JPH04265505A - Manufacture of magnetic head - Google Patents

Manufacture of magnetic head

Info

Publication number
JPH04265505A
JPH04265505A JP2720591A JP2720591A JPH04265505A JP H04265505 A JPH04265505 A JP H04265505A JP 2720591 A JP2720591 A JP 2720591A JP 2720591 A JP2720591 A JP 2720591A JP H04265505 A JPH04265505 A JP H04265505A
Authority
JP
Japan
Prior art keywords
grindstone
machining
finishing
groove
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2720591A
Other languages
Japanese (ja)
Inventor
Akihito Enomoto
昭仁 榎本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP2720591A priority Critical patent/JPH04265505A/en
Publication of JPH04265505A publication Critical patent/JPH04265505A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To suppress the occurrence of crack, fracture and coagulation and to suppress the deterioration of the characteristics of a thin soft magnetic film formed on the surface of a groove wall by reducing machining force and increasing a cooling effect for the abrasive grains of a grindstone and a bond used at the time of machining by means of a recessed part provided on the grinding surface of the grindstone, for finish machining and by means of the reduction of grounding area at the time of finish machining. CONSTITUTION:The finish machining is performed on the tilted surface of a groove 2 with an approximate V-shape which is formed on the surface of a circuit board by a rotary grindstone for rough machining, excluding the part adjacent part to the top part of the approximate V-shaped groove, by means of a grindstone 5 for finish machining which has finer abrasive grains than that of the grindstone for rough machining, whose grinding surface is formed in the shape obtained by cutting off the top part of the approximate V-shaped cross section, and which is provided with a part on its grinding surface.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、高密度磁気記録及び再
生を行うために必要な高い飽和磁束密度を有する磁気ヘ
ッドの製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head having a high saturation magnetic flux density necessary for high-density magnetic recording and reproduction.

【0002】0002

【従来の技術】磁気記録の高密度化に伴い、磁気テープ
等の磁気記録媒体の高保磁力化と共に、磁気ヘッドも高
飽和磁束密度を有するものが要求されている。そこで、
高い飽和磁束密度を有する軟磁性薄膜を非磁性材料の基
板に設けてなる磁気ヘッドチップが使用されている。上
記基板としては、その一部が磁気テープの摺接面となる
ことから、例えば、耐摩耗性に優れたセラミックスや結
晶化ガラス等の非磁性材料が選定されている。
2. Description of the Related Art With the increasing density of magnetic recording, magnetic recording media such as magnetic tapes are required to have a high coercive force, and magnetic heads are also required to have a high saturation magnetic flux density. Therefore,
A magnetic head chip is used in which a soft magnetic thin film having a high saturation magnetic flux density is provided on a substrate made of a non-magnetic material. As the substrate, a part of which becomes the sliding contact surface of the magnetic tape, a non-magnetic material such as ceramics or crystallized glass, which has excellent wear resistance, is selected.

【0003】このような磁気ヘッドの製造過程において
は、図12に示すように、基板31の表面に複数の断面
略V字状の溝32…が相互に隣接して形成され、これら
各溝32…の一方の傾斜表面に、軟磁性薄膜がそれぞれ
形成される。このように上記溝32…の表面に軟磁性薄
膜が成膜されるため、これら溝表面は極力平滑に仕上げ
ることが必要となっている。したがって、従来は、前記
のように基板31が難加工性の材料からなるため、まず
、断面略V字状の粗加工用の回転砥石によって、基板表
面に溝32…を形成し、次いで、粗加工用砥石よりも砥
粒粒度が細かく、粗加工用砥石と同一の断面形状を有す
る仕上げ加工用の回転砥石を用いて、粗加工用砥石で形
成した溝32…の表面の仕上げを行うという二段階の加
工が行われている。
In the manufacturing process of such a magnetic head, as shown in FIG. A soft magnetic thin film is formed on one inclined surface of each. Since the soft magnetic thin film is thus formed on the surfaces of the grooves 32, it is necessary to finish the surfaces of these grooves as smooth as possible. Therefore, conventionally, since the substrate 31 is made of a material that is difficult to process as described above, the grooves 32 are first formed on the substrate surface using a rotary grindstone for rough machining having a roughly V-shaped cross section, and then the grooves 32 are formed on the substrate surface. The second method involves finishing the surface of the grooves 32 formed by the rough-processing whetstone using a finishing-use rotary whetstone that has finer abrasive grain size than the processing whetstone and has the same cross-sectional shape as the rough-processing whetstone. Staged processing is being carried out.

