JPH044974Y2 - - Google Patents
Info
- Publication number
- JPH044974Y2 JPH044974Y2 JP1984096504U JP9650484U JPH044974Y2 JP H044974 Y2 JPH044974 Y2 JP H044974Y2 JP 1984096504 U JP1984096504 U JP 1984096504U JP 9650484 U JP9650484 U JP 9650484U JP H044974 Y2 JPH044974 Y2 JP H044974Y2
- Authority
- JP
- Japan
- Prior art keywords
- grating
- scale
- diffraction
- light source
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 29
- 238000001514 detection method Methods 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9650484U JPS6112016U (ja) | 1984-06-27 | 1984-06-27 | 格子干渉型変位検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9650484U JPS6112016U (ja) | 1984-06-27 | 1984-06-27 | 格子干渉型変位検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6112016U JPS6112016U (ja) | 1986-01-24 |
| JPH044974Y2 true JPH044974Y2 (US06566495-20030520-M00011.png) | 1992-02-13 |
Family
ID=30655996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9650484U Granted JPS6112016U (ja) | 1984-06-27 | 1984-06-27 | 格子干渉型変位検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6112016U (US06566495-20030520-M00011.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0443165Y2 (US06566495-20030520-M00011.png) * | 1988-12-03 | 1992-10-13 | ||
| JP7019672B2 (ja) * | 2016-05-03 | 2022-02-15 | アルゲス ゲーエムベーハー | 光学回転角測定システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5165958A (US06566495-20030520-M00011.png) * | 1974-10-31 | 1976-06-08 | Leitz Ernst Gmbh |
-
1984
- 1984-06-27 JP JP9650484U patent/JPS6112016U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5165958A (US06566495-20030520-M00011.png) * | 1974-10-31 | 1976-06-08 | Leitz Ernst Gmbh |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6112016U (ja) | 1986-01-24 |
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