部分のみに冷
却硬化型金属を用いたり、可撓部材の冷却硬化型金属部
を部分的に冷却してその部分の硬度及び可撓性を変化さ
せることを可能としてもよい。By using an unhardened cold-hardening metal that is not subjected to cooling treatment for the above-mentioned flexible member, and cooling the guide pipe as necessary, the hardness of this flexible member is increased and the flexibility of the guide pipe is increased. It may be increased. Furthermore, it may be possible to use a cooling-hardening metal only in a portion of the flexible member, or to partially cool the cooling-hardening metal portion of the flexible member to change the hardness and flexibility of that portion. .
(作用)
上記構成を有する本発明の内視鏡においては、導中管内
の可撓部材は冷却処理のみにより硬化させることが可能
なので、可撓部材が経年変化により軟性化した場合に、
導中管を冷却することにより可撓部材を硬化させ可撓性
を増加させて、導中管の可撓性を復元し、挿入性の低下
を防止することができる。従って、導中管を加熱する必
要がなく、導中管の被覆部材を熱により劣化させること
はない。(Function) In the endoscope of the present invention having the above configuration, the flexible member in the guiding tube can be hardened only by cooling treatment, so that when the flexible member becomes soft due to aging,
By cooling the guiding tube, the flexible member is hardened and its flexibility is increased, thereby restoring the flexibility of the guiding tube and preventing a decrease in insertability. Therefore, there is no need to heat the guide pipe, and the covering member of the guide pipe does not deteriorate due to heat.
(実施例)
以下に、本発明の実施例を図に基づいて説明する。第1
図は本発明の一実施例の内視鏡における導中管の一部の
構成を示す一部切欠斜視図、第2図は同実施例の内視鏡
の全体構成を示す斜視図である。(Example) Below, an example of the present invention will be described based on the drawings. 1st
FIG. 2 is a partially cutaway perspective view showing the structure of a part of the guide tube in an endoscope according to an embodiment of the present invention, and FIG. 2 is a perspective view showing the overall structure of the endoscope according to the same embodiment.
第2図において1は電子内視鏡装置を示しており、概略
内視鏡2と、内視鏡2がユニバーサルコード3により接
続される装置本体4と、体腔内の検査部位の画像表示を
行うCRTデイスプレィ等のモニタ5とから成る。内視
鏡1は体腔内に導入する挿入部6と、挿入部6の基端部
に設けられスコープ操作を行うための操作部7とから成
り、操作部7にユニバーサルコード3が連結している。In FIG. 2, reference numeral 1 indicates an electronic endoscope device, which generally includes an endoscope 2, a device main body 4 to which the endoscope 2 is connected via a universal cord 3, and an image display of an examination site within a body cavity. It consists of a monitor 5 such as a CRT display. The endoscope 1 consists of an insertion section 6 that is introduced into a body cavity, and an operation section 7 provided at the proximal end of the insertion section 6 for operating the scope, and a universal cord 3 is connected to the operation section 7. .
挿入部6は可撓性を有する導中管(軟性部)8と、導中
管8の先端部に接続され、操作部7におけるアングル操
作により湾曲可能に設けられたアングル部9と、アング
ル部9の先端部に接続された先端硬性部10とから成る
。先端硬性部1oの内部には、CCD等の撮像素子やレ
ンズ系(図示せず)が設けられており、先端硬性部1o
の先端面には、照明光を検査部位に照射させるための照
明用窓や、その反射光を撮像素子に入射させるための観
察用窓(図示せず)が形成されている。そして、ユニバ
ーサルコード3.操作部7及び挿入部6の内部には、装
置本体4内の光源(図示せず)から発生する照明光を体
腔内に導くためのライトガイド1送気・送水チューブ、
撮像素子と装置本体4との間で信号の送受信を行うため
の信号線等(図示せず)が設けられている。The insertion section 6 includes a flexible guide tube (soft section) 8, an angle section 9 that is connected to the tip of the guide tube 8 and can be bent by an angle operation in the operating section 7, and an angle section. 9 and a rigid tip portion 10 connected to the tip portion of the tip portion 9. An imaging device such as a CCD and a lens system (not shown) are provided inside the rigid tip portion 1o.
