JPH0449063B2 - - Google Patents
Info
- Publication number
- JPH0449063B2 JPH0449063B2 JP57029686A JP2968682A JPH0449063B2 JP H0449063 B2 JPH0449063 B2 JP H0449063B2 JP 57029686 A JP57029686 A JP 57029686A JP 2968682 A JP2968682 A JP 2968682A JP H0449063 B2 JPH0449063 B2 JP H0449063B2
- Authority
- JP
- Japan
- Prior art keywords
- screw
- incident light
- reflected light
- central axis
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2968682A JPS58146843A (ja) | 1982-02-25 | 1982-02-25 | ネジの表面欠陥検査装置 |
| DE19833306194 DE3306194A1 (de) | 1982-02-25 | 1983-02-23 | Verfahren zur pruefung von schraubenoberflaechen auf fehler und vorrichtung zu seiner durchfuehrung |
| US06/469,234 US4598998A (en) | 1982-02-25 | 1983-02-24 | Screw surface flaw inspection method and an apparatus therefor |
| FR8303088A FR2522149B1 (fr) | 1982-02-25 | 1983-02-25 | Procede et appareil de controle de defauts de surface d'une vis |
| GB08305360A GB2115924B (en) | 1982-02-25 | 1983-02-25 | A method of and apparatus for inspecting the surface of a screw to detect flaws |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2968682A JPS58146843A (ja) | 1982-02-25 | 1982-02-25 | ネジの表面欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58146843A JPS58146843A (ja) | 1983-09-01 |
| JPH0449063B2 true JPH0449063B2 (cs) | 1992-08-10 |
Family
ID=12282987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2968682A Granted JPS58146843A (ja) | 1982-02-25 | 1982-02-25 | ネジの表面欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58146843A (cs) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6058536A (ja) * | 1983-09-12 | 1985-04-04 | Kawasaki Steel Corp | 切削加工面の性状検査方法及び装置 |
| JPS60190841A (ja) * | 1984-03-12 | 1985-09-28 | Inatetsuku:Kk | 鋳造品の表面の巣を検出する装置 |
| JPS6219705A (ja) * | 1985-07-18 | 1987-01-28 | Sumitomo Metal Ind Ltd | ネジの表面検査装置 |
| DE10359837A1 (de) * | 2003-12-19 | 2005-07-21 | Kamax-Werke Rudolf Kellermann Gmbh & Co. Kg | Verfahren und Vorrichtung zum Überprüfen eines Gewindes eines Verbindungselements auf Beschädigungen |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5483885A (en) * | 1977-12-17 | 1979-07-04 | Mitsubishi Electric Corp | Surface inspector |
| JPS54150163A (en) * | 1978-05-17 | 1979-11-26 | Nippon Kokan Tsugite Kk | Automatic tester for screw member |
-
1982
- 1982-02-25 JP JP2968682A patent/JPS58146843A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58146843A (ja) | 1983-09-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6636302B2 (en) | Scanning system for inspecting anamolies on surfaces | |
| KR100669845B1 (ko) | 표면 상의 이상을 검사하기 위한 스캐닝 방법 및 시스템 | |
| US20050036137A1 (en) | Scanning system for inspecting anamolies on surfaces | |
| WO1996018093A9 (en) | Scanning system for inspecting anomalies on surfaces | |
| JPH0449063B2 (cs) | ||
| JPH034081B2 (cs) | ||
| JPH11142127A (ja) | ウェーハ表面検査方法とその装置 | |
| JPH0514221B2 (cs) | ||
| JPS61288143A (ja) | 表面検査装置 | |
| JPH0712747A (ja) | 薄膜付きディスク表面検査方法及びその装置 | |
| JPH0414727B2 (cs) | ||
| JPH0422444B2 (cs) | ||
| JPS61133843A (ja) | 表面検査装置 | |
| JPS61260147A (ja) | 表面欠陥検査装置 | |
| JPH07151514A (ja) | 重ね合わせ精度測定方法および測定装置 | |
| JPH09326030A (ja) | ゴムシールの検査装置 | |
| JPS6355655B2 (cs) | ||
| JPH05332947A (ja) | 表面検査装置及び方法 | |
| JPS61228333A (ja) | 表面欠陥検出装置 | |
| JPS63316184A (ja) | プリント基板パタ−ンの光学的読取方式 | |
| JPS61230049A (ja) | 表面欠陥検出方法およびその装置 | |
| JPS6256847A (ja) | 光ビ−ム表面検査装置 | |
| JPH0122951B2 (cs) | ||
| JPS62257741A (ja) | 半導体基板表面検査装置 | |
| JPS61126405A (ja) | 位置検査装置 |