JPS64329U - - Google Patents
Info
- Publication number
- JPS64329U JPS64329U JP9422987U JP9422987U JPS64329U JP S64329 U JPS64329 U JP S64329U JP 9422987 U JP9422987 U JP 9422987U JP 9422987 U JP9422987 U JP 9422987U JP S64329 U JPS64329 U JP S64329U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- reaction tube
- elevator
- vertical
- vertical diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9422987U JPS64329U (pt) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9422987U JPS64329U (pt) | 1987-06-19 | 1987-06-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS64329U true JPS64329U (pt) | 1989-01-05 |
Family
ID=30957486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9422987U Pending JPS64329U (pt) | 1987-06-19 | 1987-06-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS64329U (pt) |
-
1987
- 1987-06-19 JP JP9422987U patent/JPS64329U/ja active Pending