JPH0448632U - - Google Patents
Info
- Publication number
- JPH0448632U JPH0448632U JP9028590U JP9028590U JPH0448632U JP H0448632 U JPH0448632 U JP H0448632U JP 9028590 U JP9028590 U JP 9028590U JP 9028590 U JP9028590 U JP 9028590U JP H0448632 U JPH0448632 U JP H0448632U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transport section
- horizontal transport
- wafer holding
- wafer holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000001514 detection method Methods 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9028590U JPH0448632U (pt) | 1990-08-28 | 1990-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9028590U JPH0448632U (pt) | 1990-08-28 | 1990-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0448632U true JPH0448632U (pt) | 1992-04-24 |
Family
ID=31824903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9028590U Pending JPH0448632U (pt) | 1990-08-28 | 1990-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448632U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020015605A (ja) * | 2018-07-27 | 2020-01-30 | シブヤパッケージングシステム株式会社 | 容器移載装置における内容物飛び出し防止機構 |
-
1990
- 1990-08-28 JP JP9028590U patent/JPH0448632U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020015605A (ja) * | 2018-07-27 | 2020-01-30 | シブヤパッケージングシステム株式会社 | 容器移載装置における内容物飛び出し防止機構 |