JPH0447509A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE:To prevent the magnetic characteristic of a magnetic head consisting of soft magnetic thin film formed on a wall plane deteriorating by reinforcing a groove terminal part at a side through which a blade is blanked with a dressing board. CONSTITUTION:Groove working to a substrate 1 is performed by applying dicing working using the blade. When groove forming working is performed, the dressing board 10 for the protection of the side through which the blade is blanked and the dressing of the blade in finishing work is solidified in a state where it is adhered closely on the side plane 1b of the substrate 1 at the side through which the blade is blanked when the groove forming working is performed. Therefore, the omission of the groove terminal part at the side through which the blade is blanked and a fault such as the deformation of the blade due to working heat by chipping or clogging, etc., can be evaded. Thereby, it is possible to prevent the magnetic characteristic of the magnetic head consisting of the soft magnetic thin film formed at a groove wall plane 5 from deteriorating.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a magnetic head having a high saturation magnetic flux density necessary for high-density recording and reproduction in video tape recorders and the like.

[Prior Art] In recent years, with the increase in the density of magnetic recording, high coercive force media such as metal tapes have become mainstream. For this reason,
Magnetic heads are also required to have high saturation magnetic flux density.

Therefore, as shown in FIG. 5, a soft magnetic thin film 32 made of a soft magnetic material such as Fe-A 1-Si alloy having a high saturation magnetic flux density is provided on the wall surface 35a of the groove formed in the substrate 31. A magnetic herad tip 40 is used. As the substrate 31, a material such as crystallized glass or ceramics having excellent wear resistance is selected since the upper surface in the figure serves as the tape sliding surface.

In the process of manufacturing the magnetic head as described above, a plurality of grooves 35 having a cross-sectional shape of a square cross section are formed in parallel and adjacent to each other, as shown in FIG. 6, on the substrate 31.

After this step, although not shown, the soft magnetic thin film is formed on each wall surface of one side of the groove by vacuum evaporation, sputtering, or the like.

By the way, in order to obtain good magnetic properties, each wall surface 35a on which the soft magnetic thin film 32 is formed needs to have a predetermined shape and smoothness. For this reason, when processing grooves on a hard-to-process material such as the substrate 31, which has excellent wear resistance and therefore high hardness, it is necessary to perform rough processing to a certain extent by dicing using a blade with a low diamond grain size. Finishing is done by dicing using a blade with a high grain size.

As shown in Fig. 6, the operating procedure for such processing is to sequentially increase the depth in two directions, feed the blade in the X direction, and continue to do this in the X direction at intervals of the above pitch dimension. ing.

[Problem to be solved by the invention]

However, in the above-mentioned groove machining, since the material such as the substrate 31 is brittle, chipping or chimping may occur at the groove end 33 on the side where the blade of the substrate 31 is removed during rough machining, as shown in FIG. In addition, the blade is easily clogged during finishing machining, so the blade is deformed by the heat of machining caused by the clogging, and if such a deformed blade is used, the tip of the V-shaped groove The grooves are rounded or deformed, and the finish of the groove walls is also deteriorated.

The magnetic properties of the magnetic head made of the soft magnetic thin film formed on the deteriorated wall surface have deteriorated. On the other hand, since the blade shape is easily deformed, machining is likely to be interrupted for blade renewal, making continuous machining difficult. As a result, there is a problem of poor productivity.

[Means to solve the problem]

In order to solve the above-mentioned problem, a method for manufacturing a magnetic head according to the present invention includes forming a plurality of grooves of a magnetic head in which a soft magnetic thin film is provided along each wall surface of a plurality of grooves continuously formed in a substrate. In a method of manufacturing a magnetic head performed by dicing using a blade, one surface of the substrate is arranged such that a dressing board for shaping the cross-sectional shape of the peripheral edge of the blade into a predetermined shape is in contact with the end of the groove on the side where the blade exits. The groove is formed by being closely fixed to the groove.

[For production]

According to the above configuration, the groove end on the side where the blade exits is reinforced by the dressing board, and deformation of the groove shape due to chipping or chimping of the groove end is reduced.