【0004】0004

【発明が解決しようとする課題】ところが、上記仕上げ
加工用の回転砥石によって溝の仕上げ加工を行う場合に
、従来は砥粒の損耗や結合剤の軟化、砥粒の脱落等が生
じ易く、このため、基板31に形成される溝32…にク
ラックやワレ、凝着等が生じ、この結果、溝表面に形成
される軟磁性薄膜の特性劣下につながるという問題を生
じている。つまり、仕上げ加工用砥石での加工時には、
表面の凹凸が大きな粗加工用砥石に比べて基板31との
微視的な接触面積が大きくなることから、全体的な接触
面積も粗加工時よりも広くなる。これにより、仕上げ加
工時の切り込み速度を小さくしても、大きな加工力を必
要とする研削加工となっている。そして、このような加
工に伴って発熱量も大きく、この熱量が充分には放熱さ
れずに温度上昇を生じる結果、上記のような問題点を生
じるものとなっている。
[Problems to be Solved by the Invention] However, when finishing grooves using the above-mentioned rotating grindstone for finishing, conventional methods tend to cause wear of the abrasive grains, softening of the binder, falling off of the abrasive grains, etc. As a result, cracks, cracks, adhesion, etc. occur in the grooves 32 formed on the substrate 31, resulting in a problem of deterioration of the characteristics of the soft magnetic thin film formed on the surface of the grooves. In other words, when processing with a finishing grindstone,
Since the microscopic contact area with the substrate 31 is larger than that of a rough processing grindstone with large surface irregularities, the overall contact area is also larger than during rough processing. As a result, even if the cutting speed during finish machining is reduced, the grinding process requires a large machining force. Further, along with such processing, a large amount of heat is generated, and this amount of heat is not sufficiently dissipated, causing a rise in temperature, resulting in the above-mentioned problems.

【0005】[0005]

【課題を解決するための手段】本発明の磁気ヘッドの製
造方法は、上記課題を解決するために、基板表面に粗加
工用の回転砥石によって断面略V字状の溝を形成した後
、上記粗加工用の回転砥石よりも砥粒粒度の細かい仕上
げ加工用の回転砥石によって溝表面の仕上げ加工を行う
磁気ヘッドの製造方法において、上記仕上げ加工用砥石
の研削面を略V字状断面から頂点部を切除した形状で形
成すると共に、上記研削面に凹部を設け、この仕上げ加
工用砥石によって、粗加工用砥石で形成された溝におけ
る頂点部近傍を除く傾斜表面の仕上げ加工を行うことを
特徴としている。
[Means for Solving the Problems] In order to solve the above-mentioned problems, the method for manufacturing a magnetic head of the present invention includes forming grooves having a substantially V-shaped cross section on the surface of a substrate using a rotary grindstone for rough processing, and then In a method for manufacturing a magnetic head in which a groove surface is finished by a finishing grinding wheel having a finer abrasive grain size than a roughing grinding wheel, the grinding surface of the finishing grinding wheel is cut from a substantially V-shaped cross section to an apex. The grinding surface is formed with a cut-out shape, and a recess is provided on the grinding surface, and the finishing grindstone is used to finish the sloped surface of the groove formed by the rough grinding wheel, excluding the vicinity of the apex. It is said that

【0006】[0006]

