JPH0443668Y2 - - Google Patents

Description

[Detailed explanation of the invention] [Industrial fields of application] In recent years, the field of application of devices that apply vacuum technology has been expanding more and more. There are also remarkable advances into the field of semiconductor manufacturing, such as equipment. Most of these devices perform various processes by introducing a specific gas into a vacuum chamber and controlling the pressure to a constant level using a pressure regulating valve.

The present invention relates to a pressure regulating valve used in these devices.

[Conventional technology]

FIG. 2 shows an example of a conventional vacuum device that can control the pressure inside the reaction chamber 1 to a constant level using a gas introduction valve 2, a pressure sensor 3, and a pressure regulating valve 4.

The gas introduced into the reaction chamber 1 from the gas introduction valve 2 passes through the pressure regulating valve 4 and is exhausted by the vacuum evacuation pump 7. The evacuation speed of this vacuum system is controlled by the motor 5.
Since the pressure changes depending on the position of the disc-shaped valve body 6 attached to the rotating shaft 9 of the reaction chamber 1, the pressure can be controlled by detecting the pressure in the reaction chamber 1 with the pressure sensor 3 and controlling the rotation angle of the motor 5 with feedback. Become.

[Problem that the invention attempts to solve]

However, in the above conventional example, when the introduced gas is a reactive gas, the reaction products are most likely to adhere to the valve body 6 of the pressure regulating valve 4, which is directly exposed to the gas, and maintenance of the valve mechanism and valve body are difficult. In order to prevent the products of the operation from returning to the reaction chamber 1 as dust, it is essential to periodically disassemble, clean, and reassemble the reactor. In the case of a pressure regulating valve having such a structure, when disassembling or assembling the valve, the exhaust pipe 10 and the pump 7 in the vicinity must be removed, and therefore the workability cannot be said to be good. Further, since the airtight seal portion is disassembled in more parts than necessary, there is a problem in that the frequency of occurrence of airtight failure after assembly increases.

[Means for solving problems]

The present invention improves the maintainability of the pressure regulating valve 4 connected to a reaction chamber using a reaction gas, and
The pressure regulating valve 4 can be easily cleaned, maintained and inspected without disassembling the surrounding exhaust pipe 10, etc., improving work efficiency, and minimizing disassembly of airtight parts to ensure airtightness after assembly. The present invention aims to provide a pressure regulating valve that can significantly reduce the frequency of failures.

That is, as shown in the first diagram, the pressure regulating valve 4 of the present invention has an air gap between an exhaust pipe 10 airtightly connected to the reaction chamber 1 and a vacuum pump 7 for evacuating the inside of the reaction chamber 1.
The valve body 12 is airtightly connected, the valve body 6 is placed inside the valve body 12, a through hole 13 for taking out the valve body is formed on one side of the valve body 12, and a through hole 13 for taking out the valve body is formed around the through hole 13. A rotating shaft 9 of a motor 5 fixed to this flange 11 is airtightly supported on the flange 11, and a valve body 6 is attached to this rotating shaft 9. It is.

[Effect]

To disassemble the pressure regulating valve 4, remove the flange 11 to which the motor 5 is fixed from the valve body 12, and take out the valve body 6 attached to the rotating shaft 9 of the motor 5 from the valve body 12 through the through hole 13 for taking out the valve body. This is achieved by

In this way, just by removing the flange 11 along with the motor 5, valve body 6, and rotating shaft 9 from the valve body 12,
Valve body 12, exhaust pipe 10, and vacuum pump 7
It is not necessary to disassemble heavy objects such as the valve body 6, and there is no need to disassemble the airtight seal part of the parts more than necessary, improving work efficiency and mainly removing and cleaning reaction products attached to the valve body 6. It is possible to perform maintenance and inspection easily.

In addition, the assembly of the pressure regulating valve 4 is performed using the valve body 12.
This can be easily accomplished by simply attaching the flange 11 together with the motor 5, the valve body 6, and the rotating shaft 9, so that the frequency of airtight failures after assembly can be significantly reduced.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view showing an embodiment of the pressure regulating valve of the present invention, in which 10 is an exhaust pipe airtightly connected to the reaction chamber 1 (see FIG. 1), and 12 is an airtightly connected exhaust pipe 10. The valve body 7 is an evacuation pump that is airtightly connected to the valve body 12.

