JPH0441291Y2 - - Google Patents
Info
- Publication number
- JPH0441291Y2 JPH0441291Y2 JP6217084U JP6217084U JPH0441291Y2 JP H0441291 Y2 JPH0441291 Y2 JP H0441291Y2 JP 6217084 U JP6217084 U JP 6217084U JP 6217084 U JP6217084 U JP 6217084U JP H0441291 Y2 JPH0441291 Y2 JP H0441291Y2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- flow rate
- flow
- resistor
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6217084U JPS60174837U (ja) | 1984-04-28 | 1984-04-28 | 感熱抵抗型流量検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6217084U JPS60174837U (ja) | 1984-04-28 | 1984-04-28 | 感熱抵抗型流量検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60174837U JPS60174837U (ja) | 1985-11-19 |
| JPH0441291Y2 true JPH0441291Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-09-29 |
Family
ID=30591128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6217084U Granted JPS60174837U (ja) | 1984-04-28 | 1984-04-28 | 感熱抵抗型流量検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60174837U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1984
- 1984-04-28 JP JP6217084U patent/JPS60174837U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60174837U (ja) | 1985-11-19 |