JPH0438323B2 - - Google Patents
Info
- Publication number
- JPH0438323B2 JPH0438323B2 JP5653786A JP5653786A JPH0438323B2 JP H0438323 B2 JPH0438323 B2 JP H0438323B2 JP 5653786 A JP5653786 A JP 5653786A JP 5653786 A JP5653786 A JP 5653786A JP H0438323 B2 JPH0438323 B2 JP H0438323B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- light source
- optical system
- focal length
- illumination optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005286 illumination Methods 0.000 claims description 25
- 230000003287 optical effect Effects 0.000 claims description 21
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5653786A JPS62212616A (ja) | 1986-03-14 | 1986-03-14 | テレセントリツク照明光学系 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5653786A JPS62212616A (ja) | 1986-03-14 | 1986-03-14 | テレセントリツク照明光学系 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62212616A JPS62212616A (ja) | 1987-09-18 |
| JPH0438323B2 true JPH0438323B2 (enExample) | 1992-06-24 |
Family
ID=13029833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5653786A Granted JPS62212616A (ja) | 1986-03-14 | 1986-03-14 | テレセントリツク照明光学系 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62212616A (enExample) |
-
1986
- 1986-03-14 JP JP5653786A patent/JPS62212616A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62212616A (ja) | 1987-09-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |