JPH0442343U - - Google Patents
Info
- Publication number
- JPH0442343U JPH0442343U JP8205090U JP8205090U JPH0442343U JP H0442343 U JPH0442343 U JP H0442343U JP 8205090 U JP8205090 U JP 8205090U JP 8205090 U JP8205090 U JP 8205090U JP H0442343 U JPH0442343 U JP H0442343U
- Authority
- JP
- Japan
- Prior art keywords
- conductive
- ceramics
- suction surface
- porous ceramics
- vacuum chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims 3
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8205090U JPH0751221Y2 (ja) | 1990-07-31 | 1990-07-31 | 真空チャック |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8205090U JPH0751221Y2 (ja) | 1990-07-31 | 1990-07-31 | 真空チャック |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0442343U true JPH0442343U (US07541385-20090602-C00001.png) | 1992-04-10 |
| JPH0751221Y2 JPH0751221Y2 (ja) | 1995-11-22 |
Family
ID=31628523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8205090U Expired - Lifetime JPH0751221Y2 (ja) | 1990-07-31 | 1990-07-31 | 真空チャック |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0751221Y2 (US07541385-20090602-C00001.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06143073A (ja) * | 1992-10-27 | 1994-05-24 | Sony Corp | バキュームチャックプレート |
| JP2010184331A (ja) * | 2009-02-13 | 2010-08-26 | Disco Abrasive Syst Ltd | 保持テーブルおよび加工装置 |
| CN101961886A (zh) * | 2009-07-21 | 2011-02-02 | 株式会社迪思科 | 切削装置 |
| JP2011023606A (ja) * | 2009-07-16 | 2011-02-03 | Disco Abrasive Syst Ltd | 保護テープ剥離装置 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000332096A (ja) * | 1999-05-21 | 2000-11-30 | Bridgestone Corp | 製品ホルダー |
| JP4564138B2 (ja) * | 2000-07-10 | 2010-10-20 | Ｄｏｗａホールディングス株式会社 | 半導体素子の製造方法 |
| JP6078297B2 (ja) * | 2012-10-31 | 2017-02-08 | 株式会社ディスコ | 加工装置 |
| JP6223862B2 (ja) * | 2014-02-27 | 2017-11-01 | 株式会社ディスコ | 切削装置 |
-
1990
- 1990-07-31 JP JP8205090U patent/JPH0751221Y2/ja not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06143073A (ja) * | 1992-10-27 | 1994-05-24 | Sony Corp | バキュームチャックプレート |
| JP2010184331A (ja) * | 2009-02-13 | 2010-08-26 | Disco Abrasive Syst Ltd | 保持テーブルおよび加工装置 |
| JP2011023606A (ja) * | 2009-07-16 | 2011-02-03 | Disco Abrasive Syst Ltd | 保護テープ剥離装置 |
| CN101961886A (zh) * | 2009-07-21 | 2011-02-02 | 株式会社迪思科 | 切削装置 |
| JP2011023686A (ja) * | 2009-07-21 | 2011-02-03 | Disco Abrasive Syst Ltd | 切削装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0751221Y2 (ja) | 1995-11-22 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |