JPH0449774Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a lighting device, and particularly to a lighting device suitable for a clean room such as a semiconductor manufacturing factory.

[Background of the idea]

Semiconductor manufacturing requires a dust-free environment, so the manufacturing is usually performed in a clean room. Generally, clean rooms use an air circulation system in which clean air is blown into the clean room through multiple HEPA (high performance) filters installed on the ceiling, and air inside the room is sucked in from the floor and passed through HEPA filters on the ceiling again. We are hiring.

Furthermore, in the semiconductor manufacturing process, IC circuit patterns are printed onto a wafer using photographic technology using a stepper (reduction projection type exposure device). That is, coating a silicon wafer with photosensitive resin,
An exposure process is required in which the circuit pattern is printed by shining light onto it. For this reason, when fluorescent lamps are used for illumination in a clean room, the ultraviolet rays emitted from the fluorescent lamps have a serious adverse effect on exposure work in semiconductor manufacturing. For this reason, yellow lights, which do not emit ultraviolet light, have traditionally been used in clean rooms. However, when such a yellow lamp is used, the light from the yellow lamp is weak during work other than exposure work and is not favorable for work. Furthermore, static electricity is likely to be generated on the surface of the fluorescent lamp cover due to the flow of clean air blown into the clean room, and the fluorescent lamp cover, which is heated by the heat generation effect of the fluorescent lamp, is easily charged with electricity. When the fluorescent lamp cover becomes electrically charged, dust tends to adhere to the cover, which may lead to a decrease in illuminance.

[Purpose of invention]

The present invention was made in view of the above circumstances, and the purpose is to propose a lighting device that can provide illumination suitable for work in a clean room.

[Summary of the idea]

The present invention was developed in view of these circumstances, and it supplies clean air that has passed through a high-performance air filter to an indoor work area, which is used for exposure work in which circuit patterns are printed on silicon wafers, and for non-exposure work. In a clean room where semiconductor manufacturing work is carried out, a lighting lamp consisting of a fluorescent lamp is installed on the ceiling of the clean room from which clean air is blown out, and a pair of conductive filters are installed on the inside and outside surfaces of the lighting lamp cover, and the filter is grounded. A transparent part and a shielding part for cutting ultraviolet rays are formed in a band shape on the filter on the inner and outer surfaces of the grounded filter, with their positions alternately shifted from each other.In the case of exposure work, the transparent part and the shielding part of a pair of filters are connected It is characterized by shifting its position to block ultraviolet rays with a shielding part, and removing the filter on the outer surface of the illumination light cover when performing work other than exposure work.

〔Example〕

Preferred embodiments of the lighting device according to the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a sectional view of a clean room equipped with a lighting device according to the present invention. Clean room 10 as shown in Figure 1
The ceiling chamber 12 is provided with an inlet 14 on the right side, and circulating air passes through this inlet 14 into the ceiling chamber 1.
2. In addition, in the ceiling chamber 12, there are a plurality of
A HEPA filter 16... is placed in the ceiling room 1.
The air of No. 2 is sent to the room 20 through the HEPA filter 16. Also, a beam 22 is provided between the adjacent HEPA filters 16, 16, and the indoor 20
A lighting device 24 is attached to the lower surface of the beam 22. Various types of semiconductor manufacturing equipment 26 are arranged in the room 20 .

On the other hand, the foundation floor 28 has a plurality of pillars 30, 30...
... are erected, a floor grating 32 is laid by these supports 30, and air from the room 20 is sucked into the underfloor chamber 34 through the grating 32. An intake port 36 is provided on the right side of the chamber 34, and the intake port 36 is connected to the outside air introduction duct 4 to the air conditioner 40 via an intake duct 38.
The conditioned air mixed by this air conditioner 40 is again supplied to the ceiling room 12 via an air supply duct 46 by a blower 44.

