JPH0448871Y2 - - Google Patents
Info
- Publication number
- JPH0448871Y2 JPH0448871Y2 JP1987032252U JP3225287U JPH0448871Y2 JP H0448871 Y2 JPH0448871 Y2 JP H0448871Y2 JP 1987032252 U JP1987032252 U JP 1987032252U JP 3225287 U JP3225287 U JP 3225287U JP H0448871 Y2 JPH0448871 Y2 JP H0448871Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- tank
- liquid
- liquid level
- solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987032252U JPH0448871Y2 (cs) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987032252U JPH0448871Y2 (cs) | 1987-03-05 | 1987-03-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63141690U JPS63141690U (cs) | 1988-09-19 |
| JPH0448871Y2 true JPH0448871Y2 (cs) | 1992-11-17 |
Family
ID=30838754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987032252U Expired JPH0448871Y2 (cs) | 1987-03-05 | 1987-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448871Y2 (cs) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5172366U (cs) * | 1974-12-04 | 1976-06-07 | ||
| JPS60125282A (ja) * | 1983-12-13 | 1985-07-04 | 有限会社タス技術研究所 | 無塵洗浄乾燥装置 |
| JPS6215824A (ja) * | 1985-07-12 | 1987-01-24 | Matsushita Electric Ind Co Ltd | 半導体ウエハの処理方法 |
-
1987
- 1987-03-05 JP JP1987032252U patent/JPH0448871Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63141690U (cs) | 1988-09-19 |
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