JPH0438492Y2 - - Google Patents

Info

Publication number
JPH0438492Y2
JPH0438492Y2 JP3984487U JP3984487U JPH0438492Y2 JP H0438492 Y2 JPH0438492 Y2 JP H0438492Y2 JP 3984487 U JP3984487 U JP 3984487U JP 3984487 U JP3984487 U JP 3984487U JP H0438492 Y2 JPH0438492 Y2 JP H0438492Y2
Authority
JP
Japan
Prior art keywords
ferromagnetic material
ferromagnetic
crucible
cylindrical container
cylindrical body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3984487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63174404U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3984487U priority Critical patent/JPH0438492Y2/ja
Publication of JPS63174404U publication Critical patent/JPS63174404U/ja
Application granted granted Critical
Publication of JPH0438492Y2 publication Critical patent/JPH0438492Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Lubricants (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Soft Magnetic Materials (AREA)
JP3984487U 1987-03-18 1987-03-18 Expired JPH0438492Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3984487U JPH0438492Y2 (enrdf_load_html_response) 1987-03-18 1987-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3984487U JPH0438492Y2 (enrdf_load_html_response) 1987-03-18 1987-03-18

Publications (2)

Publication Number Publication Date
JPS63174404U JPS63174404U (enrdf_load_html_response) 1988-11-11
JPH0438492Y2 true JPH0438492Y2 (enrdf_load_html_response) 1992-09-09

Family

ID=30853398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3984487U Expired JPH0438492Y2 (enrdf_load_html_response) 1987-03-18 1987-03-18

Country Status (1)

Country Link
JP (1) JPH0438492Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS63174404U (enrdf_load_html_response) 1988-11-11

Similar Documents

Publication Publication Date Title
JP6302150B1 (ja) 蒸着装置、蒸着方法及び有機el表示装置の製造方法
US11008646B2 (en) Vapor deposition apparatus, vapor deposition method and method of manufacturing organic EL display apparatus
US4094764A (en) Device for cathodic sputtering at a high deposition rate
WO1987005948A1 (en) Arc coating of refractory metal compounds
JPH0438492Y2 (enrdf_load_html_response)
JPH0333778B2 (enrdf_load_html_response)
JP3162443B2 (ja) 回転陽極型x線管の製造方法および製造装置
TW200304956A (en) Vapor organic material deposition method and vapor organic material deposition apparatus using the same
JPH09228038A (ja) 中空のターゲットを備えた、陰極スパッタによりサブストレートを被覆するための装置
JPH0438490Y2 (enrdf_load_html_response)
JPH0438493Y2 (enrdf_load_html_response)
JPS60161490A (ja) 磁性流体の製造装置
JPH0622962Y2 (ja) 磁性流体の製造装置
JPH0438491Y2 (enrdf_load_html_response)
JP3189042B2 (ja) 真空成膜の材料供給装置
JP6564088B2 (ja) 蒸着装置、蒸着方法及び有機el表示装置の製造方法
Katz Metal capillary cathodes
JP4171365B2 (ja) 蒸着装置
JPH04160147A (ja) 高蒸気圧原料用蒸発源装置
JPH0647016Y2 (ja) 低温蒸着用分子線源セル
JPS61133068A (ja) 光磁気薄膜製造装置およびその製造方法
JP2002161355A (ja) 真空蒸着用蒸発材料収容容器
JPH0798865A (ja) 磁気記録媒体の製造装置
JPH06306588A (ja) 成膜装置及びそれを用いた複数の物質からなる 膜の製造方法
JPH02170967A (ja) 電子ビーム蒸着装置