JPH0444150U - - Google Patents

Info

Publication number
JPH0444150U
JPH0444150U JP8576790U JP8576790U JPH0444150U JP H0444150 U JPH0444150 U JP H0444150U JP 8576790 U JP8576790 U JP 8576790U JP 8576790 U JP8576790 U JP 8576790U JP H0444150 U JPH0444150 U JP H0444150U
Authority
JP
Japan
Prior art keywords
wafer
fixing
slide
periphery
slide grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8576790U
Other languages
English (en)
Other versions
JP2516946Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990085767U priority Critical patent/JP2516946Y2/ja
Publication of JPH0444150U publication Critical patent/JPH0444150U/ja
Application granted granted Critical
Publication of JP2516946Y2 publication Critical patent/JP2516946Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の実施例を示す断面図、第２
図は一部の拡大断面図、第３図は同横断面図、第
４図、第５図は使用例を示す正面図である。 ２……固定台、３……ウエハー、５……押えバ
ネ、６……スライド台、８……スライド溝、１０
……固定ネジ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 固定台の表面に、その表面に保持されるウエハ
    ーの周縁に向かつて延びるように複数のスライド
    溝を設けるとともに、前記スライド溝に嵌合して
    スライドし、その任意のスライド位置で固定ネジ
    によつて固定されるスライド台を設け、前記スラ
    イド台に前記ウエハーの周縁を保持する押えバネ
    を設置してなるウエハー固定装置。
JP1990085767U 1990-08-13 1990-08-13 ウエハー固定装置 Expired - Lifetime JP2516946Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990085767U JP2516946Y2 (ja) 1990-08-13 1990-08-13 ウエハー固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990085767U JP2516946Y2 (ja) 1990-08-13 1990-08-13 ウエハー固定装置

Publications (2)

Publication Number Publication Date
JPH0444150U true JPH0444150U (ja) 1992-04-15
JP2516946Y2 JP2516946Y2 (ja) 1996-11-13

Family

ID=31817130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990085767U Expired - Lifetime JP2516946Y2 (ja) 1990-08-13 1990-08-13 ウエハー固定装置

Country Status (1)

Country Link
JP (1) JP2516946Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014075436A (ja) * 2012-10-03 2014-04-24 Nissin Ion Equipment Co Ltd 基板ホルダ
JP2015133448A (ja) * 2014-01-15 2015-07-23 株式会社荏原製作所 回転保持装置及び基板洗浄装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100769A (ja) * 1982-11-30 1984-06-11 東レ株式会社 酸性染料可染性繊維構造物

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100769A (ja) * 1982-11-30 1984-06-11 東レ株式会社 酸性染料可染性繊維構造物

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014075436A (ja) * 2012-10-03 2014-04-24 Nissin Ion Equipment Co Ltd 基板ホルダ
JP2015133448A (ja) * 2014-01-15 2015-07-23 株式会社荏原製作所 回転保持装置及び基板洗浄装置

Also Published As

Publication number Publication date
JP2516946Y2 (ja) 1996-11-13

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