An illumination window for illuminating the inspection site with illumination light and an observation window (not shown) for allowing the reflected light to enter the image pickup device are formed on the distal end surface of the probe. And universal code 3. Inside the operating section 7 and the insertion section 6, a light guide 1 for guiding illumination light generated from a light source (not shown) in the device main body 4 into the body cavity, an air/water supply tube,
A signal line or the like (not shown) is provided for transmitting and receiving signals between the image sensor and the main body 4 of the apparatus.
導中管8は第1図に示すように、最外側にゴム。As shown in FIG. 1, the guiding tube 8 has rubber on the outermost side.
樹脂等から成る管形状の被覆部材11が設けられ、被覆
部材11の内周面に沿って、可撓性を有する可撓部材と
しての金属製ブレード12及び金属製螺旋管13が固定
配置されている。ブレード12は管形状に形成されてお
り、螺旋形状に形成された螺旋管13がブレード12の
内周面側に配置されている。これらのブレード12及び
螺旋管13は、冷却処理のみにより硬化させることがで
きる冷却硬化型金属(材料名:サブゼロ硬化型ステンレ
ス鋼、日本金属工業株式会社製造)から成り、この金属
を冷却処理を行わない未硬化の状態で使用している。し
かし、この金属は未硬化の状態でもある程度の硬さかあ
り、ブレード12及び螺旋管]3には適度な硬度、可撓
性が与えられている。A tube-shaped covering member 11 made of resin or the like is provided, and a metal blade 12 and a metal spiral tube 13 as flexible members are fixedly arranged along the inner peripheral surface of the covering member 11. There is. The blade 12 is formed in a tube shape, and a spiral tube 13 formed in a spiral shape is arranged on the inner peripheral surface side of the blade 12. These blades 12 and spiral tube 13 are made of a cooling-hardening metal (material name: sub-zero hardening stainless steel, manufactured by Nippon Metal Industry Co., Ltd.) that can be hardened only by cooling treatment. It is not used in an uncured state. However, this metal has a certain degree of hardness even in an unhardened state, and the blade 12 and spiral tube 3 are given appropriate hardness and flexibility.
上記ライトガイド、送気・送水チューブ、信号線等の導
中管内蔵物は螺旋管13の内周側に収納されている。導
中管8は上記ブレード12及び螺旋管13の可撓性によ
り適度な可撓性を有しており、挿入部6を体腔内に導入
する際には、この可撓性のために支障なく速やかに導入
操作を行うことができる。The internal components of the guide tube, such as the light guide, air/water tube, signal line, etc., are housed inside the spiral tube 13. The guiding tube 8 has appropriate flexibility due to the flexibility of the blade 12 and the spiral tube 13, and when introducing the insertion section 6 into the body cavity, it can be easily introduced due to this flexibility. Installation operations can be performed quickly.
挿入部6が体腔内に導入された後は、上記ライトガイド
を介して照明光が検査部位に照射され、その照明反射光
が先端硬性部10内の不図示の対物レンズに入射して撮
像素子上に光像が結像する。After the insertion section 6 is introduced into the body cavity, illumination light is irradiated to the examination site via the light guide, and the reflected illumination light enters an objective lens (not shown) in the rigid tip section 10 and is transmitted to the imaging device. A light image is formed on top.
撮像素子は光像を電気信号に変換し、この信号を信号線
を介して装置本体4に送る。装置本体4内の不図示の情
報処理部では、この信号に信号処理。The image sensor converts the optical image into an electrical signal and sends this signal to the main body 4 of the apparatus via a signal line. An information processing section (not shown) in the main body 4 of the apparatus performs signal processing on this signal.
表示処理を行って得られた映像信号をモニタ5に送り、
モニタ5の画面上に検査部位の表面状態が画像表示され
る。The video signal obtained by performing display processing is sent to the monitor 5,
An image of the surface condition of the inspection site is displayed on the screen of the monitor 5.
導中管内のブレード12や螺旋管13が経年変化により
軟性化して可撓性が低下した場合には、導中管8の可撓
性も低下して挿入性が悪くなる。When the blade 12 and the spiral tube 13 in the guiding tube become soft and less flexible due to aging, the flexibility of the guiding tube 8 also decreases, resulting in poor insertability.
