JPH0445265Y2 - - Google Patents
Info
- Publication number
- JPH0445265Y2 JPH0445265Y2 JP1985058529U JP5852985U JPH0445265Y2 JP H0445265 Y2 JPH0445265 Y2 JP H0445265Y2 JP 1985058529 U JP1985058529 U JP 1985058529U JP 5852985 U JP5852985 U JP 5852985U JP H0445265 Y2 JPH0445265 Y2 JP H0445265Y2
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- tube
- sealed
- indium
- flanges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 17
- 229910052738 indium Inorganic materials 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 6
- 230000008878 coupling Effects 0.000 description 10
- 238000010168 coupling process Methods 0.000 description 10
- 238000005859 coupling reaction Methods 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000001010 compromised effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Landscapes
- Lasers (AREA)
Description
【考案の詳細な説明】
産業上の利用分野
本考案はガラス管内にレーザガスを封入した封
止管ガスレーザに関するものである。[Detailed Description of the Invention] Industrial Application Field The present invention relates to a sealed tube gas laser in which a laser gas is sealed in a glass tube.
従来の技術
従来例の封止管CO2レーザ放電管の原理構成図
を第２図に示す。同図に示すのは内部鏡形封止管
であつて１は放電管、２は水冷用ジヤケツト、３
は出力結合鏡、４は全反射鏡である。実際には図
に示す他にも放電用電極、放電用電源、冷却水出
入口、光学アラインメント用機構などの構成要素
が用いられるが、それらは本考案に関係がなく、
かつ公知の技術であるのでここでは省略する。出
力結合鏡３および全反射鏡４は通常はガラス製の
放電管１に接着剤５を用いて接合されている。Prior Art FIG. 2 shows the basic configuration of a conventional sealed CO 2 laser discharge tube. The figure shows an internal mirror-shaped sealed tube, where 1 is a discharge tube, 2 is a water cooling jacket, and 3 is a water cooling jacket.
is an output coupling mirror, and 4 is a total reflection mirror. In reality, components such as discharge electrodes, discharge power sources, cooling water inlets and outlets, and optical alignment mechanisms are used in addition to those shown in the figure, but these are not related to the present invention.
Since this is a well-known technique, it will be omitted here. The output coupling mirror 3 and the total reflection mirror 4 are usually bonded to the discharge tube 1 made of glass using an adhesive 5.
考案が解決しようとする問題点
上記した従来の封止管CO2レーザは構造が簡単
で製造も容易であるが、温度変化に対して気密性
の破壊が生じやすい欠点がある。すなわち、出力
結合鏡３、全反射鏡４などの光学部品と、放電管
１と、接着剤５の熱膨張係数がそれぞれ異なつて
いるので、レーザ管に温度変化が起きたときに放
電管１と光学部品との気密性が変化し、リークを
生じてレーザ管としての動作が不可能になつてし
まう。Problems to be Solved by the Invention Although the conventional sealed tube CO 2 laser described above has a simple structure and is easy to manufacture, it has the drawback that the airtightness is easily destroyed due to temperature changes. In other words, the thermal expansion coefficients of the optical components such as the output coupling mirror 3 and the total reflection mirror 4, the discharge tube 1, and the adhesive 5 are different, so when a temperature change occurs in the laser tube, the thermal expansion coefficients of the discharge tube 1 and the adhesive 5 are different. The airtightness with the optical components changes, causing leaks and making it impossible to operate as a laser tube.
He−Neレーザ管ではこの気密性の破壊を防ぐ
ためにフリツトガラスにより放電管と光学部品を
接着しているが、CO2レーザでは放電管と光学部
品の材質が異なつているため、フリツトガラスを
使用することもできない。 In He-Ne laser tubes, the discharge tube and optical components are bonded together using fritted glass to prevent this hermeticity from being destroyed, but in CO 2 lasers, the discharge tube and optical components are made of different materials, so fritted glass cannot be used. I can't do it either.
本考案は以上のような問題点を解消するもの
で、封止管CO2レーザのリークの発生を防止し、
十分長い寿命を達成させるようにしたものであ
る。 This invention solves the above-mentioned problems and prevents leakage of the sealed tube CO 2 laser.
It is designed to achieve a sufficiently long life.
問題点を解決するための手段
本考案は出力結合鏡や全反射鏡などの光学部品
をインジウムを介してフランジ間に挟持し、フラ
ンジを金属パイプを介して放電管に接続した封止
管CO2レーザである。Means for Solving Problems The present invention is a sealed CO 2 tube in which optical components such as an output coupling mirror and a total reflection mirror are sandwiched between flanges via indium, and the flanges are connected to a discharge tube via a metal pipe. It's a laser.