【作用】上記の磁気ヘッドの製造方法においては、仕上
げ加工用砥石は、その研削面が略V字状断面から頂点部
を切除した形状で形成されており、この仕上げ加工用砥
石を用いて、粗加工用砥石で形成された溝における頂点
部近傍を除く傾斜表面の仕上げ加工が行われる。したが
って、この仕上げ加工時に基板と接して研削を行う面積
は従来よりも小さくなることから、より小さな加工力で
仕上げ加工が行われる。さらに、仕上げ加工用砥石の研
削面に凹部が形成されており、例えばこの凹部内に流入
した冷却液が砥石と基板とが摺接する研削領域内まで導
かれることから、冷却効果も増大する。このように、よ
り小さな加工力で、仕上げ加工をなし得ると共に、より
好適な冷却作用が生じて温度上昇が抑制されることから
、従来生じていた砥粒の損耗や結合剤の軟化、砥粒の脱
落等が防止される。
[Operation] In the method for manufacturing a magnetic head described above, the grinding wheel for finishing has a grinding surface with the apex removed from a substantially V-shaped cross section, and using this grinding wheel for finishing, Finish processing is performed on the sloped surface of the groove formed by the rough processing grindstone, except for the vicinity of the apex. Therefore, the area to be ground in contact with the substrate during this finishing process is smaller than in the past, so the finishing process is performed with smaller processing force. Furthermore, a recess is formed in the grinding surface of the finishing grindstone, and for example, the cooling liquid flowing into the recess is guided into the grinding region where the grindstone and the substrate come into sliding contact, thereby increasing the cooling effect. In this way, finishing machining can be performed with less machining force, and a more suitable cooling effect is generated to suppress temperature rise. Falling off, etc. is prevented.

【0007】[0007]

【実施例】本発明の一実施例について図1ないし図11
に基づいて説明すれば、以下の通りである。
[Example] An embodiment of the present invention FIGS. 1 to 11
The explanation based on this is as follows.

【0008】磁気ヘッドの製造に際しては、まず図2に
示すように、略直方体形状の基板1の表面に所定のピッ
チAで断面略V字状の複数の溝2…が相互に隣接して互
いに平行に延びる形状で形成される。上記基板1として
は、この基板1における一面が、後述するように磁気テ
ープの摺接面となることから、例えば、セラミックス、
または結晶化ガラス等の耐摩耗性に優れた非磁性材料が
選定される。このような非磁性材料よりなる上記基板1
は耐摩耗性に優れる反面、難加工性であるため、溝2…
の形成は、砥粒粒度及び形状の異なる二種類の回転砥石
により、粗加工と仕上げ加工との二段階の工程によって
行われる。
When manufacturing a magnetic head, first, as shown in FIG. 2, a plurality of grooves 2 having a substantially V-shaped cross section are formed adjacent to each other on the surface of a substantially rectangular parallelepiped substrate 1 at a predetermined pitch A. It is formed in a shape that extends in parallel. The substrate 1 may be made of, for example, ceramics, since one surface of the substrate 1 becomes the sliding contact surface of the magnetic tape as described later.
Alternatively, a non-magnetic material with excellent wear resistance such as crystallized glass is selected. The substrate 1 made of such a non-magnetic material
Although it has excellent wear resistance, it is difficult to machine, so groove 2...
The formation is carried out using two types of rotating grindstones with different abrasive grain sizes and shapes through a two-step process of rough machining and finishing machining.

【0009】粗加工工程では、図3に示すように、外周
縁部の断面がV字状で砥粒粒度の粗い粗加工用の回転砥
石3を用いて溝加工が行われる。次に、粗加工用砥石3
よりも砥粒粒度の細かい仕上げ加工用の回転砥石5によ
って溝の仕上げ加工が行われるが、この仕上げ加工用砥
石5は、図4の(a)(b)に示すように、外周縁部が
V字状断面から頂点部を切除した形状に形成されると共
に、傾斜する両研削面には、先端には突き抜けない複数
の溝状の凹部6…が周方向に適当な間隔で放射状に設け
られている。
In the rough machining step, as shown in FIG. 3, groove machining is performed using a rotary grindstone 3 for rough machining whose outer peripheral edge has a V-shaped cross section and whose abrasive grain size is coarse. Next, the rough processing grindstone 3
Finishing of the groove is performed using a rotary grindstone 5 for finishing which has a finer abrasive grain size than the grinding wheel 5, but as shown in FIGS. It is formed in the shape of a V-shaped cross section with the apex removed, and both inclined grinding surfaces are provided with a plurality of groove-shaped recesses 6 radially arranged at appropriate intervals in the circumferential direction at the tips. ing.

