JPH0445120B2 - - Google Patents

Info

Publication number
JPH0445120B2
JPH0445120B2 JP61178967A JP17896786A JPH0445120B2 JP H0445120 B2 JPH0445120 B2 JP H0445120B2 JP 61178967 A JP61178967 A JP 61178967A JP 17896786 A JP17896786 A JP 17896786A JP H0445120 B2 JPH0445120 B2 JP H0445120B2
Authority
JP
Japan
Prior art keywords
sliding
sliding body
air
guide rail
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61178967A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6337288A (ja
Inventor
Nobumichi Takahata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miyachi Systems Co Ltd
Original Assignee
Miyachi Systems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miyachi Systems Co Ltd filed Critical Miyachi Systems Co Ltd
Priority to JP17896786A priority Critical patent/JPS6337288A/ja
Publication of JPS6337288A publication Critical patent/JPS6337288A/ja
Publication of JPH0445120B2 publication Critical patent/JPH0445120B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP17896786A 1986-07-31 1986-07-31 エア浮上式摺動体の構造 Granted JPS6337288A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17896786A JPS6337288A (ja) 1986-07-31 1986-07-31 エア浮上式摺動体の構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17896786A JPS6337288A (ja) 1986-07-31 1986-07-31 エア浮上式摺動体の構造

Publications (2)

Publication Number Publication Date
JPS6337288A JPS6337288A (ja) 1988-02-17
JPH0445120B2 true JPH0445120B2 (OSRAM) 1992-07-23

Family

ID=16057798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17896786A Granted JPS6337288A (ja) 1986-07-31 1986-07-31 エア浮上式摺動体の構造

Country Status (1)

Country Link
JP (1) JPS6337288A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6442857B1 (en) * 2000-11-10 2002-09-03 Toto Ltd. Portable surface inspector

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034740B2 (ja) * 1976-02-27 1985-08-10 株式会社ニコン 十字動載物台
JPS5547483A (en) * 1978-09-30 1980-04-03 Tokyo Shibaura Electric Co Positioning device
JPS56166122U (OSRAM) * 1980-05-08 1981-12-09

Also Published As

Publication number Publication date
JPS6337288A (ja) 1988-02-17

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