On the other hand, since the blade is redressed by the provided dressing board every time the groove is processed, clogging of the blade is avoided, and deformation of the blade due to processing heat caused by this clogging can be prevented.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 4.

The manufacturing process of the magnetic head according to this embodiment will be explained step by step with reference to FIGS. 1 to 4.

First, as shown in FIG. 1, on the surface 1a of a substrate 1 having a substantially rectangular parallelepiped shape, a plurality of grooves 2 having a cross section of a predetermined pitch and depth are adjacent to each other and parallel to each other. It is formed in a shape that extends to . As the substrate 1, one surface of the substrate 1 becomes the sliding contact surface of the magnetic tape, so a material with excellent wear resistance, such as crystallized glass, is selected.

Grooving as described above in the substrate 1, which has such wear resistance and therefore high hardness, is performed by dicing using a blade. In this process, a plurality of diamond grinding wheel blades with two to three different grain sizes, for example, are sequentially used. After rough machining to a certain extent, finish machining is performed to a predetermined shape shown by the solid line in the figure using a blade with a high diamond grain size.

As shown in Figure 1, the machining procedure at this time is to feed the blade in the X direction while increasing the depth of the blade in two directions, and continue to feed the blade in the X direction at intervals of the above pitch dimension. I will do it.

During this groove forming process, a dressing board 10 for protecting the end of the groove on the exit side of each blade and for adjusting the blade during finishing is installed on the board 1 on the exit side of each blade. It is fixed in close contact with the side surface 1b.

The shape of this dressing board 10 is almost similar to the side surface 1b, and the height in the Z direction and the depth in the X direction of this side surface 1b in the figure are approximately equal, and the width in the Although it is determined by the speed, the material of each blade, etc., in this example, it is formed to a thickness of approximately 1 mm. On the other hand, the material of this dressing board 10 is as follows:
A grindstone for reconditioning finishing blades that are particularly prone to clogging, such as GC (Green Carbi).
A grindstone such as a de) type is selected.

Next, as shown in FIG. 3, a layer of, for example, Fe-A 1- having a high saturation magnetic flux density is deposited on one of the groove wall surfaces 5 of the valley grooves 2 by vacuum evaporation or sputtering.
A soft magnetic thin film 6 made of a soft magnetic material such as a 5i alloy is formed to a predetermined thickness, that is, a thickness approximately corresponding to the track width of the magnetic head.

After that, although not shown, each groove is filled with low-melting point glass, and then the surface of the low-melting point glass is polished into a flat surface until it reaches the apex on the surface side of the valley groove, forming a polished surface. A block is formed. Next, a coil winding window having a trapezoidal cross section and a recessed groove shape is provided on the polished surface side of the one-sided core block, and a coil winding window having a U-shaped cross section is provided on the opposite surface of the polished surface. Each is formed. Thereafter, a film of a non-magnetic gap material such as Sing is deposited on the polished surface by vacuum evaporation or sputtering.

In this way, each coil winding window and one side core block on which the non-magnetic gap material is formed are placed on the other side core block formed in the same way, and the polished surfaces on which the non-magnetic gap material is coated are connected to each other. are facing each other, and the soft magnetic thin films extending along the groove wall surfaces of the valley grooves toward the polishing surface are positioned on the same straight line, and are pressurized and fixed and bonded to each other to produce a core block.

Then, by cutting out the core block with each groove width,
A head chip 7 shown in FIG. 4 is formed. The head chip 7 is then adhesively fixed to a base plate (not shown), and further subjected to coil winding and tape sliding surface polishing to complete the magnetic head.

In this way, in the above manufacturing method, when forming the soft magnetic thin film 6 along the surface of each groove wall surface 5... 500 angstroms or less), the dressing board 10 is fixed in close contact with the side surface 1b through which each blade exits, and groove processing is performed while sequentially changing from a coarse blade to a fine blade. In other words,
In this groove processing, the substrate 1 is gradually ground and the valley grooves 2...
At the same time as the grooves are being formed, the dressing board 10 is ground by each blade into a shape similar to the groove shape being formed.

