JPH0441808B2 - - Google Patents
Info
- Publication number
- JPH0441808B2 JPH0441808B2 JP59034786A JP3478684A JPH0441808B2 JP H0441808 B2 JPH0441808 B2 JP H0441808B2 JP 59034786 A JP59034786 A JP 59034786A JP 3478684 A JP3478684 A JP 3478684A JP H0441808 B2 JPH0441808 B2 JP H0441808B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- support plate
- support
- piezoelectric
- fulcrum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000008602 contraction Effects 0.000 description 7
- 230000004043 responsiveness Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Optical Recording Or Reproduction (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59034786A JPS60177316A (ja) | 1984-02-24 | 1984-02-24 | 光偏向装置 |
EP85101985A EP0154870A3 (de) | 1984-02-24 | 1985-02-22 | Lichtablenkeinrichtung |
US06/704,741 US4660941A (en) | 1984-02-24 | 1985-02-25 | Light deflection apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59034786A JPS60177316A (ja) | 1984-02-24 | 1984-02-24 | 光偏向装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60177316A JPS60177316A (ja) | 1985-09-11 |
JPH0441808B2 true JPH0441808B2 (US20030199744A1-20031023-C00003.png) | 1992-07-09 |
Family
ID=12423954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59034786A Granted JPS60177316A (ja) | 1984-02-24 | 1984-02-24 | 光偏向装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US4660941A (US20030199744A1-20031023-C00003.png) |
EP (1) | EP0154870A3 (US20030199744A1-20031023-C00003.png) |
JP (1) | JPS60177316A (US20030199744A1-20031023-C00003.png) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3542154A1 (de) * | 1984-12-01 | 1986-07-10 | Ngk Spark Plug Co | Lichtumlenkvorrichtung |
DE3637117A1 (de) * | 1986-10-31 | 1988-05-05 | Teldix Gmbh | Anordnung zur verkippung einer trageflaeche |
JPS6482343A (en) * | 1987-09-24 | 1989-03-28 | Teac Corp | Tracking servo-device |
US4831246A (en) * | 1988-04-14 | 1989-05-16 | The United States Of America As Represented By The Secretary Of The Air Force | Large angle off-axis beam steering of a phased telescope array |
US5245464A (en) * | 1988-08-12 | 1993-09-14 | Laser Scan Vision Aps | Deflecting instrument, controllable reflecting device herefor and use hereof |
JP2601698B2 (ja) * | 1988-08-30 | 1997-04-16 | 株式会社小松製作所 | レーザスキャナ回転検出機構 |
US5276545A (en) * | 1989-03-24 | 1994-01-04 | Nicolet Instrument Corporation | Mirror alignment and damping device |
US5260798A (en) * | 1989-11-01 | 1993-11-09 | Aura Systems, Inc. | Pixel intensity modulator |
US5040860A (en) * | 1990-08-29 | 1991-08-20 | Litton Systems, Inc. | Momentum-balance mechanism for use with a scan mirror or other component |
DE4029075C1 (US20030199744A1-20031023-C00003.png) * | 1990-09-13 | 1991-12-05 | Messerschmitt-Boelkow-Blohm Gmbh, 8012 Ottobrunn, De | |
JP2986534B2 (ja) * | 1990-11-01 | 1999-12-06 | トヨタ自動車株式会社 | オシレートミラー装置 |
US5162811A (en) * | 1991-01-31 | 1992-11-10 | Lammers Uve H W | Paraboloidal reflector alignment system using laser fringe pattern |
US5175465A (en) * | 1991-10-18 | 1992-12-29 | Aura Systems, Inc. | Piezoelectric and electrostrictive actuators |
US5239361A (en) * | 1991-10-25 | 1993-08-24 | Nicolet Instrument Corporation | Dynamic mirror alignment device for the interferometer of an infrared spectrometer |
DE4229507C2 (de) * | 1991-10-30 | 2002-03-07 | Cms Mikrosysteme Gmbh | Mikromechanischer 3-D-Aktor |
US5414565A (en) * | 1991-11-27 | 1995-05-09 | Sullivan; Mark T. | Tilting kinematic mount |
US5490015A (en) * | 1993-03-04 | 1996-02-06 | Olympus Optical Co., Ltd. | Actuator apparatus |
DE19504568A1 (de) * | 1995-02-11 | 1996-08-14 | Zeiss Carl Fa | Kippspiegelanordnung |
EP0831269B1 (de) | 1996-09-19 | 2003-09-10 | Carl Zeiss | Kippvorrichtung |
