JPH0286152U - - Google Patents
Info
- Publication number
- JPH0286152U JPH0286152U JP16553788U JP16553788U JPH0286152U JP H0286152 U JPH0286152 U JP H0286152U JP 16553788 U JP16553788 U JP 16553788U JP 16553788 U JP16553788 U JP 16553788U JP H0286152 U JPH0286152 U JP H0286152U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- diaphragm
- semiconductor substrate
- semiconductor
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
第１図は本考案の一実施例を示す平面図、第２
図及び第３図は夫々同ダイヤフラムの長さ方向及
び幅方向の縦断側面図であり、第４図は従来例を
示す第１図相当図である。
図面中、１１は半導体基板、１２はダイヤフラ
ム、１３は溝部、１５は抵抗部を示す。
Fig. 1 is a plan view showing one embodiment of the present invention;
3 and 3 are longitudinal sectional side views of the same diaphragm in the length direction and width direction, respectively, and FIG. 4 is a view corresponding to FIG. 1 showing a conventional example. In the drawings, 11 is a semiconductor substrate, 12 is a diaphragm, 13 is a groove, and 15 is a resistor.
Claims (1)
長尺状をなす薄肉のダイヤフラムが形成されてな
る半導体圧力センサにおいて、前記ダイヤフラム
は前記半導体基板に対してその幅方向が軸方位＜
１１１＞方向に沿い且つ長さ方向が対角線上に沿
つて配置されていることを特徴とする半導体圧力
センサ。 In a semiconductor pressure sensor in which a thin elongated diaphragm is formed on a rectangular semiconductor substrate with a 110-plane orientation, the width direction of the diaphragm is in an axial direction with respect to the semiconductor substrate.
A semiconductor pressure sensor characterized in that it is arranged along the 111> direction and its length direction is diagonal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16553788U JPH073647Y2 (en) | 1988-12-21 | 1988-12-21 | Semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16553788U JPH073647Y2 (en) | 1988-12-21 | 1988-12-21 | Semiconductor pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0286152U true JPH0286152U (en) | 1990-07-09 |
| JPH073647Y2 JPH073647Y2 (en) | 1995-01-30 |
Family
ID=31452113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16553788U Expired - Lifetime JPH073647Y2 (en) | 1988-12-21 | 1988-12-21 | Semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073647Y2 (en) |
-
1988
- 1988-12-21 JP JP16553788U patent/JPH073647Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073647Y2 (en) | 1995-01-30 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |