JPH0440136Y2 - - Google Patents

Info

Publication number
JPH0440136Y2
JPH0440136Y2 JP1987111366U JP11136687U JPH0440136Y2 JP H0440136 Y2 JPH0440136 Y2 JP H0440136Y2 JP 1987111366 U JP1987111366 U JP 1987111366U JP 11136687 U JP11136687 U JP 11136687U JP H0440136 Y2 JPH0440136 Y2 JP H0440136Y2
Authority
JP
Japan
Prior art keywords
water
refrigerant
oil
heat exchanger
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987111366U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6416572U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987111366U priority Critical patent/JPH0440136Y2/ja
Publication of JPS6416572U publication Critical patent/JPS6416572U/ja
Application granted granted Critical
Publication of JPH0440136Y2 publication Critical patent/JPH0440136Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP1987111366U 1987-07-22 1987-07-22 Expired JPH0440136Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987111366U JPH0440136Y2 (enrdf_load_stackoverflow) 1987-07-22 1987-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987111366U JPH0440136Y2 (enrdf_load_stackoverflow) 1987-07-22 1987-07-22

Publications (2)

Publication Number Publication Date
JPS6416572U JPS6416572U (enrdf_load_stackoverflow) 1989-01-27
JPH0440136Y2 true JPH0440136Y2 (enrdf_load_stackoverflow) 1992-09-21

Family

ID=31349345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987111366U Expired JPH0440136Y2 (enrdf_load_stackoverflow) 1987-07-22 1987-07-22

Country Status (1)

Country Link
JP (1) JPH0440136Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007051862A (ja) * 2005-07-19 2007-03-01 Tokyo Electron Ltd 冷媒中の水分除去装置及び検査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5496448U (enrdf_load_stackoverflow) * 1977-12-20 1979-07-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007051862A (ja) * 2005-07-19 2007-03-01 Tokyo Electron Ltd 冷媒中の水分除去装置及び検査装置

Also Published As

Publication number Publication date
JPS6416572U (enrdf_load_stackoverflow) 1989-01-27

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