DE19739879A1 (de) | 1996-09-19 | 1998-03-26 | Zeiss Carl Fa | Kippvorrichtung |
US5992032A (en) * | 1997-02-24 | 1999-11-30 | Chung-Shan Institute Of Science & Technology | Method and apparatus for inclination measurement using piezoelectric effect |
US5883712A (en) * | 1997-05-21 | 1999-03-16 | Nicolet Instrument Corporation | Interferometer of an infrared spectrometer with dynamic moving mirror alignment |
US6230976B1 (en) * | 1998-10-19 | 2001-05-15 | Psc Scanning, Inc. | Pinless dithering assembly for data reading |
US6137622A (en) * | 1999-06-30 | 2000-10-24 | Raytheon Company | Kinematic actuator deformable mirror |
TW508653B (en) | 2000-03-24 | 2002-11-01 | Asml Netherlands Bv | Lithographic projection apparatus and integrated circuit manufacturing method |
US6411426B1 (en) * | 2000-04-25 | 2002-06-25 | Asml, Us, Inc. | Apparatus, system, and method for active compensation of aberrations in an optical system |
DE10243229B4 (de) * | 2002-09-17 | 2005-03-03 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Optischer Kleinwinkelgenerator |
US20070018070A1 (en) * | 2003-07-22 | 2007-01-25 | Polatis Ltd. | Optical element positioning devices |
US7273289B2 (en) | 2005-05-19 | 2007-09-25 | Euv Llc | Vacuum compatible, high-speed, 2-D mirror tilt stage |
DE102005023985A1 (de) * | 2005-05-20 | 2006-11-23 | Keysystech Gmbh | Laserschweißvorrichtung |
TWM376769U (en) * | 2009-08-28 | 2010-03-21 | Altek Corp | Prism type lens structure |
CN109669267B (zh) * | 2019-01-18 | 2021-01-05 | 成都理想境界科技有限公司 | 一种扫描致动器及光纤扫描器 |
CN110095860B (zh) * | 2019-04-29 | 2021-05-25 | 汕头大学 | 一种两级复合大行程高精度快速反射镜 |
CN110376705B (zh) * | 2019-07-17 | 2021-06-01 | 北京安洲科技有限公司 | 一种倾斜角度可调的多用途漫反射标准板 |
CN113189737B (zh) * | 2021-04-27 | 2022-12-30 | 重庆大学 | 一种滑轨组装型复合控制式的快速反射镜 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5340544A (en) * | 1972-05-02 | 1978-04-13 | Zeiss Stiftung | Method of producing light compatible multiple focus spectacles lens |
JPS55151614A (en) * | 1979-05-17 | 1980-11-26 | Nippon Telegr & Teleph Corp <Ntt> | Laser beam deflecting device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE724183C (de) * | 1940-08-20 | 1942-08-20 | Aeg | Anordnung zum Justieren von Objekttraegern, Blenden u. dgl. in Elektronenmikroskopen |
FR1578046A (US20030199744A1-20031023-C00003.png) * | 1968-05-10 | 1969-08-14 | ||
US3981566A (en) * | 1974-09-23 | 1976-09-21 | Eastman Kodak Company | Lever-action mountings for beam steerer mirrors |
US4161652A (en) * | 1976-12-24 | 1979-07-17 | Office National D'etudes Et De Recherches Aerospatiales | System for optically aiming a laser beam on to a target |
US4203654A (en) * | 1977-11-10 | 1980-05-20 | The United States Of America As Represented By The Secretary Of The Air Force | Line-of-sight stabilization reflector assembly |
DE3332416A1 (de) * | 1983-09-08 | 1985-03-21 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Richtspiegel mit stabilisierungseinrichtung |
-
1984
- 1984-02-24 JP JP59034786A patent/JPS60177316A/ja active Granted
-
1985
- 1985-02-22 EP EP85101985A patent/EP0154870A3/de not_active Withdrawn
- 1985-02-25 US US06/704,741 patent/US4660941A/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5340544A (en) * | 1972-05-02 | 1978-04-13 | Zeiss Stiftung | Method of producing light compatible multiple focus spectacles lens |
JPS55151614A (en) * | 1979-05-17 | 1980-11-26 | Nippon Telegr & Teleph Corp <Ntt> | Laser beam deflecting device |
Also Published As
Publication number | Publication date |
---|---|
EP0154870A3 (de) | 1987-07-22 |
EP0154870A2 (de) | 1985-09-18 |
US4660941A (en) | 1987-04-28 |
JPS60177316A (ja) | 1985-09-11 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |