JPH044740U - - Google Patents
Info
- Publication number
- JPH044740U JPH044740U JP4614790U JP4614790U JPH044740U JP H044740 U JPH044740 U JP H044740U JP 4614790 U JP4614790 U JP 4614790U JP 4614790 U JP4614790 U JP 4614790U JP H044740 U JPH044740 U JP H044740U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- chamber
- barrel
- type dry
- etching device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 5
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図ａ，ｂはこの考案の一実施例のバレル型
ドライエツチング装置のチヤンバ構造の側面図お
よび断面図である。第２図ａ，ｂは従来のバレル
型ドライエツチング装置のチヤンバ構造の側面図
と断面図である。
１……チヤンバ、２……ウエーハ、３……ボー
ト、４……ガス導入口、５……ガス排気口。
1A and 1B are a side view and a sectional view of a chamber structure of a barrel type dry etching apparatus according to an embodiment of the present invention. FIGS. 2a and 2b are a side view and a sectional view of the chamber structure of a conventional barrel type dry etching apparatus. 1...Chamber, 2...Wafer, 3...Boat, 4...Gas inlet, 5...Gas exhaust port.
Claims (1)
し、高周波をかけてプラズマを形成してドライエ
ツチング処理するバレル型ドライエツチング装置
において、 上記チヤンバのガス吹出し口および排気口をチ
ヤンバの中心軸に対して放射状に多数配置したこ
とを特徴とするバレル型ドライエツチング装置。[Scope of Claim for Utility Model Registration] In a barrel-type dry etching device that performs dry etching by creating a vacuum inside a cylindrical chamber, flowing gas, and applying high frequency to form plasma, the gas outlet and exhaust of the chamber are A barrel type dry etching device characterized by a plurality of ports arranged radially around the central axis of the chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4614790U JPH044740U (en) | 1990-04-26 | 1990-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4614790U JPH044740U (en) | 1990-04-26 | 1990-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044740U true JPH044740U (en) | 1992-01-16 |
Family
ID=31560970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4614790U Pending JPH044740U (en) | 1990-04-26 | 1990-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044740U (en) |
-
1990
- 1990-04-26 JP JP4614790U patent/JPH044740U/ja active Pending