【0010】上記形状の仕上げ加工用砥石5によって、
図1に示すように、粗加工用砥石3により形成された溝
2…における頂点部近傍を除く傾斜面(図中二点鎖線で
示す面)が研削され、仕上げ加工が施される。
[0010] With the finishing grindstone 5 having the above shape,
As shown in FIG. 1, the inclined surfaces (surfaces indicated by two-dot chain lines in the figure) of the grooves 2 formed by the rough processing grindstone 3 except for the vicinity of the apex portions are ground and finished.

【0011】その後、図5に示すように、各溝2…の一
方の斜面部2a…に軟磁性薄膜7…が磁気ヘッドのトラ
ック幅に相当する膜厚でそれぞれ形成される。次いで、
図6に示すように、各溝2…を表面から埋めるように溶
着ガラス8がモールドされ、次いで、図7に示すように
、基板1に形成された各溝2…の表面側頂点位置に一致
するまで、上記溶着ガラス8が平面状に研磨される。
Thereafter, as shown in FIG. 5, a soft magnetic thin film 7 is formed on one slope portion 2a of each groove 2 to a thickness corresponding to the track width of the magnetic head. Then,
As shown in FIG. 6, welded glass 8 is molded to fill each groove 2 from the surface, and then, as shown in FIG. The welded glass 8 is polished into a flat surface until the welded glass 8 is polished.

【0012】次に、図8に示すように、基板1にコイル
巻線用窓9やコイル巻線固定溝10が形成され、また、
上記溶着ガラス8における研磨面に、SiO2 等のギ
ャップ材が膜付けされてギャップ面12が形成され、片
側コアブロック11として作製される。
Next, as shown in FIG. 8, a coil winding window 9 and a coil winding fixing groove 10 are formed on the substrate 1, and
A film of gap material such as SiO2 is applied to the polished surface of the welded glass 8 to form a gap surface 12, and a one-sided core block 11 is produced.

【0013】この後、図9に示すように、2個の片側コ
アブロック11・11がそれぞれのギャップ面12・1
2を対面させた状態で加圧固定され、溶着接合されて、
コアブロック13として形成される。次に、このコアブ
ロック13が図中破線に沿って所定のピッチBで順次切
断され、図10に示すように、磁気ヘッドチップ14と
して作製される。さらに、この磁気ヘッドチップ14に
、図11に示すように、磁気テープが摺接するテープ摺
動面(図において上端面)16の研磨が施される一方、
コイル巻線15が施されて、磁気ヘッド17が作製され
る。
After this, as shown in FIG.
2 are pressed and fixed facing each other, welded and joined,
It is formed as a core block 13. Next, this core block 13 is sequentially cut at a predetermined pitch B along the broken line in the figure to produce a magnetic head chip 14 as shown in FIG. Furthermore, as shown in FIG. 11, this magnetic head chip 14 is polished on the tape sliding surface (upper end surface in the figure) 16 on which the magnetic tape slides.
Coil winding 15 is applied to produce magnetic head 17.

【0014】このように、上記の製造方法では、基板1
に溝2…が形成される際、まず、粗加工用の回転砥石3
を用いて断面V字状の溝2…が形成され、次に、粗加工
用砥石3よりも砥粒粒度が細かく、研削面がV字状断面
から頂点部を切除した形状の回転砥石5により、粗加工
用砥石3により形成された溝2…の頂点部を除く傾斜面
の仕上げ加工が行われる。
In this way, in the above manufacturing method, the substrate 1
When grooves 2 are formed in the
Grooves 2 with a V-shaped cross section are formed using a rotary grindstone 5, which has a finer abrasive grain size than the rough processing grindstone 3, and whose grinding surface has a shape in which the apex is cut from the V-shaped cross section. , finishing processing is performed on the sloped surfaces excluding the apex portions of the grooves 2 formed by the rough processing grindstone 3.

