JPH0447641U - - Google Patents

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Publication number
JPH0447641U
JPH0447641U JP8854590U JP8854590U JPH0447641U JP H0447641 U JPH0447641 U JP H0447641U JP 8854590 U JP8854590 U JP 8854590U JP 8854590 U JP8854590 U JP 8854590U JP H0447641 U JPH0447641 U JP H0447641U
Authority
JP
Japan
Prior art keywords
pressure
pedestal
thick film
zirconia substrate
pressure impulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8854590U
Other languages
Japanese (ja)
Other versions
JP2547950Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990088545U priority Critical patent/JP2547950Y2/en
Publication of JPH0447641U publication Critical patent/JPH0447641U/ja
Application granted granted Critical
Publication of JP2547950Y2 publication Critical patent/JP2547950Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この考案の好適な実施例を示す縦断
面図、第2図は第1図に示す台座及び内部端子等
の斜視図、第3図は第1図に示す厚膜圧力センサ
に備えた薄膜体の斜視図である。 1……ケース、2……台座、3……ジルコニア
基板、4……感圧低抗体、5……薄膜体。
FIG. 1 is a longitudinal sectional view showing a preferred embodiment of this invention, FIG. 2 is a perspective view of the pedestal and internal terminals shown in FIG. 1, and FIG. 3 is a thick film pressure sensor shown in FIG. 1. It is a perspective view of the thin film body provided. 1... Case, 2... Pedestal, 3... Zirconia substrate, 4... Pressure-sensitive low antibody, 5... Thin film body.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 導圧管11を有する硬質のケース1と、前記導
圧管11の導圧穴12に周設する台座2と、該台
座2の正圧力を受ける側の面上に接着するジルコ
ニア基板3と、該ジルコニア基板3上に厚膜印刷
で形成した感圧低抗体4とを具備した厚膜圧力セ
ンサ。
A hard case 1 having a pressure impulse tube 11, a pedestal 2 provided around the pressure impulse hole 12 of the pressure impulse tube 11, a zirconia substrate 3 bonded to the surface of the pedestal 2 on the side receiving positive pressure, and the zirconia substrate. 3 and a pressure-sensitive low antibody 4 formed by thick film printing on the thick film pressure sensor.
JP1990088545U 1990-08-24 1990-08-24 Thick film pressure sensor Expired - Fee Related JP2547950Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990088545U JP2547950Y2 (en) 1990-08-24 1990-08-24 Thick film pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990088545U JP2547950Y2 (en) 1990-08-24 1990-08-24 Thick film pressure sensor

Publications (2)

Publication Number Publication Date
JPH0447641U true JPH0447641U (en) 1992-04-22
JP2547950Y2 JP2547950Y2 (en) 1997-09-17

Family

ID=31821848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990088545U Expired - Fee Related JP2547950Y2 (en) 1990-08-24 1990-08-24 Thick film pressure sensor

Country Status (1)

Country Link
JP (1) JP2547950Y2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079242A (en) * 1983-10-07 1985-05-07 Hitachi Ltd Pressure converter
JPS60185129A (en) * 1984-03-03 1985-09-20 Aisin Seiki Co Ltd Pressure sensor
JPS60253280A (en) * 1984-05-29 1985-12-13 Omron Tateisi Electronics Co Semiconductor pressure sensor
JPS6421331A (en) * 1987-07-17 1989-01-24 Jgc Corp Pressure sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079242A (en) * 1983-10-07 1985-05-07 Hitachi Ltd Pressure converter
JPS60185129A (en) * 1984-03-03 1985-09-20 Aisin Seiki Co Ltd Pressure sensor
JPS60253280A (en) * 1984-05-29 1985-12-13 Omron Tateisi Electronics Co Semiconductor pressure sensor
JPS6421331A (en) * 1987-07-17 1989-01-24 Jgc Corp Pressure sensor

Also Published As

Publication number Publication date
JP2547950Y2 (en) 1997-09-17

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