JPH0449812Y2 - - Google Patents
Info
- Publication number
- JPH0449812Y2 JPH0449812Y2 JP5771686U JP5771686U JPH0449812Y2 JP H0449812 Y2 JPH0449812 Y2 JP H0449812Y2 JP 5771686 U JP5771686 U JP 5771686U JP 5771686 U JP5771686 U JP 5771686U JP H0449812 Y2 JPH0449812 Y2 JP H0449812Y2
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- axis
- current
- coil
- correction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012937 correction Methods 0.000 claims description 25
- 238000010586 diagram Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5771686U JPH0449812Y2 (enrdf_load_stackoverflow) | 1986-04-17 | 1986-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5771686U JPH0449812Y2 (enrdf_load_stackoverflow) | 1986-04-17 | 1986-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62169456U JPS62169456U (enrdf_load_stackoverflow) | 1987-10-27 |
| JPH0449812Y2 true JPH0449812Y2 (enrdf_load_stackoverflow) | 1992-11-24 |
Family
ID=30887670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5771686U Expired JPH0449812Y2 (enrdf_load_stackoverflow) | 1986-04-17 | 1986-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449812Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-04-17 JP JP5771686U patent/JPH0449812Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62169456U (enrdf_load_stackoverflow) | 1987-10-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3753034A (en) | Electron beam apparatus | |
| JPH06103946A (ja) | 可変軸スティグマトール | |
| JPS6331896B2 (enrdf_load_stackoverflow) | ||
| JP2009054581A (ja) | 荷電粒子ビーム用軌道補正器、及び、荷電粒子ビーム装置 | |
| JPS6159077B2 (enrdf_load_stackoverflow) | ||
| JPH0449812Y2 (enrdf_load_stackoverflow) | ||
| US4393310A (en) | Method of and device for adjusting a shaped-electron-beam working device | |
| JPH0432530B2 (enrdf_load_stackoverflow) | ||
| US4902940A (en) | Current control circuit | |
| US5530252A (en) | Inductively coupled dual-stage magnetic deflection yoke | |
| US2627598A (en) | Phase shift system | |
| US4090077A (en) | Particle beam device with a deflection system and a stigmator | |
| JP3969463B2 (ja) | 荷電粒子ビーム露光方法及び装置 | |
| US3393370A (en) | Multi-geometric pattern electric generator | |
| JPH0582067A (ja) | 対物レンズの励磁電流発生方式 | |
| JPS5983336A (ja) | 荷電粒子線集束偏向装置 | |
| US4980615A (en) | Electron beam control circuit in electron beam evaporators with alternating acceleration voltages | |
| JPH10162772A (ja) | エネルギーフィルタ | |
| JPH10106467A (ja) | 電子レンズおよび無回転レンズ系 | |
| JPS59119662A (ja) | 非点補正装置 | |
| JPH0316204Y2 (enrdf_load_stackoverflow) | ||
| US6140642A (en) | Imaging energy filter equipped with distortion corrector | |
| JPH07262953A (ja) | 荷電粒子ビーム露光装置及び露光方法 | |
| JPH0391921A (ja) | 電子ビーム露光装置 | |
| JPH10263854A (ja) | スキャニング式レーザマーカ装置 |