FIG. 2 is an exploded perspective view of a lighting lamp cover used in the lighting device according to the present invention. The cover 50 has a U-shaped cross section and is placed over a straight tube type fluorescent lamp (not shown). Further, the cover 50 has bolt holes 5.
2 is formed, and the cover 50 is attached to a base (not shown) of the lighting device 24 by fastening bolts inserted through bolt holes 52. On the inner surface 50A and outer surface 50B of the cover 50, shielding filters 54 and 56 are respectively attached to shield ultraviolet rays. The shielding filter 56 is formed of a flexible sheet, and has strip-shaped ultraviolet cut portions 58 and transparent portions 60 formed alternately. The filters 54 and 56 are made of acrylic material, and their surfaces are coated with a conductive paint containing translucent tin oxide powder. The ultraviolet cut portion 58 is formed by applying a paint that blocks light wavelengths of 450 nm or less, and the portion to which the shielding paint is not applied is formed as a transparent portion 60. The transparent portion 60 of the inner shielding filter 54 is mounted so as to be located opposite the ultraviolet cut portion 58 of the outer shielding filter 56. A structure thus arranged is shown in FIG. Four L-shaped locking parts 62 are formed at the upper end of the outer shielding filter 56.
2 on the periphery of the upper surface of the cover 50. When the shielding filters 54 and 56 are attached, the ultraviolet cut portion 58 of the inner shielding filter 54 faces the transparent portion 60 of the outer shielding filter 56, and the transparent portion 60 of the inner shielding filter 54 faces the transparent portion 60 of the outer shielding filter 56.
0 is the ultraviolet cut portion 58 of the outer shielding filter 56
It is installed so that it is located opposite to the The shielding filters 54 and 56 are both grounded to a ground provided on a base (not shown).

According to the illumination device according to the present invention configured as described above, the inner shielding filter 54 is attached to the inside of the cover of the illumination device 24, and the outer shielding filter 56 is attached to the illumination device 24 during exposure work for semiconductor manufacturing.
It is attached to the outside of the cover 50 of. By attaching the shielding filter 56, the light source of the illumination device 24 is connected to the ultraviolet cut portion 5 of the shielding filters 54 and 56.
8 completely blocks ultraviolet rays. As a result, the room 20 is illuminated with ultraviolet rays blocked, so that exposure work in semiconductor manufacturing will not be adversely affected. In addition, when not performing exposure work for semiconductor manufacturing that requires ultraviolet rays, the shielding filter 5 is used.
6 is removed from the illumination light cover 50, and the light source of the illumination device 24 illuminates the room from the transparent portion 60 of the shielding filter 54, making it easy to work in a clean room in a bright work environment. Further, since the shielding filters 54 and 56 are conductive, even if static electricity is generated by blowing circulating air, they will not be charged and there is no possibility of dust etc. adhering to them.

[Effect of idea]

As explained above, according to the lighting device according to the present invention, a pair of conductive filters are provided on the inner and outer surfaces of the illumination light cover, and a transparent part and a shielding part are arranged alternately in a strip shape on the filters on the inner and outer surfaces. Since they are staggered from each other, they can effectively block ultraviolet rays, and by removing the outer filter, the interior of the room can be sufficiently irradiated. Furthermore, since the filter is conductive and grounded, it is possible to prevent dust particles charged with static electricity from adhering to the filter.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram of a clean room in which the lighting device according to the present invention is used, Fig. 2 is a perspective view of the illumination light cover and shielding filter of the illumination device according to the present invention, and Fig. 3 is a diagram showing the shielding filter on the illumination light cover. It is a sectional view when it is attached. 10...Clean room, 20...Clean room interior, 26...Semiconductor manufacturing equipment stand, 50...
Illumination light cover, 54, 56...Shielding filter, 5
8... Ultraviolet cut section, 60... Transparent section.

Claims (1)

[Scope of Utility Model Registration Request] A clean room in which clean air that has passed through a high-performance air filter is supplied to an indoor work area, where exposure work for printing circuit patterns on silicon wafers and semiconductor manufacturing work other than exposure work are performed. In this case, a lighting lamp consisting of a fluorescent lamp is installed on the ceiling of a clean room from which clean air is blown out, and a pair of conductive filters are installed on the inner and outer surfaces of the lighting lamp cover, and the filters are grounded. The filter is formed with a transparent part and a shielding part that blocks ultraviolet rays, which are alternately shifted in position in a band-like manner, and in the case of exposure work, the transparent part and the shielding part of a pair of filters are formed in the shielding part by shifting their positions with respect to each other. A lighting device that blocks ultraviolet rays and is characterized in that a filter on the outer surface of a lighting lamp cover can be removed when performing work other than exposure work.