JPH0443142B2 - - Google Patents
Info
- Publication number
- JPH0443142B2 JPH0443142B2 JP60015510A JP1551085A JPH0443142B2 JP H0443142 B2 JPH0443142 B2 JP H0443142B2 JP 60015510 A JP60015510 A JP 60015510A JP 1551085 A JP1551085 A JP 1551085A JP H0443142 B2 JPH0443142 B2 JP H0443142B2
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- double structure
- outside
- room
- air pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 241000894006 Bacteria Species 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002906 microbiologic effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60015510A JPS61175424A (ja) | 1985-01-31 | 1985-01-31 | クリ−ンル−ム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60015510A JPS61175424A (ja) | 1985-01-31 | 1985-01-31 | クリ−ンル−ム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61175424A JPS61175424A (ja) | 1986-08-07 |
JPH0443142B2 true JPH0443142B2 (fr) | 1992-07-15 |
Family
ID=11890807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60015510A Granted JPS61175424A (ja) | 1985-01-31 | 1985-01-31 | クリ−ンル−ム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61175424A (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000027351A (ja) * | 1998-07-09 | 2000-01-25 | Sanko Metal Ind Co Ltd | クリーンルーム |
JP3578633B2 (ja) * | 1998-07-09 | 2004-10-20 | 三晃金属工業株式会社 | クリーンルーム |
JP2003035044A (ja) * | 2001-07-23 | 2003-02-07 | Nippon Soda Co Ltd | 難分解性ハロゲン化合物の分解処理施設 |
JP2013050248A (ja) * | 2011-08-30 | 2013-03-14 | Shimizu Corp | クリーンルーム |
JP5892766B2 (ja) * | 2011-10-27 | 2016-03-23 | ダイダン株式会社 | 空調運転開始時の室圧制御方法 |
DE102012020200A1 (de) * | 2012-10-16 | 2014-04-17 | Schilling Engineering GmbH | Reinraumbegrenzungseinheit |
-
1985
- 1985-01-31 JP JP60015510A patent/JPS61175424A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61175424A (ja) | 1986-08-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |