JPH0438159Y2 - - Google Patents
Info
- Publication number
- JPH0438159Y2 JPH0438159Y2 JP18629486U JP18629486U JPH0438159Y2 JP H0438159 Y2 JPH0438159 Y2 JP H0438159Y2 JP 18629486 U JP18629486 U JP 18629486U JP 18629486 U JP18629486 U JP 18629486U JP H0438159 Y2 JPH0438159 Y2 JP H0438159Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- passage
- container
- valve
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002253 acid Substances 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000009719 polyimide resin Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 75
- 239000002245 particle Substances 0.000 description 9
- 239000012535 impurity Substances 0.000 description 7
- 238000010926 purge Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18629486U JPH0438159Y2 (cs) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18629486U JPH0438159Y2 (cs) | 1986-12-03 | 1986-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6391765U JPS6391765U (cs) | 1988-06-14 |
| JPH0438159Y2 true JPH0438159Y2 (cs) | 1992-09-07 |
Family
ID=31135723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18629486U Expired JPH0438159Y2 (cs) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438159Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5331180B2 (ja) * | 2011-09-22 | 2013-10-30 | 株式会社フジキン | ダイレクトタッチ型メタルダイヤフラム弁のバルブストローク調整方法 |
-
1986
- 1986-12-03 JP JP18629486U patent/JPH0438159Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6391765U (cs) | 1988-06-14 |
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