【0015】したがって、仕上げ加工を行う際、基板と
接して研削を行う面積は、粗加工溝の傾斜全面を加工す
るよりも小さくなり、研削時における仕上げ加工用砥石
5の負担が軽減される。また、この仕上げ加工用砥石5
の研削面に凹部6…が放射状に設けられていることによ
り、砥石5の砥粒及び結合剤への冷却効果が増大し、砥
粒の損耗及び脱落、結合剤の軟化等が抑制される。この
ように、仕上げ加工用砥石の研削抵抗および、温度上昇
が低減されることにより、基板1に形成された溝2…に
生じるクラックやワレ、凝着が抑制され、溝壁面2a…
に形成される軟磁性薄膜7…の特性劣下が防止される。
[0015] Therefore, when performing finishing processing, the area to be ground in contact with the substrate is smaller than when processing the entire inclined surface of the rough processing groove, and the load on the finishing grindstone 5 during grinding is reduced. In addition, this finishing whetstone 5
Since the recesses 6 are radially provided on the grinding surface of the grinding surface, the cooling effect on the abrasive grains and the binder of the grinding wheel 5 is increased, and wear and drop of the abrasive grains, softening of the binder, etc. are suppressed. In this way, by reducing the grinding resistance of the finishing grindstone and the temperature rise, cracks, cracks, and adhesion occurring in the grooves 2 formed in the substrate 1 are suppressed, and the groove wall surfaces 2a...
Deterioration of the characteristics of the soft magnetic thin film 7 formed in the soft magnetic thin film 7 is prevented.

【0016】なお、上記実施例では、基板1の素材とし
て結晶化ガラスやセラミックス等を用いた例を挙げて説
明したが、感光性結晶化ガラス等のその他の非磁性体材
料や、さらに、フェライト等の磁性体材料を用いて構成
する場合にも本発明の適用が可能である。
In the above embodiment, the substrate 1 is made of crystallized glass, ceramics, etc., but other non-magnetic materials such as photosensitive crystallized glass, and ferrite may also be used. The present invention can also be applied to a structure using magnetic materials such as.

【0017】[0017]

【発明の効果】本発明に係る磁気ヘッドの製造方法は、
以上のように、粗加工用砥石よりも砥粒粒度の細かい仕
上げ加工用砥石の研削面を略V字状断面から頂点部を切
除した形状で形成すると共に、上記研削面に凹部を設け
、この仕上げ加工用砥石によって、粗加工用の砥石によ
り形成された断面略V字状の溝における頂点部近傍を除
く傾斜表面の仕上げ加工を行うものである。
[Effects of the Invention] The method for manufacturing a magnetic head according to the present invention includes:
As described above, the grinding surface of the finishing grindstone, which has a finer abrasive grain size than that of the roughing grindstone, is formed by cutting off the apex from the approximately V-shaped cross section, and the grinding surface is provided with a recess. The finishing grindstone is used to finish the sloped surface of the groove, which has a substantially V-shaped cross section, formed by the rough processing grindstone, except for the vicinity of the apex.

【0018】そえゆえ、溝の仕上げ加工時における仕上
げ加工用砥石と基板との接触面積が従来よりも小さな加
工が行われ、したがって、加工力が小さくなると共に、
加工中の砥石の冷却効果が増大する。この結果、溝壁面
におけるクラックやワレ、凝着が起こりにくく、溝壁面
に形成される軟磁性薄膜の特性劣下が抑制されるという
効果を奏する。
Therefore, when finishing the groove, the contact area between the finishing grindstone and the substrate is smaller than before, and therefore, the processing force is reduced, and
Increases the cooling effect of the grindstone during processing. As a result, cracks, cracks, and adhesion on the groove wall surfaces are less likely to occur, and deterioration in the characteristics of the soft magnetic thin film formed on the groove wall surfaces is suppressed.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の一実施例における基板に形成された溝
の仕上げ加工工程を示す要部断面図である。
FIG. 1 is a sectional view of a main part showing a finishing process of a groove formed on a substrate in an embodiment of the present invention.

【図2】粗加工用回転砥石により溝が形成された上記基
板の斜視図である。
FIG. 2 is a perspective view of the substrate in which grooves have been formed using a rotary grindstone for rough processing.

【図3】上記基板に粗加工用回転砥石で溝を形成する工
程を示す要部断面図である。
FIG. 3 is a cross-sectional view of a main part showing a step of forming grooves on the substrate using a rotary grindstone for rough processing.

【図4】上記仕上げ加工用砥石の形状を示す図であって
、aは部分断面図、bは正面図である。
FIG. 4 is a diagram showing the shape of the finishing grindstone, in which a is a partial sectional view and b is a front view.

【図5】仕上げ加工用砥石によって形成された上記溝の
一方の斜面部に軟磁性薄膜が設けられた基板の要部断面
図である。
FIG. 5 is a sectional view of a main part of a substrate in which a soft magnetic thin film is provided on one slope of the groove formed by a finishing grindstone.

