JPH0438159Y2 - - Google Patents

Description

[Detailed description of the invention] [Field of industrial application] The present invention relates to a container valve for a high-pressure gas container filled with a semiconductor material gas or a general high-pressure gas, etc., and is particularly concerned with a container valve for a high-pressure gas container filled with semiconductor material gas or general high-pressure gas. This relates to a high-pressure gas container valve used in containers containing gas that cannot be mixed in with the gas.

[Conventional technology]

A cross-sectional view of a conventional high-pressure gas container valve is shown in FIG.

In Fig. 3, 1 is the valve body, 2 is a gas inlet/outlet, 3 is a gas inlet/outlet passage communicating with the gas inlet/outlet 2, 4 is a kelep having a kelep seat 5 on the lower end surface, 6 is a valve seat, and 7 is a gas inlet/outlet passage. a passage; 8 a spring for pushing up the kelep 4; 9 a valve chamber for housing the kelep 4 and the spring 8; 10;
11 is a diaphragm made of a plurality of discs made of stainless steel and/or phosphor bronze, which separates the valve chamber 9 from the outside; 11 is a stem 12 and a spindle 13;
The downward force transmitted through the diaphragm 10
14 is a handle for opening and closing the valve.

In recent years, with advances in semiconductor manufacturing technology, extremely strict purity control values are required for semiconductor material gases or general high-pressure gases used for this purpose. Of course, the essential requirement is to control the particles and ensure that there are no particles with a particle size of 0.1 μm or more.

Therefore, all gas supply equipment used for the above purpose is required to have a structure that completely eliminates the parts that cause the above impurities to be mixed in.

[Problem that the invention attempts to solve]

However, the above-mentioned high-pressure gas container valve has a structure that is inconvenient for cleaning and purging the inside of the container as a pre-process of filling the container with high-purity gas, so it takes a lot of work to perform tasks such as charging and purging and vacuuming. The process was time consuming and difficult to ensure perfection.

Furthermore, since the valve chamber 9 that accommodates the spring 8 is a dead space as described above, there are disadvantages such as the fact that gas remaining in this portion becomes a factor in being mixed into the high-purity gas as an impurity.

In addition, in order to completely eliminate the contamination of particles larger than about 0.1 μm as mentioned above, the structure of the surface in contact with the gas should be as simple as possible, and the surface in contact with the gas should also be made so that there is no possibility of particles adhering to it. However, conventional high-pressure gas container valves have not taken such considerations into account.

Therefore, an object of the present invention is to provide a high-pressure gas container valve that eliminates the dead space, facilitates cleaning of the inside of the container, and prevents contamination of impurities.

[Means for solving problems]

In order to achieve the above object, the present invention provides a gas filling port and a gas usage port separately in the valve body.
A gas introduction pipe having a length that reaches approximately the bottom of the container is connected to the gas introduction passage communicating with the gas inlet passage of the filling port, and the gas outlet passage of the use port is made of heat-resistant
It is characterized in that it communicates with the gas outlet passage through an outlet opening/closing part made of a valve seat made of acid-resistant resin and a diaphragm, and the diaphragm is pressed by the upper stem via a sleeve connected to the handle.

[Effect]

Therefore, the inside of the container can be cleaned easily and efficiently by charging and purging, and since there is no dead space at the opening, impurities can be removed when purging or vacuuming the inside of the container. There is no room for gas or particles to remain.

In addition, heat-resistant and acid-resistant resin is used for the seat material of the valve opening/closing part, so 200% of water is removed from the container.
Heat treatment (baking) performed by raising the temperature to around ℃
I can do it.

Furthermore, by giving all gas contact surfaces a mirror finish by electrolytic polishing or the like, it is possible to prevent minute particles from adhering to the contact surfaces.

〔Example〕

1 and 2 show an embodiment of a high-pressure gas container valve 20 according to the present invention, FIG. 1 is a sectional front view thereof, and FIG. 2 is a partially sectional side view showing only the valve body. .

In the figure, 21 is the valve body, 22 is the filling port,
23 is a gas inlet passage, and 24 is a plurality of stainless steel diaphragms. 25 is the spindle, 26
is a plate, and 27 is a spring that pushes up the support 28 upward.

The celep 28 is connected to the diaphragm 24 on the one hand;
The filling opening/closing part 31, which is pushed down by the spindle 25 through the plate 26 and is formed by the polyimide resin lower end 29 of the celep 28 and the valve seat 30, releases the gas when filling the gas and when not filling the gas. It constitutes the function of opening and closing the filling path.

To prevent erroneous operation, the spindle 25 is not normally provided with a handle, and only during filling at the factory is a handle rod inserted into a hole 25a provided at the top of the spindle to open and close the valve.

Reference numeral 32 denotes a valve chamber that accommodates the spring 27 and the celep 28. A gas introduction passage 33 communicates with the lower part of the valve chamber 32, and the lower part of the gas introduction passage 33 has a length that almost reaches the bottom of the container. A gas introduction pipe 34 is connected by welding, and when filling with gas, the gas filling port 22, the gas inlet passage 23,
The gas introduced through the filling opening/closing part 31 and the gas introduction passage 33 is uniformly filled into the container through the gas introduction pipe 34.

Therefore, gas mixing in the container during production of mixed gas can be carried out in a short time, and even when cleaning the inside of the container by charging and purging, this can be done effectively in a small number of times. Further, it is also possible to perform continuous purging in which gas is continuously introduced from the filling port 22 and discharged from the use port 37.

