JPH0440849Y2 - - Google Patents
Info
- Publication number
- JPH0440849Y2 JPH0440849Y2 JP1986154850U JP15485086U JPH0440849Y2 JP H0440849 Y2 JPH0440849 Y2 JP H0440849Y2 JP 1986154850 U JP1986154850 U JP 1986154850U JP 15485086 U JP15485086 U JP 15485086U JP H0440849 Y2 JPH0440849 Y2 JP H0440849Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier plate
- groove
- lap
- round bar
- polishing liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 24
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 19
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 1
- 239000012050 conventional carrier Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986154850U JPH0440849Y2 (en)van) | 1986-10-08 | 1986-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986154850U JPH0440849Y2 (en)van) | 1986-10-08 | 1986-10-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6360549U JPS6360549U (en)van) | 1988-04-22 |
| JPH0440849Y2 true JPH0440849Y2 (en)van) | 1992-09-25 |
Family
ID=31075019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986154850U Expired JPH0440849Y2 (en)van) | 1986-10-08 | 1986-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440849Y2 (en)van) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6923374B2 (ja) * | 2017-06-29 | 2021-08-18 | 京セラ株式会社 | 板状キャリア、研磨装置および研磨体の製造方法 |
-
1986
- 1986-10-08 JP JP1986154850U patent/JPH0440849Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6360549U (en)van) | 1988-04-22 |
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