JPH0445083B2 - - Google Patents

Info

Publication number
JPH0445083B2
JPH0445083B2 JP60202415A JP20241585A JPH0445083B2 JP H0445083 B2 JPH0445083 B2 JP H0445083B2 JP 60202415 A JP60202415 A JP 60202415A JP 20241585 A JP20241585 A JP 20241585A JP H0445083 B2 JPH0445083 B2 JP H0445083B2
Authority
JP
Japan
Prior art keywords
pattern
scanning
coordinates
stage
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60202415A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262207A (ja
Inventor
Akira Tooyama
Eiji Chomaru
Hiroshi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP60202415A priority Critical patent/JPS6262207A/ja
Publication of JPS6262207A publication Critical patent/JPS6262207A/ja
Publication of JPH0445083B2 publication Critical patent/JPH0445083B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Closed-Circuit Television Systems (AREA)
JP60202415A 1985-09-12 1985-09-12 パタ−ン測長方法 Granted JPS6262207A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60202415A JPS6262207A (ja) 1985-09-12 1985-09-12 パタ−ン測長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60202415A JPS6262207A (ja) 1985-09-12 1985-09-12 パタ−ン測長方法

Publications (2)

Publication Number Publication Date
JPS6262207A JPS6262207A (ja) 1987-03-18
JPH0445083B2 true JPH0445083B2 (enrdf_load_stackoverflow) 1992-07-23

Family

ID=16457125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60202415A Granted JPS6262207A (ja) 1985-09-12 1985-09-12 パタ−ン測長方法

Country Status (1)

Country Link
JP (1) JPS6262207A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011247603A (ja) * 2010-05-24 2011-12-08 Hitachi High-Technologies Corp 荷電粒子線を用いた試料検査方法および検査装置ならびに欠陥レビュー装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106162A (en) * 1977-02-28 1978-09-14 Toshiba Corp Electron beam meter

Also Published As

Publication number Publication date
JPS6262207A (ja) 1987-03-18

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