この場合には、導中管8を冷却してブレード12及び螺
旋管13を一40℃以下に冷却することにより、ブレー
ド12.螺旋管13を硬化させて可撓性を向上させ、導
中管8の可撓性を復元することができる。このときブレ
ード12及び螺旋管13を部分的に冷却して、例えば導
中管8の操作部7側の部分が硬く、かっ硬性先端部10
側の部分が柔らかくなるように、部分に応じて可撓性の
大きさを変えるようにすることも可能である。また、ブ
レード12.螺旋管13の全長にわたって上記金属を用
いてもよいが、部分的に用いることも可能である。In this case, the blade 12. By hardening the spiral tube 13 to improve its flexibility, the flexibility of the guiding tube 8 can be restored. At this time, the blade 12 and the spiral tube 13 are partially cooled so that, for example, the portion of the guiding tube 8 on the operating section 7 side is hard, and the rigid tip portion 10 is
It is also possible to vary the amount of flexibility depending on the part, so that the side parts are softer. Also, blade 12. The above-mentioned metal may be used over the entire length of the spiral tube 13, but it is also possible to use it partially.
本実施例においては、経年変化により導中管8の可撓性
が低下した場合に、導中管8を加熱せずにブレード12
.螺旋管13を硬化させることができるので、被覆部材
11を熱により劣化させることなく、ブレード12及び
螺旋管13を硬化させて可撓性を増加させ、それによっ
て、経年変化による導中管8の可撓性、挿入性の低下を
防止し、使用寿命の延長を図ることができる。In this embodiment, when the flexibility of the guide tube 8 decreases due to aging, the blade 12 is heated without heating the guide tube 8.
.. Since the helical tube 13 can be hardened, the blade 12 and the helical tube 13 can be hardened to increase flexibility without deteriorating the covering member 11 due to heat, thereby preventing the guide tube 8 from deteriorating over time. It is possible to prevent a decrease in flexibility and insertability, and to extend the service life.
なお、上記実施例においては電子内視鏡装置を例にとっ
たが、本発明はこれに限定されるものではなく、例えば
ファイバスコープ等も適用可能である。また、本発明は
上記実施例に限定されるものではなく種々変形実施が可
能なことはもちろんである。In addition, although the electronic endoscope apparatus was taken as an example in the said Example, this invention is not limited to this, For example, a fiberscope etc. are applicable. Furthermore, it goes without saying that the present invention is not limited to the above-mentioned embodiments, and can be implemented in various modifications.
[発明の効果]
本発明の内視鏡は以上の構成及び作用を有するもので、
経年変化により導中管の可撓性が低下した場合には、被
覆部材を加熱により劣化させることなく、可撓部材を硬
化させて可撓性を高め、それによって導中管の可撓性を
復元し、挿入性の低下を防止することができる。従って
、導中管の使用寿命を延長することができる。[Effects of the Invention] The endoscope of the present invention has the above configuration and function,
When the flexibility of the guide pipe decreases due to aging, the flexibility of the guide pipe can be increased by hardening the flexible member without causing deterioration of the covering member by heating. It is possible to restore the structure and prevent a decrease in insertability. Therefore, the service life of the guide tube can be extended.
第1図は本発明の一実施例の内視鏡における導中管の一
部の構成を示す一部切欠斜視図、第2図は同実施例の内
視鏡の全体構成を示す斜視図である。
1・・・電子内視鏡装置 2・・・内視鏡6・・・挿入
部 8・・・導中管
9・・・アングル部 10・・・先端硬性部11・・・
被覆部材 12・・・ブレード(可撓部材)]3・・・
螺旋管(可撓部材)FIG. 1 is a partially cutaway perspective view showing the structure of a part of the guiding tube in an endoscope according to an embodiment of the present invention, and FIG. 2 is a perspective view showing the overall structure of the endoscope according to the same embodiment. be. DESCRIPTION OF SYMBOLS 1... Electronic endoscope device 2... Endoscope 6... Insertion part 8... Guide tube 9... Angle part 10... Tip rigid part 11...
Covering member 12...Blade (flexible member)] 3...