作 用
出力結合鏡や全反射鏡などの光学部品はフラン
ジ間にインジウムのワイヤを介して挟持されてお
り、フランジを加圧することによりインジウムが
圧着され、フランジと光学部品とは気密封着され
る。一方フランジは金属パイプと接続しており、
この金属パイプが放電管にガラス封着される。し
たがつて各封着部は温度変化に対して安定に気密
性が保たれ、リークが生じることはない。Function Optical components such as output coupling mirrors and total reflection mirrors are sandwiched between flanges via indium wires, and by pressurizing the flanges, the indium is crimped and the flanges and optical components are hermetically sealed. . On the other hand, the flange is connected to a metal pipe,
This metal pipe is glass-sealed to the discharge tube. Therefore, each sealed portion maintains stable airtightness against temperature changes, and no leakage occurs.
実施例
以下本考案の実施例について図面とともに詳細
に説明する。Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
第１図に本考案の一実施例を示す。放電管１及
び冷却水用ジヤケツト２は従来技術の第１図のも
のと同一であるが、本考案では放電管１の両端に
はガラス封着された金属製パイプ６及び６′が設
けられている。これらのパイプ６，６′の端部に
はフランジ８及び８′が一体構造又は別体で設け
られている。出力結合鏡３及び全反射鏡４はそれ
らのフランジ８，８′と外側のフランジ９，９′の
間に格納される。出力結合鏡３の場合にはその内
側の面とフランジ８間及び外側の面とフランジ９
の間にインジウムワイヤ７をリング状に設置す
る。又全反射鏡４とフランジ８′の間にも同様に
インジウムワイヤ７′をリング状に設置する。こ
れらのインジウムワイヤリング７，７′はリング
をはさむ両側のフランジ８，９，８′，９′にボル
ト締めを行つて加圧圧着させる。第１図ではボル
トは図示していないが、破線の位置１０，１０′，
１１，１１′で示されている位置に配置すればよ
い。インジウムワイヤ７，７′はその両端が重な
り合うように１ターン巻き付けることが必要であ
る。インジウムワイヤとしては純度99.9％、直径
0.5mm程度のものが使用できる。 FIG. 1 shows an embodiment of the present invention. The discharge tube 1 and cooling water jacket 2 are the same as those in the prior art shown in FIG. 1, but in the present invention, metal pipes 6 and 6' sealed with glass are provided at both ends of the discharge tube 1. There is. Flanges 8 and 8' are provided at the ends of these pipes 6, 6', either integrally or separately. The output coupling mirror 3 and the total reflection mirror 4 are housed between their flanges 8, 8' and the outer flanges 9, 9'. In the case of the output coupling mirror 3, there is a gap between the inner surface and the flange 8 and between the outer surface and the flange 9.
An indium wire 7 is installed in a ring shape between them. Similarly, an indium wire 7' is installed in a ring shape between the total reflection mirror 4 and the flange 8'. These indium wire rings 7, 7' are crimped by bolting to the flanges 8, 9, 8', 9' on both sides sandwiching the rings. Although bolts are not shown in FIG. 1, the positions 10, 10', and
They may be placed at the positions indicated by 11 and 11'. The indium wires 7, 7' must be wound one turn so that their ends overlap. 99.9% purity for indium wire, diameter
Approximately 0.5mm can be used.
上記構成による封止管CO2レーザについてその
リークを検査したところ、Heリーク量は10-9
Torr・c.c.／sec以下と極くわずかであり、このリ
ーク量だけから見ればレーザ管寿命は10年以上の
長期にわたることが可能である。インジウムの融
点は157℃であるので、封止管CO2レーザは通常
は157℃より低い温度で使用される。この場合、
インジウムの蒸気圧は450℃で10-8Torr以下であ
るので、157℃以下の状態ではインジウム蒸気の
発生は十分無視できる。 When the sealed tube CO 2 laser with the above configuration was inspected for leakage, the amount of He leakage was 10 -9
The amount of leakage is extremely small, less than Torr·cc/sec, and based on this leak amount alone, the laser tube can have a long service life of more than 10 years. The melting point of indium is 157°C, so sealed tube CO2 lasers are usually used at temperatures below 157°C. in this case,
Since the vapor pressure of indium is less than 10 -8 Torr at 450°C, the generation of indium vapor can be ignored at temperatures below 157°C.
出力結合鏡３としてZnSe、全反射鏡４として
Siフランジ８，８′および金属パイプ６，６′とし
てSUS３０３、放電管として石英を使用した場
合、各々の熱膨張係数はZnSe…8.5×10-6／℃、
Si…2.4×10-6／℃、SUS３０３…16.4×10-6／
℃、石英…0.4×10-6／℃と互いに大幅に異なつ
ているが、これらの異種材料間の接合でもインジ
ウムの延性が大きいため熱膨張によるずれをイン
ジウムが十分吸収するので気密性を全く損なわ
ず、かつ対熱シヨツクに対して十分な強度を持た
せることができる。 ZnSe as output coupling mirror 3, total reflection mirror 4
When SUS303 is used for the Si flanges 8, 8' and metal pipes 6, 6', and quartz is used for the discharge tube, the coefficient of thermal expansion of each is ZnSe...8.5×10 -6 /℃,
Si…2.4×10 -6 /℃, SUS303…16.4× 10 -6 /
℃, quartz...0.4 x 10 -6 /℃, which are significantly different from each other, but even when bonding these dissimilar materials, indium has great ductility, so indium sufficiently absorbs deviations due to thermal expansion, so airtightness is not compromised at all. However, it can also have sufficient strength against heat-resistant shocks.
