JPH0444363U - - Google Patents
Info
- Publication number
- JPH0444363U JPH0444363U JP8643990U JP8643990U JPH0444363U JP H0444363 U JPH0444363 U JP H0444363U JP 8643990 U JP8643990 U JP 8643990U JP 8643990 U JP8643990 U JP 8643990U JP H0444363 U JPH0444363 U JP H0444363U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- arc
- anode
- cathode
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8643990U JP2503591Y2 (ja) | 1990-08-20 | 1990-08-20 | 薄膜生成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8643990U JP2503591Y2 (ja) | 1990-08-20 | 1990-08-20 | 薄膜生成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0444363U true JPH0444363U (ko) | 1992-04-15 |
| JP2503591Y2 JP2503591Y2 (ja) | 1996-07-03 |
Family
ID=31818106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8643990U Expired - Lifetime JP2503591Y2 (ja) | 1990-08-20 | 1990-08-20 | 薄膜生成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2503591Y2 (ko) |
-
1990
- 1990-08-20 JP JP8643990U patent/JP2503591Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2503591Y2 (ja) | 1996-07-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2233606A3 (en) | Plasma discharge apparatus | |
| SE7903624L (sv) | Osmeltande elektrod for plasmabagsvetsning och forfarande for framstellning derav | |
| JPH0444363U (ko) | ||
| JPS6442574A (en) | Arc power source device for vacuum arc discharge type pvd device | |
| JPH0469465U (ko) | ||
| JPH0115120Y2 (ko) | ||
| JPS627415Y2 (ko) | ||
| JPH0229149U (ko) | ||
| JPS62191100U (ko) | ||
| JPS62110266U (ko) | ||
| JPS62110264U (ko) | ||
| JPS6346465U (ko) | ||
| JPH0415832U (ko) | ||
| JPS62142081A (ja) | プラズマ切断ト−チ | |
| JPH0429659U (ko) | ||
| JPH0242427U (ko) | ||
| JPS6360300U (ko) | ||
| JPS6292550U (ko) | ||
| JPH0298451U (ko) | ||
| JPH0343201U (ko) | ||
| JPS6237200U (ko) | ||
| JPS63167132U (ko) | ||
| JPS6433576U (ko) | ||
| JPH0479420U (ko) | ||
| JPS63153526U (ko) |