JPH0439646B2 - - Google Patents

Info

Publication number
JPH0439646B2
JPH0439646B2 JP61043758A JP4375886A JPH0439646B2 JP H0439646 B2 JPH0439646 B2 JP H0439646B2 JP 61043758 A JP61043758 A JP 61043758A JP 4375886 A JP4375886 A JP 4375886A JP H0439646 B2 JPH0439646 B2 JP H0439646B2
Authority
JP
Japan
Prior art keywords
polygon mirror
laser
amount
sample
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61043758A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62201413A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61043758A priority Critical patent/JPS62201413A/ja
Publication of JPS62201413A publication Critical patent/JPS62201413A/ja
Publication of JPH0439646B2 publication Critical patent/JPH0439646B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP61043758A 1986-02-28 1986-02-28 レ−ザ描画装置 Granted JPS62201413A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61043758A JPS62201413A (ja) 1986-02-28 1986-02-28 レ−ザ描画装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61043758A JPS62201413A (ja) 1986-02-28 1986-02-28 レ−ザ描画装置

Publications (2)

Publication Number Publication Date
JPS62201413A JPS62201413A (ja) 1987-09-05
JPH0439646B2 true JPH0439646B2 (enExample) 1992-06-30

Family

ID=12672659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61043758A Granted JPS62201413A (ja) 1986-02-28 1986-02-28 レ−ザ描画装置

Country Status (1)

Country Link
JP (1) JPS62201413A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01235913A (ja) * 1988-03-16 1989-09-20 Nec Corp レーザ走査装置
JPH025719U (enExample) * 1988-06-22 1990-01-16
JPH02173609A (ja) * 1988-12-26 1990-07-05 Nec Corp レーザ描画装置

Also Published As

Publication number Publication date
JPS62201413A (ja) 1987-09-05

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