JPH0443486U - - Google Patents
Info
- Publication number
- JPH0443486U JPH0443486U JP1990085919U JP8591990U JPH0443486U JP H0443486 U JPH0443486 U JP H0443486U JP 1990085919 U JP1990085919 U JP 1990085919U JP 8591990 U JP8591990 U JP 8591990U JP H0443486 U JPH0443486 U JP H0443486U
- Authority
- JP
- Japan
- Prior art keywords
- galvanometer
- temperature
- unit
- processing
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims description 3
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990085919U JPH0443486U (OSRAM) | 1990-08-15 | 1990-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990085919U JPH0443486U (OSRAM) | 1990-08-15 | 1990-08-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0443486U true JPH0443486U (OSRAM) | 1992-04-13 |
Family
ID=31635290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990085919U Pending JPH0443486U (OSRAM) | 1990-08-15 | 1990-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0443486U (OSRAM) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003290944A (ja) * | 2002-04-04 | 2003-10-14 | Mitsubishi Electric Corp | レーザ加工装置 |
| JP2007021507A (ja) * | 2005-07-12 | 2007-02-01 | Mitsubishi Electric Corp | レーザ加工装置 |
| JP2014054671A (ja) * | 2007-06-25 | 2014-03-27 | Electro Scientific Industries Inc | レーザベースのウェハ加工の間にスループットを高めるようにパラメータを適応化するシステム及び方法 |
| JP2018161676A (ja) * | 2017-03-27 | 2018-10-18 | パナソニックＩｐマネジメント株式会社 | レーザ加工装置 |
-
1990
- 1990-08-15 JP JP1990085919U patent/JPH0443486U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003290944A (ja) * | 2002-04-04 | 2003-10-14 | Mitsubishi Electric Corp | レーザ加工装置 |
| JP2007021507A (ja) * | 2005-07-12 | 2007-02-01 | Mitsubishi Electric Corp | レーザ加工装置 |
| JP2014054671A (ja) * | 2007-06-25 | 2014-03-27 | Electro Scientific Industries Inc | レーザベースのウェハ加工の間にスループットを高めるようにパラメータを適応化するシステム及び方法 |
| JP2018161676A (ja) * | 2017-03-27 | 2018-10-18 | パナソニックＩｐマネジメント株式会社 | レーザ加工装置 |