考案の効果
以上のように本考案は出力結合鏡や全反射鏡な
どの光学部品をフランジ間にインジウムを介して
挟持し、このフランジを金属パイプによつて放電
管にガラス封着した封止管ガスレーザで、放電管
と光学部品間の気密性接合を接着剤を用いずに加
圧したインジウム圧着法を用いて行つている為熱
膨張係数の異つた材料間で温度変化が生じた場合
でも真空リークが発生せず、レーザ管としての寿
命が著しく延長する。Effects of the invention As described above, the present invention is a sealed tube in which optical components such as an output coupling mirror and a total reflection mirror are sandwiched between flanges with indium interposed between them, and the flanges are glass-sealed to the discharge tube using a metal pipe. The airtight bonding between the discharge tube and the optical components is performed using a gas laser using an indium pressure bonding method that uses pressure without using adhesives, so even if there is a temperature change between materials with different coefficients of thermal expansion, the vacuum can be maintained. No leaks occur, significantly extending the life of the laser tube.
第１図は本考案による封止管ガスレーザの構成
を示す概略断面図、第２図は従来の封止管ガスレ
ーザの構成を示す概略断面図である。
１……放電管、３……出力結合鏡、４……全反
射鏡、６，６′……金属パイプ、７，７′……イン
ジウムワイヤ、８，８′，９，９′……フランジ。
FIG. 1 is a schematic sectional view showing the structure of a sealed tube gas laser according to the present invention, and FIG. 2 is a schematic sectional view showing the structure of a conventional sealed tube gas laser. 1... Discharge tube, 3... Output coupling mirror, 4... Total reflection mirror, 6, 6'... Metal pipe, 7, 7'... Indium wire, 8, 8', 9, 9'... Flange .
Claims (1)
部品を挟持したフランジと、前記放電管と前記フ
ランジとを連続する金属パイプとを備え、前記フ
ランジの少なくとも１つは前記金属パイプと一体
構造に形成され、前記放電管と前記金属パイプは
ガラス封着されており、前記光学部品と前記フラ
ンジ間にインジウムが機械的に加圧圧着されてい
ることを特徴とする封止管ガスレーザ。 A discharge tube, a flange sandwiching an optical component at at least one end of the discharge tube, and a metal pipe that connects the discharge tube and the flange, and at least one of the flanges is formed integrally with the metal pipe. A sealed tube gas laser characterized in that the discharge tube and the metal pipe are sealed with glass, and indium is mechanically pressurized and bonded between the optical component and the flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985058529U JPH0445265Y2 (en) | 1985-04-19 | 1985-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985058529U JPH0445265Y2 (en) | 1985-04-19 | 1985-04-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61174763U JPS61174763U (en) | 1986-10-30 |
| JPH0445265Y2 true JPH0445265Y2 (en) | 1992-10-23 |
Family
ID=30584116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985058529U Expired JPH0445265Y2 (en) | 1985-04-19 | 1985-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445265Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11837429B2 (en) | 2021-06-02 | 2023-12-05 | Nuflare Technology, Inc. | Blanking aperture array unit |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58178580A (en) * | 1982-04-13 | 1983-10-19 | Matsushita Electric Ind Co Ltd | Sealing method for optical part of laser tube |
| JPS59222983A (en) * | 1983-06-02 | 1984-12-14 | Matsushita Electric Ind Co Ltd | Sealing method of optical part for laser tube |
| JPS6060791A (en) * | 1983-09-13 | 1985-04-08 | Hitachi Ltd | Window for laser beam |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59181405U (en) * | 1983-05-19 | 1984-12-04 | 松下電器産業株式会社 | Optical component holding device |
-
1985
- 1985-04-19 JP JP1985058529U patent/JPH0445265Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58178580A (en) * | 1982-04-13 | 1983-10-19 | Matsushita Electric Ind Co Ltd | Sealing method for optical part of laser tube |
| JPS59222983A (en) * | 1983-06-02 | 1984-12-14 | Matsushita Electric Ind Co Ltd | Sealing method of optical part for laser tube |
| JPS6060791A (en) * | 1983-09-13 | 1985-04-08 | Hitachi Ltd | Window for laser beam |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11837429B2 (en) | 2021-06-02 | 2023-12-05 | Nuflare Technology, Inc. | Blanking aperture array unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61174763U (en) | 1986-10-30 |
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