A disc-shaped valve body 6 is disposed within the valve body 12, and a through hole 13 for taking out the valve body is formed on one side of the valve body 12. A flange 11 for sealing the through hole 13 is airtightly attached to the periphery of the through hole 13 with bolts 8 such as bolts and screws.A motor 5 is fixed to this flange 11, and a rotating shaft 9 of the motor 5 is airtightly supported on the flange 11. A disk-shaped valve body 6 within a valve body 12 is attached to this rotating shaft 9. 14 is a sealing material for maintaining airtightness.

In such a configuration, the evacuation pump 7 is operated to evacuate the inside of the reaction chamber 1 to create a vacuum state.
Next, open the gas introduction valve 2 to introduce the reaction gas into the reaction chamber 1.
It is evacuated by the vacuum evacuation pump 7 while being introduced into the interior. In this case, the reaction chamber 1 is controlled by driving the motor 5 to rotate the rotary shaft 9 and controlling the rotational position of the valve body 6 from a horizontal state to a vertical state (indicated by a broken line).
Controls the internal pressure.

To disassemble the pressure regulating valve 4, remove the bolts 8, remove the flange 11 that fixes the motor 5 from the valve body 12, and place the disc-shaped valve body 6 attached to the rotating shaft 9 of the motor 5 in a horizontal state. This is achieved by taking the valve body out of the valve body 12 through the valve body removal through hole 13.

In this way, just by removing the flange 11 along with the motor 5, valve body 6, and rotating shaft 9 from the valve body 12,
Valve body 12, exhaust pipe 10, and vacuum pump 7
There is no need to disassemble heavy objects such as the valve body 6, and there is no need to disassemble the airtight seal part of the parts more than necessary, improving work efficiency and mainly removing and cleaning reaction products attached to the valve body 6. It is possible to perform maintenance and inspection easily.

In addition, the assembly of the pressure regulating valve 4 is performed using the valve body 12.
This can be easily accomplished by simply attaching the flange 11 together with the motor 5, valve body 6, and rotating shaft 9, so that the frequency of occurrence of airtightness defects after assembly can be significantly reduced.

[Effect of idea]

As described above, according to the present invention, the flange 1 is connected from the valve body 12 to the motor 5, the valve body 6, and the rotating shaft 9.
By simply removing 1, there is no need to disassemble heavy items such as the valve body 12, exhaust pipe 10, vacuum pump 7, etc., and there is no need to disassemble the airtight seal part of the parts more than necessary, improving work efficiency. However, reaction products adhering to the valve body 6 can be mainly removed and cleaned, and maintenance and inspection can be easily performed.

In addition, the assembly of the pressure regulating valve 4 is performed using the valve body 12.
This can be easily accomplished by simply attaching the flange 11 together with the motor 5, the valve body 6, and the rotating shaft 9, so that the frequency of airtight failures after assembly can be significantly reduced.

Furthermore, it can be applied even when the space around the exhaust system including the exhaust pipe 10, valve body 6, pump 7, etc. is smaller than before, and maintenance and inspection can be performed with minimal disassembly of parts, greatly improving the maintainability of the device. can contribute.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing an embodiment of the pressure regulating valve of the present invention, and FIG. 2 is a cross-sectional view showing an example of a vacuum device using a conventional pressure regulating valve. DESCRIPTION OF SYMBOLS 1... Reaction chamber, 4... Pressure adjustment valve, 5... Motor, 6... Valve body, 7... Vacuum pump, 8...
... Bolts, 9 ... Rotating shaft, 10 ... Exhaust pipe, 1
DESCRIPTION OF SYMBOLS 1...Flange, 12...Valve body, 13...Through hole for taking out the valve body, 14...Sealing material for maintaining airtightness.

Claims (1)

[Scope of utility model registration request] Between an exhaust pipe 10 airtightly connected to the reaction chamber 1 and a vacuum evacuation pump 7 for evacuating the inside of the reaction chamber 1,
The valve body 12 is airtightly connected, the valve body 6 is placed inside the valve body 12, a through hole 13 for taking out the valve body is formed on one side of the valve body 12, and a through hole 13 for taking out the valve body is formed around the through hole 13. A pressure regulating valve is provided with a flange 11 that is detachably attached to seal the flange 11, a rotary shaft 9 of a motor 5 fixed to the flange 11 is airtightly supported, and a valve body 6 is attached to the rotary shaft 9.