Therefore, since each groove end in contact with the side surface 1b, which is on the side where the blade comes out and is subjected to a large internal stress, is always held down by the dressing board 10, the groove end is reinforced, and this dressing Since the board 10 is selected to match the blade for finishing, the blade is especially refitted during finishing.

For these reasons, problems that conventionally occur such as chipping, chipping, and deformation of the blade due to machining heat due to clogging at the groove end on the side where the blade exits can be avoided. In this way, the valley groove 2 is formed while avoiding obstacles.
. . . The shape and finish of these groove wall surfaces 5 . . . are good.

Therefore, in a magnetic head made of the soft magnetic thin film 6 formed on the groove wall surface 5, the deterioration of the magnetic properties that has conventionally occurred can be prevented, and deformation of the blade due to clogging can be avoided. Since interruptions in machining due to replacement of deformed blades are also reduced, continuous machining becomes easier than before.

As a result, productivity can be improved compared to the conventional method.

In addition, although the above embodiment has been explained using an example in which crystallized glass is used as the substrate 1, it is also possible to use photosensitive crystallized glass instead of this crystallized glass. The present invention can also be applied when the substrate 1 is made of other difficult-to-process materials such as ferrite.

On the other hand, although the groove shape has been described by taking as an example a square-shaped cross section, the present invention can also be applied to other shapes, for example, when using grooves having a substantially inverted trapezoidal cross section that is wider at the top. In addition, although an example is given in which a diamond grindstone is used as the blade, other methods such as CB N (Cubic Bor
It is also possible to use a blade such as a grindstone (on N1tride). Furthermore, although an example is given in which a GC-based grindstone is used as the dressing board material, other materials such as CB N (Cubic Boron N1 trid
e) It is also possible to use a material such as a grindstone.

〔Effect of the invention〕

As described above, the method for manufacturing a magnetic head according to the present invention includes:
Groove formation by dicing using a blade is performed with a dressing board that shapes the cross-sectional shape of the peripheral edge of the blade into a predetermined shape tightly fixed to one surface of the substrate so as to be in contact with the end of the groove on the side where the blade exits. It is something.

This reduces the deformation of the groove shape due to chipping and chipping of the groove edges on the side when removing the blade during machining.
On the other hand, since clogging of the blade is avoided and deformation of the blade due to this clogging can be prevented, the finished state of the valley groove and each groove wall surface formed using such a blade is also good.

Therefore, deterioration of the magnetic characteristics of the magnetic head, which conventionally occurs, can be prevented. Furthermore, since deformation of the blade due to clogging is avoided, interruptions in machining for updating deformed blades are also reduced, and continuous machining can be performed more easily than before.

As a result, it is possible to improve productivity.

[Brief explanation of the drawing]

1 to 4 show one embodiment of the present invention. FIG. 1 is a perspective view of the substrate after fixing the dressing board and forming grooves. FIG. 2 is a sectional view of the main part of the substrate after groove formation, showing rough machining and finishing machining. FIG. 3 is a sectional view of a main part of the substrate after forming a soft magnetic thin film in the groove. FIG. 4 is a perspective view of the Herad tip. 5 to 7 show conventional examples. FIG. 5 is a perspective view of the head chip. FIG. 6 is a perspective view of the substrate after grooves have been formed. FIG. 7 is a perspective view of the substrate showing a disordered groove shape after groove formation. 1 is a substrate, 2 is a groove, 5 is a groove wall surface, 6 is a soft magnetic thin film, 10
is the dressing board. Patent applicant Sharp Co., Ltd.

Claims (1)

[Claims] 1. Formation of the grooves of a magnetic head in which a soft magnetic thin film is provided along each wall surface of a plurality of grooves continuously formed in the substrate,
In a method of manufacturing a magnetic head performed by dicing using a blade, a dressing board for shaping the cross-sectional shape of the peripheral edge of the blade into a predetermined shape is placed on one surface of the substrate so as to be in contact with the groove end on the side where the blade exits. A method of manufacturing a magnetic head, characterized in that the grooves are formed by closely fixing the magnetic head.