38 is a gas outlet passage of the use port 37; 39
Reference numeral 40 denotes a valve seat provided at the upper end of the gas outlet passage 39, and is made of heat-resistant and acid-resistant resin, such as polyimide resin. 41 is a metal gasket, 42 is an annular gas outlet passage, and 43 is a plurality of gas passages provided in the metal gasket 41.

A diaphragm 44 is made of an acid-resistant alloy, and the periphery of the diaphragm 44 is clamped between the gasket 41 and the bonnet 45, and is fixed with a union nut 46.

Reference numeral 47 denotes an upper stem, the lower end of which abuts the upper surface of the diaphragm 44, the upper end connected to an indicator plate 49 provided in a recess on the upper surface of the handle 48, and a stepped portion 51 formed in the intermediate portion.

A sleeve 50 connected to the handle 48 presses the stepped portion 51 downward through a thrust washer 52, thereby bringing the diaphragm 44 into close contact with the valve seat 40 at the lower end of the upper stem 47.

By applying molybdenum disulfide or the like to the thrust washer 52, the sleeve 50
Since only the vertical movement is transmitted without transmitting the rotational movement of the indicator plate 49 fixed to the upper stem 47
The opening/closing degree of the valve can be indicated by the display and the rotation angle of the handle 48.

The outlet opening/closing part 53 formed by the diaphragm 44 and the valve seat 40 opens when the diaphragm 44 lifts upward due to the elasticity of the diaphragm 44 and the pressure of the filled gas. The diaphragm 44 is pressed against the valve seat 40 to close the valve.

In this way, unlike the filling port 22 side, the use port 37 side does not use the celep 28, and therefore there is no equivalent to the valve chamber 32, so that the structure is such that impurities do not accumulate.

In the above structure, when using the gas, the handle 4
8, the upper stem 47 rises, and the diaphragm 44 also lifts accordingly, the outlet opening/closing part 53 becomes open, and the gas flows through the gas outlet passage 39, the outlet opening/closing part 53, and the gas passage 4.
3, annular gas outlet passage 42, gas outlet passage 38,
It is led out of the container through the use port 37, and
It is sent to the user through a regulator etc. attached to the end of the pipe.

Note that 55 is a safety valve, 56 is a rupture disc type safety plate, and 57 is a fuse plug that melts at a constant temperature. This fuse plug 57 is removable, and is removed during heat treatment (baking) to remove moisture inside the container.

[Effect of idea]

As mentioned above, the high pressure gas container valve according to the present invention is
A gas filling port and a gas usage port are provided separately, and a gas introduction pipe is provided in the container connected to the filling port, making it easy to clean the container by charging, purging, vacuuming, etc. Moreover, since the opening and closing part of the outlet of the use port is a direct touch system between the valve seat part and the diaphragm, there is no dead space and there is no risk of residual impurities.

Furthermore, by using a heat-resistant and acid-resistant resin for the above-mentioned sheet portion, baking at about 200°C is possible, making the water removal process easier.

Furthermore, by mirror-finishing all surfaces that come into contact with gas, it is possible to prevent minute particles from adhering to the surfaces.

In this way, the high-pressure gas container valve of the present invention can be used as a container valve for containers for high-purity gases for semiconductor manufacturing and semiconductor material gases, for which extremely strict control of impurities including particles and moisture has recently been required. It satisfies the requirements of

[Brief explanation of drawings]

1 and 2 show an embodiment of the present invention,
FIG. 1 is a cross-sectional front view of a high-pressure gas container valve, FIG. 2 is a partially cross-sectional side view showing only the valve body, and FIG. 3 is a cross-sectional front view showing a conventional example. 20... High pressure gas container valve, 21... Valve body, 22... Filling port, 23... Inlet passage, 24...
...Diaphragm, 25...Spindle, 28...
Cerep, 30... Valve seat, 31... Filling opening/closing part, 33... Gas introduction passage, 34... Gas introduction pipe, 37... Usage port, 39... Gas outlet passage, 4
0...Valve seat, 44...Diaphragm, 47...
...Atsupurstem, 48...Handle, 50...
Sleeve, 53... Outlet opening/closing part.

Claims (1)

[Claims for Utility Model Registration] 1. A gas filling port 22 and a gas usage port 37 are separately provided in the valve body 21, and the gas introduction passage 33 communicating with the gas inlet passage 23 of the filling port 22 reaches approximately the bottom of the container. A gas inlet pipe 34 having a length is connected to the gas outlet passage 38 of the use port 37.
It communicates with the gas outlet passage 39 through an outlet opening/closing part 53 consisting of a valve seat 40 made of heat-resistant and acid-resistant resin and a diaphragm 44, and the diaphragm 44 is connected to the upper stem 47 through a sleeve 50 connected to a handle 48. A high-pressure gas container valve characterized by being pressed. 2 Utility model registration claim 1, characterized in that the valve seat 40 is made of polyimide resin
High-pressure gas container valve as described in Section 1. 3 The filling port 22, the gas inlet passage 23, the gas introduction passage 33, the gas introduction pipe 34, the gas outlet passage 3
9. The high-pressure gas container valve according to claim 1, wherein gas contact surfaces such as the gas outlet passage 38 and the gas outlet passage 38 are mirror-finished. 4. The high-pressure gas container valve according to claim 3, wherein the mirror finish is electrolytically polished.