JPS6337288A - エア浮上式摺動体の構造 - Google Patents

エア浮上式摺動体の構造

Info

Publication number
JPS6337288A
JPS6337288A JP17896786A JP17896786A JPS6337288A JP S6337288 A JPS6337288 A JP S6337288A JP 17896786 A JP17896786 A JP 17896786A JP 17896786 A JP17896786 A JP 17896786A JP S6337288 A JPS6337288 A JP S6337288A
Authority
JP
Japan
Prior art keywords
sliding
sliding body
air
guide rail
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17896786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445120B2 (OSRAM
Inventor
高畑　宣道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miyachi Systems Co Ltd
Original Assignee
Miyachi Systems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miyachi Systems Co Ltd filed Critical Miyachi Systems Co Ltd
Priority to JP17896786A priority Critical patent/JPS6337288A/ja
Publication of JPS6337288A publication Critical patent/JPS6337288A/ja
Publication of JPH0445120B2 publication Critical patent/JPH0445120B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP17896786A 1986-07-31 1986-07-31 エア浮上式摺動体の構造 Granted JPS6337288A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17896786A JPS6337288A (ja) 1986-07-31 1986-07-31 エア浮上式摺動体の構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17896786A JPS6337288A (ja) 1986-07-31 1986-07-31 エア浮上式摺動体の構造

Publications (2)

Publication Number Publication Date
JPS6337288A true JPS6337288A (ja) 1988-02-17
JPH0445120B2 JPH0445120B2 (OSRAM) 1992-07-23

Family

ID=16057798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17896786A Granted JPS6337288A (ja) 1986-07-31 1986-07-31 エア浮上式摺動体の構造

Country Status (1)

Country Link
JP (1) JPS6337288A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002039057A1 (fr) * 2000-11-10 2002-05-16 Toto Ltd. Dispositif portatif de mesure de la forme d'une surface

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104247A (en) * 1976-02-27 1977-09-01 Nippon Chemical Ind Cross motion stage
JPS5547483A (en) * 1978-09-30 1980-04-03 Tokyo Shibaura Electric Co Positioning device
JPS56166122U (OSRAM) * 1980-05-08 1981-12-09

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104247A (en) * 1976-02-27 1977-09-01 Nippon Chemical Ind Cross motion stage
JPS5547483A (en) * 1978-09-30 1980-04-03 Tokyo Shibaura Electric Co Positioning device
JPS56166122U (OSRAM) * 1980-05-08 1981-12-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002039057A1 (fr) * 2000-11-10 2002-05-16 Toto Ltd. Dispositif portatif de mesure de la forme d'une surface
US6442857B1 (en) 2000-11-10 2002-09-03 Toto Ltd. Portable surface inspector

Also Published As

Publication number Publication date
JPH0445120B2 (OSRAM) 1992-07-23

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