JPS6426370U - - Google Patents
Info
- Publication number
- JPS6426370U JPS6426370U JP12154087U JP12154087U JPS6426370U JP S6426370 U JPS6426370 U JP S6426370U JP 12154087 U JP12154087 U JP 12154087U JP 12154087 U JP12154087 U JP 12154087U JP S6426370 U JPS6426370 U JP S6426370U
- Authority
- JP
- Japan
- Prior art keywords
- strip
- processed material
- shaped processed
- passage
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図乃至第４図は従来例の截断側面図、第５
図及び第６図は本考案の実施例の截断側面図であ
る。
１……帯状処理物、２……真空処理室、３……
導入口、４……筺体、５，５ａ……通路、６，６
……ロール、９，１１……真空排気口、１０……
中空室、１２……中間排気室。
Figures 1 to 4 are cutaway side views of the conventional example;
FIG. 6 is a cutaway side view of an embodiment of the present invention. 1... Strip-shaped processed material, 2... Vacuum processing chamber, 3...
Inlet, 4... Housing, 5, 5a... Passage, 6, 6
...Roll, 9, 11...Vacuum exhaust port, 10...
Hollow chamber, 12... intermediate exhaust chamber.
Claims (1)
導入口の前方に接続して、該帯状処理物が通過す
る通路を備えた筺体を設け、該通路内の中間に、
該帯状処理物に接して回転する中間ロールが収容
され且つ真空排気口を有する中空室を複数個設け
るようにしたものに於いて、各中空室間の通路に
更に真空排気口を有する中間排気室を設けたこと
を特徴とする帯状処理物の真空シール装置。 A casing is provided in front of an inlet for introducing the strip-shaped processed material from the outside into the vacuum processing chamber, and includes a passage through which the strip-shaped processed material passes, and in the middle of the passage,
An intermediate exhaust chamber having a plurality of hollow chambers each having a vacuum exhaust port and containing an intermediate roll that rotates in contact with the strip-shaped processed material, and further having a vacuum exhaust port in the passage between each hollow chamber. A vacuum sealing device for a strip-shaped processed material, characterized in that it is provided with:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12154087U JPS6426370U (en) | 1987-08-10 | 1987-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12154087U JPS6426370U (en) | 1987-08-10 | 1987-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426370U true JPS6426370U (en) | 1989-02-14 |
Family
ID=31368639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12154087U Pending JPS6426370U (en) | 1987-08-10 | 1987-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426370U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58131470A (en) * | 1982-01-29 | 1983-08-05 | Fuji Photo Film Co Ltd | Roller system seal device |
| JPS6223982A (en) * | 1985-07-23 | 1987-01-31 | Ishikawajima Harima Heavy Ind Co Ltd | Sealing device for continuous vacuum treatment device |
-
1987
- 1987-08-10 JP JP12154087U patent/JPS6426370U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58131470A (en) * | 1982-01-29 | 1983-08-05 | Fuji Photo Film Co Ltd | Roller system seal device |
| JPS6223982A (en) * | 1985-07-23 | 1987-01-31 | Ishikawajima Harima Heavy Ind Co Ltd | Sealing device for continuous vacuum treatment device |