【図6】上記溝が溶着ガラスによってモ−ルドされた基
板の要部断面図である。
FIG. 6 is a sectional view of a main part of a substrate in which the grooves are molded with fused glass.

【図7】上記溶着ガラスの表面が平面状に研磨された基
板の要部断面図である。
FIG. 7 is a sectional view of a main part of a substrate in which the surface of the welded glass is polished into a flat surface.

【図8】上記基板にコイル巻線用窓、コイル巻線固定溝
、およびギャップ材を設けた片側コアブッロクの斜視図
である。
FIG. 8 is a perspective view of a one-sided core block in which a coil winding window, a coil winding fixing groove, and a gap material are provided on the substrate.

【図9】2個の上記片側コアブロックを対面させた状態
で接合して得られたコアブロックの斜視図である。
FIG. 9 is a perspective view of a core block obtained by joining the two one-sided core blocks facing each other.

【図10】上記コアブロックから切り出された磁気ヘッ
ドチップの斜視図である。
FIG. 10 is a perspective view of a magnetic head chip cut out from the core block.

【図11】上記磁気ヘッドチップにコイル巻線、テープ
摺動面研磨を施して得られた磁気ヘッドの斜視図である
FIG. 11 is a perspective view of a magnetic head obtained by subjecting the magnetic head chip to coil winding and tape sliding surface polishing.

【図12】従来例における溝が形成された基板の要部断
面図である。
FIG. 12 is a cross-sectional view of a main part of a substrate in which grooves are formed in a conventional example.

【符号の説明】[Explanation of symbols]

1    基板 2    溝 3    粗加工用砥石 5    仕上げ加工用砥石 1    Substrate 2 Groove 3 Rough processing grindstone 5. Grindstone for finishing processing

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】基板表面に粗加工用の回転砥石によって断
面略V字状の溝を形成した後、上記粗加工用の回転砥石
よりも砥粒粒度の細かい仕上げ加工用の回転砥石によっ
て溝表面の仕上げ加工を行う磁気ヘッドの製造方法にお
いて、上記仕上げ加工用砥石の研削面を略V字状断面か
ら頂点部を切除した形状で形成すると共に、上記研削面
に凹部を設け、この仕上げ加工用砥石によって、粗加工
用砥石で形成された溝における頂点部近傍を除く傾斜表
面の仕上げ加工を行うことを特徴とする磁気ヘッドの製
造方法。
1. After forming a groove having a substantially V-shaped cross section on the surface of a substrate using a rotary grindstone for rough processing, the groove surface is polished using a rotary grindstone for finishing processing which has a finer abrasive grain size than the rotary grindstone for rough processing. In the method of manufacturing a magnetic head for finishing, the grinding surface of the finishing grindstone is formed in a shape with the apex removed from a substantially V-shaped cross section, and a recess is provided in the grinding surface, A method for manufacturing a magnetic head, comprising using a grindstone to finish an inclined surface of a groove formed by a rough processing grindstone, excluding the vicinity of the apex.
JP2720591A 1991-02-21 1991-02-21 Manufacture of magnetic head Pending JPH04265505A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2720591A JPH04265505A (en) 1991-02-21 1991-02-21 Manufacture of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2720591A JPH04265505A (en) 1991-02-21 1991-02-21 Manufacture of magnetic head

Publications (1)

Publication Number Publication Date
JPH04265505A true JPH04265505A (en) 1992-09-21

Family

ID=12214602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2720591A Pending JPH04265505A (en) 1991-02-21 1991-02-21 Manufacture of magnetic head

Country Status (1)

Country Link
JP (1) JPH04265505A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006135085A1 (en) * 2005-06-15 2006-12-21 Bosch Corporation High-pressure seal structure, processing method for high-pressure seal surface, and fuel injection valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006135085A1 (en) * 2005-06-15 2006-12-21 Bosch Corporation High-pressure seal structure, processing method for high-pressure seal surface, and fuel injection valve
JPWO2006135085A1 (en) * 2005-06-15 2009-01-08 ボッシュ株式会社 High pressure seal structure, high pressure seal surface processing method, and fuel injection valve

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