JPH0446546U - - Google Patents
Info
- Publication number
- JPH0446546U JPH0446546U JP8770290U JP8770290U JPH0446546U JP H0446546 U JPH0446546 U JP H0446546U JP 8770290 U JP8770290 U JP 8770290U JP 8770290 U JP8770290 U JP 8770290U JP H0446546 U JPH0446546 U JP H0446546U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating shaft
- wafers
- shaft
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8770290U JPH0446546U (OSRAM) | 1990-08-22 | 1990-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8770290U JPH0446546U (OSRAM) | 1990-08-22 | 1990-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0446546U true JPH0446546U (OSRAM) | 1992-04-21 |
Family
ID=31820295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8770290U Pending JPH0446546U (OSRAM) | 1990-08-22 | 1990-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446546U (OSRAM) |
-
1990
- 1990-08-22 JP JP8770290U patent/JPH0446546U/ja active Pending
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