Spiral tube (flexible member)
Claims (4)
部材が設けられ、該被覆部材の内周面に沿って金属から
成り可撓性を有する可撓部材が配置されて成る内視鏡に
おいて、 前記可撓部材に冷却処理のみにより硬度が増加する冷却
硬化型金属が用いられ、経年変化により可撓性が低下し
た導中管を冷却することにより前記可撓部材の硬度及び
可撓性を高め導中管の可撓性を高めるようにしたことを
特徴とする内視鏡。(1) A tube-shaped covering member is provided on the outermost side of the guiding tube introduced into the body cavity, and a flexible member made of metal and having flexibility is arranged along the inner peripheral surface of the covering member. In the endoscope, a cooling-hardening metal whose hardness increases only through cooling treatment is used for the flexible member, and the hardness and hardness of the flexible member are increased by cooling the guide tube whose flexibility has decreased due to aging. An endoscope characterized in that the flexibility of the guiding tube is increased.
型金属が用いられ、必要に応じて導中管を冷却すること
により前記可撓部材の硬度を増加させ導中管の可撓性を
高めるようにしたことを特徴とする請求項1記載の内視
鏡。(2) An unhardened cooling-hardening metal that is not subjected to cooling treatment is used for the flexible member, and if necessary, the hardness of the flexible member is increased by cooling the guide pipe, and the flexibility of the guide pipe is increased. 2. The endoscope according to claim 1, characterized in that the endoscope has improved performance.
ことを特徴とする請求項1記載の内視鏡。(3) The endoscope according to claim 1, wherein only a portion of the flexible member is made of a cold hardening metal.
その部分の硬度及び可撓性を変化させることを可能とし
たことを特徴とする請求項1記載の内視鏡。(4) The endoscope according to claim 1, wherein the cooling hardening type metal portion of the flexible member is partially cooled to change the hardness and flexibility of that portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2155416A JPH0449938A (en) | 1990-06-15 | 1990-06-15 | Endoscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2155416A JPH0449938A (en) | 1990-06-15 | 1990-06-15 | Endoscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0449938A true JPH0449938A (en) | 1992-02-19 |
Family
ID=15605522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2155416A Pending JPH0449938A (en) | 1990-06-15 | 1990-06-15 | Endoscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0449938A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6183942B1 (en) | 1999-04-15 | 2001-02-06 | Dongjin Semichem Co., Ltd. | Thinner composition for removing spin-on-glass and photoresist |
JP2007072332A (en) * | 2005-09-09 | 2007-03-22 | Daicel Chem Ind Ltd | Cleaning agent or rinsing agent for lithography |
US7576046B2 (en) | 2004-12-28 | 2009-08-18 | Tokyo Ohka Kogyo Co., Ltd. | Cleaning liquid for lithography and method of cleaning therewith |
US7884062B2 (en) | 2006-02-23 | 2011-02-08 | Tokyo Ohka Kogyo Co., Ltd. | Cleaning liquid for lithography and cleaning method using same |
JPWO2019198128A1 (en) * | 2018-04-09 | 2021-05-20 | オリンパス株式会社 | Endoscope business support system and endoscopic business support method |
-
1990
- 1990-06-15 JP JP2155416A patent/JPH0449938A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6183942B1 (en) | 1999-04-15 | 2001-02-06 | Dongjin Semichem Co., Ltd. | Thinner composition for removing spin-on-glass and photoresist |
US7576046B2 (en) | 2004-12-28 | 2009-08-18 | Tokyo Ohka Kogyo Co., Ltd. | Cleaning liquid for lithography and method of cleaning therewith |
JP2007072332A (en) * | 2005-09-09 | 2007-03-22 | Daicel Chem Ind Ltd | Cleaning agent or rinsing agent for lithography |
JP4588590B2 (en) * | 2005-09-09 | 2010-12-01 | ダイセル化学工業株式会社 | Lithographic cleaning agent or rinse agent |
KR101286817B1 (en) * | 2005-09-09 | 2013-07-17 | 가부시끼가이샤 다이셀 | Cleaning agent or rinsing agent for lithography |
US7884062B2 (en) | 2006-02-23 | 2011-02-08 | Tokyo Ohka Kogyo Co., Ltd. | Cleaning liquid for lithography and cleaning method using same |
JPWO2019198128A1 (en) * | 2018-04-09 | 2021-05-20 | オリンパス株式会社 | Endoscope business support system and endoscopic business support method |
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